Metrology Instrumentation > Stylus Profilers
A complete range of advanced stylus profilometers from KLA Instruments to meet all surface metrology needs. The Alpha-Step®, Tencor® P-series and HRP® stylus profilometers enable high-precision, 2D and 3D surface metrology. The stylus profilers measure step height, roughness, bow and stress with industry-leading stability and reliability for your R&D and production metrology requirements.
Development Series
Production Series
Production Series Automated
HRP®-260 Stylus Profiler
Stylus Profiler Comparison
| Alpha Step Development Series | Production Series | |||
|
Alpha-Step D-500 |
Alpha-Step D-600 |
Tencor P-7 |
Tencor P-17 |
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Sample, Stage and Optics Specifications |
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| Scan Length | 30 mm | 55 mm | 150 mm | 205 mm |
| Sample Stage Diameter | 140 mm | 200 mm | 150 mm |
200 mm 300 mm optional |
| Stage Translation | 80 x 20 mm | 150 x 178 mm | 156 x 156 mm | 240 x 240 mm |
| Sample Positioning | Manual | Motorised | Motorised | Motorised |
| Theta Stage | Manual | Motorised | Manual or Motorised | Motorised |
| Sample Thickness | 20 mm | 30 mm | 55 mm | 55 mm |
| Field of View | 3.8 x 3.1 mm | 3.8 x 3.1 mm | 1.7 x 1.4 mm | 1.4 x 1.4 mm |
| Zoom | 4x digital | 4x digital | 4x digital | 4x optical |
| Sample Chucks |
Universal Nickel-plated Flat black Stress |
Universal Nickel-plated Stress |
Universal 150 mm Universal 200 mm Solar Stress |
Universal 200 mm Disk Stress OF: 240 x 240 mm OF: 300 mm |
| Chuck Vacuum | Universal chuck only | Standard | Standard | Standard |
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Performance Specifications |
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| Step Height Repeatability | 5 Å for 1 µm step | 5 Å for 1 µm step | 4 Å for 1 µm step | 4 Å for 1 µm step |
| Z Range | 1200 µm | 1200 µm |
Standard 327 µm Low force 131 µm Extended range 1000 µm |
Standard 327 µm Low force 131 µm Extended range 1000 µm |
| Vertical Resolution | 0.38 Å @ 2.5 µm | 0.38 Å @ 2.5 µm | 0.01 - 0.06 Å | 0.01 - 0.06 Å |
| Stylus Force | 0.03 - 15 mg | 0.03 - 15 mg |
0.5 - 50 mg (SR, XR) 0.03 mg (LF) |
0.5 - 50 mg (SR, XR) 0.03 mg (LF) |
| Profile Data Points | 400,000 | 400,000 | 1,000,000 | 1,000,000 |
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Software |
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| 3D Scan Data | Not available | Optional | Optional | Optional |
| Automated Sequencing | Not available | Yes | Yes | Yes |
| Pattern Recognition | Not available | Not available | Optional | Optional |
| Stress Software |
Yes Chuck optional |
Yes Chuck optional |
2D & 3D Optional | 2D & 3D Optional |
| Profile Stitching | Yes |
Yes Automated |
Yes | Yes |
| Auto Leveling & Step Height | Yes | Yes | Yes | Yes |
| Filtering & Roughness | Yes | Yes | Yes | Yes |
| Arc Correction | Yes | Yes | Yes | Yes |
| Computer OS |
Windows 10 64-bit |
Windows 10 64-bit |
Windows 10 64-bit |
Windows 10 64-bit |