Stylus Profilers

A complete range of advanced stylus profilers to meet all surface metrology needs.

Development Series

KLA development series includes the Alpha-Step® D-500, an affordable, easy-to-use benchtop stylus profiler with a manual X-Y stage for 2D step height and surface roughness measurements for both lab and production environments. For 3D measurements, you need the D-600 stylus profiler which has a motorised X-Y stage, enabling automated mapping of both 2D and 3D step height and surface roughness measurements.

Alpha-Step® D-500 Stylus Profiler

Alpha-Step® D-500 Stylus Profiler

Alpha-Step® D-600 Stylus Profiler

Alpha-Step® D-600 Stylus Profiler

Production Series

The industry-leading Tencor P-17 is the latest generation benchtop stylus profiler built on over 40 years of surface metrology experience, providing precise 2D and 3D step height and surface roughness measurements for R&D and production environments.  The Tencor P-7 leverages the industry-leading topography sensor and ultra-flat scanning technology of the Tencor P-17 in a platform that offers the best price to performance for a benchtop stylus profiler.

Tencor™ P-7 Stylus Profiler

Tencor™ P-7 Stylus Profiler

Tencor™ P-17 Stylus Profiler

Tencor™ P-17 Stylus Profiler

Production Series Automated

The Tencor P-170 stylus profilometer enables fully automated measurements for the compound semiconductor industry, supporting cassette-to-cassette wafer handling including silicone, sapphire, silicone carbide, gallium arsenide, glass and more.

Tencor™ P-170 Stylus Profiler

Tencor™ P-170 Stylus Profiler

Stylus Profiler Comparison

Alpha Step Development Series Production Series
Alpha-Step
D-300
Alpha-Step
D-500
Alpha-Step
D-600
Tencor
P-7
Tencor
P-17
Sample, Stage and Optics Specifications
Scan Length 30 mm 30 mm 55 mm 150 mm 205 mm
Sample Stage Diameter 140 mm 140 mm 200 mm 150 mm 200 mm
300 mm optional
Stage Translation 80 x 20 mm 80 x 20 mm 150 x 178 mm 156 x 156 mm 240 x 240 mm
Sample Positioning Manual Manual Motorised Motorised Motorised
Theta Stage Manual Manual Motorised Manual or Motorised Motorised
Sample Thickness 20 mm 20 mm 30 mm 55 mm 55 mm
Field of View 3.8 x 3.1 mm 3.8 x 3.1 mm 3.8 x 3.1 mm 1.7 x 1.4 mm 1.4 x 1.4 mm
Zoom 4x digital 4x digital 4x digital 4x digital 4x optical
Sample Chucks Universal
Nickel-plated
Flat black
Stress
Universal
Nickel-plated
Flat black
Stress
Universal
Nickel-plated
Stress
Universal 150 mm
Universal 200 mm
Solar
Stress
Universal 200 mm
Disk
Stress
OF: 240 x 240 mm
OF: 300 mm
Chuck Vacuum Universal chuck only Universal chuck only Standard Standard Standard
Performance Specifications
Step Height Repeatability 5 Å for 1 µm step 5 Å for 1 µm step 5 Å for 1 µm step 4 Å for 1 µm step 4 Å for 1 µm step
Z Range 1000 µm 1200 µm 1200 µm Standard
327 µm
Low force
131 µm
Extended range
1000 µm
Standard
327 µm
Low force
131 µm
Extended range
1000 µm
Vertical Resolution 0.38 Å @ 2.5 µm 0.38 Å @ 2.5 µm 0.38 Å @ 2.5 µm 0.01 - 0.06 Å 0.01 - 0.06 Å
Stylus Force 0.03 - 15 mg 0.03 - 15 mg 0.03 - 15 mg 0.5 - 50 mg
(SR, XR)
0.03 mg (LF)
0.5 - 50 mg
(SR, XR)
0.03 mg (LF)
Profile Data Points 200,000 400,000 400,000 1,000,000 1,000,000
Software
3D Scan Data Not available Not available Optional Optional Optional
Automated Sequencing Not available Not available Yes Yes Yes
Pattern Recognition Not available Not available Not available Optional Optional
Stress Software Yes
Chuck optional
Yes
Chuck optional
Yes
Chuck optional
2D & 3D Optional 2D & 3D Optional
Profile Stitching Yes Yes Yes
Automated
Yes Yes
Auto Leveling & Step Height Yes Yes Yes Yes Yes
Filtering & Roughness Yes Yes Yes Yes Yes
Arc Correction Yes Yes Yes Yes Yes
Computer OS Windows 10
64-bit
Windows 10
64-bit
Windows 10
64-bit
Windows 10
64-bit
Windows 10
64-bit

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