Sheet Resistance Measurement
The Filmetrics® R54-series and R50-series sheet resistance measurement instruments have been developed based on over 45 years of KLA sheet resistance measurement innovation. The R50 measures metal layer thickness, sheet resistance and sheet conductance. The R54-series adds a light-tight enclosure, along with 300mm support, to provide metal thickness measurement solutions for semiconductor and compound semiconductor manufacturing.
Sheet Resistance Measurement
Product Selection Guide
| Sensor Type |
Measurement Range |
Maximum Map Diameter |
XY Stage Range |
Maximum Sample Height |
|
|
MODEL |
|||||
| R50-4PP | Contact 4PP |
1mΩ/sq - 200MΩ/sq |
100mm |
100mm x 100mm |
100mm |
| R50-EC |
Non-contact eddy current |
1mΩ/sq - 50Ω/sq |
100mm |
100mm x 100mm |
100mm |
| R50-200-4PP | Contact 4PP |
1mΩ/sq - 200MΩ/sq |
200mm |
200mm round |
100mm |
| R50-200-EC |
Non-contact eddy current |
1mΩ/sq - 50Ω/sq |
200mm |
200mm round |
100mm |
| R54-200 | Contact 4PP |
1mΩ/sq - 200MΩ/sq |
200mm |
200mm x 200mm |
15mm |
| R54-200-EC |
Non-contact eddy current |
1mΩ/sq - 50Ω/sq |
200mm |
200mm x 200mm |
15mm |
| R54-300 | Contact 4PP |
1mΩ/sq - 200MΩ/sq |
300mm |
300mm round* |
15mm |
| R54-300-EC |
Non-contact eddy current |
1mΩ/sq - 50Ω/sq |
300mm |
300mm round* |
15mm |
| *Automated X-Y-θ stages |