Optical Profilers

Advanced and flexible optical profilometers by KLA Instruments equipped with 3D imaging to support a variety of measurement techniques, including white light interferometry, True Colour imaging and ZDotconfocal grid structured illumination.

Filmetrics

The Profilm3D® benchtop optical profiler with TotalFocus® captures True Colour 3D images with every pixel in focus.

Profilm3D® Optical Profiler | White Light Interferometry

Profilm3D® Optical Profiler | White Light Interferometry

Zeta

3D non-contact optical profilers featuring patented ZDot technology and flexible multi-mode optics for measurement of 3D surface topography, film thickness and automated defect inspection.

Zeta™ - Solar Metallisation Optical Profiler

Zeta™ - Solar Metallisation Optical Profiler

Zeta™-20 True Colour 3D Optical Profiler

Zeta™-20 True Colour 3D Optical Profiler

Zeta™-300 True Colour 3D Optical Profiler

Zeta™-300 True Colour 3D Optical Profiler

Zeta™-388 True Colour 3D Optical Profiler

Zeta™-388 True Colour 3D Optical Profiler

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