Sheet Resistance Measurement

Sheet Resistance Measurement

The Filmetrics® R54-series and R50-series sheet resistance measurement instruments have been developed based on over 45 years of KLA sheet resistance measurement innovation. The R50 measures metal layer thickness, sheet resistance, and sheet conductance. The R54-series adds a light-tight enclosure, along with 300mm support, to provide metal thickness measurement solutions for semiconductor and compound semiconductor manufacturing.

Filmetrics R50-Series

Filmetrics R50-Series

Filmetrics R54-Series

Filmetrics R54-Series

4-Point Probes

In the world of semiconductors, electrical measurement systems are crucial for measuring and monitoring sheet resistance and resistivity of thin films and bulk materials. Filmetrics® specialises in providing benchtop metrology instruments, including sheet resistance mapping systems (4-point probe and eddy current). The 4-point probes have a variety of pin tip options, including different radii and spacing, to be used for various applications like metal measurements, implantation measurements or high impedance surface measurement. They provide a reliable and accurate way of measuring the sheet resistance of thin films and semiconductors.

4PP-TypeA

4PP-TypeA

4PP-TypeB

4PP-TypeB

4PP-TypeC

4PP-TypeC

4PP-TypeD

4PP-TypeD

4PP-TypeE

4PP-TypeE

4PP-TypeF

4PP-TypeF

4PP-TypeG

4PP-TypeG

4PP-TypeH

4PP-TypeH

4PP-TypeI

4PP-TypeI

Eddy Current Probes

Eddy current is a non-destructive, non-contact technique based on electromagnetic mutual induction to measure sheet resistance. Eddy current is ideal for measuring sheet resistance of softer samples that are not well suited to the 4-point probe contact method. Filmetrics® provides a variety of eddy current probes that are devised to measure conductive materials with precision. They are compatible with R50 and R54 EC systems and are available in three models: EC-ProbeA, EC-ProbeB, and EC-ProbeD.

EC-ProbeA Eddy Current Probe

EC-ProbeA Eddy Current Probe

EC-ProbeB Eddy Current Probe

EC-ProbeB Eddy Current Probe

EC-ProbeD Eddy Current Probe

EC-ProbeD Eddy Current Probe

Product Selection Guide

Sensor Type Measurement
Range
Maximum
Map
Diameter
XY Stage
Range
Maximum
Sample Height
MODEL
R50-4PP Contact 4PP 1mΩ/sq -
200MΩ/sq
100mm 100mm x
100mm
100mm
R50-EC Non-contact
eddy current
1mΩ/sq -
50Ω/sq
100mm 100mm x
100mm
100mm
R50-200-4PP Contact 4PP 1mΩ/sq -
200MΩ/sq
200mm 200mm
round
100mm
R50-200-EC Non-contact
eddy current
1mΩ/sq -
50Ω/sq
200mm 200mm
round
100mm
R54-200 Contact 4PP 1mΩ/sq -
200MΩ/sq
200mm 200mm x
200mm
15mm
R54-200-EC Non-contact
eddy current
1mΩ/sq -
50Ω/sq
200mm 200mm x
200mm
15mm
R54-300 Contact 4PP 1mΩ/sq -
200MΩ/sq
300mm 300mm
round*
15mm
R54-300-EC Non-contact
eddy current
1mΩ/sq -
50Ω/sq
300mm 300mm
round*
15mm
*Automated X-Y-θ stages

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