Sheet Resistance Measurement

The Filmetrics® R54-series and R50-series sheet resistance measurement instruments have been developed based on over 45 years of KLA sheet resistance measurement innovation. The R50 measures metal layer thickness, sheet resistance and sheet conductance. The R54-series adds a light-tight enclosure, along with 300mm support, to provide metal thickness measurement solutions for semiconductor and compound semiconductor manufacturing.

Sheet Resistance Measurement

Filmetrics R50-Series

Filmetrics R50-Series

Filmetrics R54-Series

Filmetrics R54-Series

Product Selection Guide

Sensor Type Measurement
Range
Maximum
Map
Diameter
XY Stage
Range
Maximum
Sample Height
MODEL
R50-4PP Contact 4PP 1mΩ/sq -
200MΩ/sq
100mm 100mm x
100mm
100mm
R50-EC Non-contact
eddy current
1mΩ/sq -
50Ω/sq
100mm 100mm x
100mm
100mm
R50-200-4PP Contact 4PP 1mΩ/sq -
200MΩ/sq
200mm 200mm
round
100mm
R50-200-EC Non-contact
eddy current
1mΩ/sq -
50Ω/sq
200mm 200mm
round
100mm
R54-200 Contact 4PP 1mΩ/sq -
200MΩ/sq
200mm 200mm x
200mm
15mm
R54-200-EC Non-contact
eddy current
1mΩ/sq -
50Ω/sq
200mm 200mm x
200mm
15mm
R54-300 Contact 4PP 1mΩ/sq -
200MΩ/sq
300mm 300mm
round*
15mm
R54-300-EC Non-contact
eddy current
1mΩ/sq -
50Ω/sq
300mm 300mm
round*
15mm
*Automated X-Y-θ stages

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