Stylus Profilers

A complete range of advanced stylus profilers to meet all surface metrology needs.

Development Series

KLA development series includes the Alpha-Step^®D-500, an affordable, easy-to-use benchtop stylus profiler with a manual X-Y stage for 2D step height and surface roughness measurements for both lab and production environments. For 3D measurements, you need the D-600 stylus profiler which has a motorised X-Y stage, enabling automated mapping of both 2D and 3D step height and surface roughness measurements.

Alpha-Step^® D-500 Stylus Profiler

Alpha-Step^® D-600 Stylus Profiler

Production Series

The industry-leading Tencor P-17 is the latest generation benchtop stylus profiler built on over 40 years of surface metrology experience, providing precise 2D and 3D step height and surface roughness measurements for R&D and production environments. The Tencor P-7 leverages the industry-leading topography sensor and ultra-flat scanning technology of the Tencor P-17 in a platform that offers the best price to performance for a benchtop stylus profiler.

Tencor™ P-7 Stylus Profiler

Tencor™ P-17 Stylus Profiler

Production Series Automated

The Tencor P-170 stylus profilometer enables fully automated measurements for the compound semiconductor industry, supporting cassette-to-cassette wafer handling including silicon, sapphire, silicon carbide, gallium arsenide, glass and more.

Tencor™ P-170 Stylus Profiler

Stylus Profiler Comparison

	Alpha Step Development Series			Production Series
	Alpha-Step D-300	Alpha-Step D-500	Alpha-Step D-600	Tencor P-7	Tencor P-17
Sample, Stage and Optics Specifications
Scan Length	30 mm	30 mm	55 mm	150 mm	205 mm
Sample Stage Diameter	140 mm	140 mm	200 mm	150 mm	200 mm 300 mm optional
Stage Translation	80 x 20 mm	80 x 20 mm	150 x 178 mm	156 x 156 mm	240 x 240 mm
Sample Positioning	Manual	Manual	Motorised	Motorised	Motorised
Theta Stage	Manual	Manual	Motorised	Manual or Motorised	Motorised
Sample Thickness	20 mm	20 mm	30 mm	55 mm	55 mm
Field of View	3.8 x 3.1 mm	3.8 x 3.1 mm	3.8 x 3.1 mm	1.7 x 1.4 mm	1.4 x 1.4 mm
Zoom	4x digital	4x digital	4x digital	4x digital	4x optical
Sample Chucks	Universal Nickel-plated Flat black Stress	Universal Nickel-plated Flat black Stress	Universal Nickel-plated Stress	Universal 150 mm Universal 200 mm Solar Stress	Universal 200 mm Disk Stress OF: 240 x 240 mm OF: 300 mm
Chuck Vacuum	Universal chuck only	Universal chuck only	Standard	Standard	Standard
Performance Specifications
Step Height Repeatability	5 Å for 1 µm step	5 Å for 1 µm step	5 Å for 1 µm step	4 Å for 1 µm step	4 Å for 1 µm step
Z Range	1000 µm	1200 µm	1200 µm	Standard 327 µm Low force 131 µm Extended range 1000 µm	Standard 327 µm Low force 131 µm Extended range 1000 µm
Vertical Resolution	0.38 Å @ 2.5 µm	0.38 Å @ 2.5 µm	0.38 Å @ 2.5 µm	0.01 - 0.06 Å	0.01 - 0.06 Å
Stylus Force	0.03 - 15 mg	0.03 - 15 mg	0.03 - 15 mg	0.5 - 50 mg (SR, XR) 0.03 mg (LF)	0.5 - 50 mg (SR, XR) 0.03 mg (LF)
Profile Data Points	200,000	400,000	400,000	1,000,000	1,000,000
Software
3D Scan Data	Not available	Not available	Optional	Optional	Optional
Automated Sequencing	Not available	Not available	Yes	Yes	Yes
Pattern Recognition	Not available	Not available	Not available	Optional	Optional
Stress Software	Yes Chuck optional	Yes Chuck optional	Yes Chuck optional	2D & 3D Optional	2D & 3D Optional
Profile Stitching	Yes	Yes	Yes Automated	Yes	Yes
Auto Leveling & Step Height	Yes	Yes	Yes	Yes	Yes
Filtering & Roughness	Yes	Yes	Yes	Yes	Yes
Arc Correction	Yes	Yes	Yes	Yes	Yes
Computer OS	Windows 10 64-bit	Windows 10 64-bit	Windows 10 64-bit	Windows 10 64-bit	Windows 10 64-bit