Metrology Instrumentation > Sheet Resistance Measurement
Sheet resistance measurement instruments from Filmetrics®, custom-designed for semiconductor and compound semiconductor manufacturing. The Filmetrics® benchtop and automated sheet resistance mapping instruments have been developed using decades of resistance measurement innovation and technical expertise.
Sheet Resistance Measurement
4-Point Probes
Eddy Current Probes
Product Selection Guide
| Sensor Type |
Measurement Range |
Maximum Map Diameter |
XY Stage Range |
Maximum Sample Height |
|
|
MODEL |
|||||
| R50-4PP | Contact 4PP |
1mΩ/sq - 200MΩ/sq |
100mm |
100mm x 100mm |
100mm |
| R50-EC |
Non-contact eddy current |
1mΩ/sq - 50Ω/sq |
100mm |
100mm x 100mm |
100mm |
| R50-200-4PP | Contact 4PP |
1mΩ/sq - 200MΩ/sq |
200mm |
200mm round |
100mm |
| R50-200-EC |
Non-contact eddy current |
1mΩ/sq - 50Ω/sq |
200mm |
200mm round |
100mm |
| R54-200 | Contact 4PP |
1mΩ/sq - 200MΩ/sq |
200mm |
200mm x 200mm |
15mm |
| R54-200-EC |
Non-contact eddy current |
1mΩ/sq - 50Ω/sq |
200mm |
200mm x 200mm |
15mm |
| R54-300 | Contact 4PP |
1mΩ/sq - 200MΩ/sq |
300mm |
300mm round* |
15mm |
| R54-300-EC |
Non-contact eddy current |
1mΩ/sq - 50Ω/sq |
300mm |
300mm round* |
15mm |
| *Automated X-Y-θ stages |