Sheet Resistance Measurement

The Filmetrics® R54-series and R50-series sheet resistance measurement instruments have been developed based on over 45 years of KLA sheet resistance measurement innovation. The R50 measures metal layer thickness, sheet resistance, and sheet conductance. The R54-series adds a light-tight enclosure, along with 300mm support, to provide metal thickness measurement solutions for semiconductor and compound semiconductor manufacturing.

In the world of semiconductors, electrical measurement systems are crucial for measuring and monitoring sheet resistance and resistivity of thin films and bulk materials. Filmetrics® specialises in providing benchtop metrology instruments, including sheet resistance mapping systems (4-point probe and eddy current). The 4-point probes have a variety of pin tip options, including different radii and spacing, to be used for various applications like metal measurements, implantation measurements or high impedance surface measurement. They provide a reliable and accurate way of measuring the sheet resistance of thin films and semiconductors.

Eddy current is a non-destructive, non-contact technique based on electromagnetic mutual induction to measure sheet resistance. Eddy current is ideal for measuring sheet resistance of softer samples that are not well suited to the 4-point probe contact method. Filmetrics® provides a variety of eddy current probes that are devised to measure conductive materials with precision. They are compatible with R50 and R54 EC systems and are available in three models: EC-ProbeA, EC-ProbeB, and EC-ProbeD.