Metrology Instrumentation

Browse our metrology instrumentation from KLA, the leader in benchtop surface metrology including stylus and optical profilers, thin film measurement and sheet resistance measurement.

DIP-View is a pioneer in High Resolution Deflectometry for critical surfaces metrology applications. D-Surface View is intended to analyse flat surfaces up to 300-mm diameter. The equipment can be used for wafer surface quality control, automotive mirrors or optical components.

Accurately measure the refractive index and thickness of thin films in seconds with ULVAC's ellipsometers.

Achieve nanometre performances that meet the research needs and requirements for actual and future nanoscience applications with CSInstruments' atomic force microscopes.

Take a look at the most versatile 2D / 3D imaging system for research, education, and precision manufacturing developed by Microqubic.

Automated Metrology

Automated Metrology

Stylus Profilers

Stylus Profilers

Optical Profilers

Optical Profilers

Thickness Measurement

Thickness Measurement

Stress/Flatness Measurement

Stress/Flatness Measurement

Ellipsometers

Ellipsometers

Sheet Resistance Measurement

Sheet Resistance Measurement

Atomic Force Microscopes

Atomic Force Microscopes

Imaging Systems

Imaging Systems

Download PDF

Please calculate 2 plus 1.

Thank you

A download link has been sent to the e-mail address you provided.