Stylus Profilers
A complete range of advanced stylus profilers to meet all surface metrology needs.
Development Series
KLA development series includes the Alpha-Step® D-500, an affordable, easy-to-use benchtop stylus profiler with a manual X-Y stage for 2D step height and surface roughness measurements for both lab and production environments. For 3D measurements, you need the D-600 stylus profiler which has a motorised X-Y stage, enabling automated mapping of both 2D and 3D step height and surface roughness measurements.
Production Series
The industry-leading Tencor P-17 is the latest generation benchtop stylus profiler built on over 40 years of surface metrology experience, providing precise 2D and 3D step height and surface roughness measurements for R&D and production environments. The Tencor P-7 leverages the industry-leading topography sensor and ultra-flat scanning technology of the Tencor P-17 in a platform that offers the best price to performance for a benchtop stylus profiler.
Production Series Automated
The Tencor P-170 stylus profilometer enables fully automated measurements for the compound semiconductor industry, supporting cassette-to-cassette wafer handling including silicon, sapphire, silicon carbide, gallium arsenide, glass and more.
Stylus Profiler Comparison
Alpha Step Development Series | Production Series | ||||
Alpha-Step D-300 |
Alpha-Step D-500 |
Alpha-Step D-600 |
Tencor P-7 |
Tencor P-17 |
|
Sample, Stage and Optics Specifications |
|||||
Scan Length | 30 mm | 30 mm | 55 mm | 150 mm | 205 mm |
Sample Stage Diameter | 140 mm | 140 mm | 200 mm | 150 mm |
200 mm 300 mm optional |
Stage Translation | 80 x 20 mm | 80 x 20 mm | 150 x 178 mm | 156 x 156 mm | 240 x 240 mm |
Sample Positioning | Manual | Manual | Motorised | Motorised | Motorised |
Theta Stage | Manual | Manual | Motorised | Manual or Motorised | Motorised |
Sample Thickness | 20 mm | 20 mm | 30 mm | 55 mm | 55 mm |
Field of View | 3.8 x 3.1 mm | 3.8 x 3.1 mm | 3.8 x 3.1 mm | 1.7 x 1.4 mm | 1.4 x 1.4 mm |
Zoom | 4x digital | 4x digital | 4x digital | 4x digital | 4x optical |
Sample Chucks |
Universal Nickel-plated Flat black Stress |
Universal Nickel-plated Flat black Stress |
Universal Nickel-plated Stress |
Universal 150 mm Universal 200 mm Solar Stress |
Universal 200 mm Disk Stress OF: 240 x 240 mm OF: 300 mm |
Chuck Vacuum | Universal chuck only | Universal chuck only | Standard | Standard | Standard |
Performance Specifications |
|||||
Step Height Repeatability | 5 Å for 1 µm step | 5 Å for 1 µm step | 5 Å for 1 µm step | 4 Å for 1 µm step | 4 Å for 1 µm step |
Z Range | 1000 µm | 1200 µm | 1200 µm |
Standard 327 µm Low force 131 µm Extended range 1000 µm |
Standard 327 µm Low force 131 µm Extended range 1000 µm |
Vertical Resolution | 0.38 Å @ 2.5 µm | 0.38 Å @ 2.5 µm | 0.38 Å @ 2.5 µm | 0.01 - 0.06 Å | 0.01 - 0.06 Å |
Stylus Force | 0.03 - 15 mg | 0.03 - 15 mg | 0.03 - 15 mg |
0.5 - 50 mg (SR, XR) 0.03 mg (LF) |
0.5 - 50 mg (SR, XR) 0.03 mg (LF) |
Profile Data Points | 200,000 | 400,000 | 400,000 | 1,000,000 | 1,000,000 |
Software |
|||||
3D Scan Data | Not available | Not available | Optional | Optional | Optional |
Automated Sequencing | Not available | Not available | Yes | Yes | Yes |
Pattern Recognition | Not available | Not available | Not available | Optional | Optional |
Stress Software |
Yes Chuck optional |
Yes Chuck optional |
Yes Chuck optional |
2D & 3D Optional | 2D & 3D Optional |
Profile Stitching | Yes | Yes |
Yes Automated |
Yes | Yes |
Auto Leveling & Step Height | Yes | Yes | Yes | Yes | Yes |
Filtering & Roughness | Yes | Yes | Yes | Yes | Yes |
Arc Correction | Yes | Yes | Yes | Yes | Yes |
Computer OS |
Windows 10 64-bit |
Windows 10 64-bit |
Windows 10 64-bit |
Windows 10 64-bit |
Windows 10 64-bit |