Metrology Instrumentation > Optical Profilers

Advanced and flexible optical profilometers by KLA Instruments equipped with 3D imaging to support a variety of measurement techniques, including white light interferometry, True Colour imaging and ZDot^™ confocal grid structured illumination. The Filmetrics^® Profilm3D^® and Zeta^™ optical profilometers offer fast, non-contact solutions for 3D step height, roughness, and other surface topography measurements, leveraging interferometer and ZDot™ measurement techniques for R&D and production environments.