Surface Analysis

Powerful surface analysis instruments from the world's leading supplier of UHV surface analysis instrumentation. PHI’s innovative XPS, AES, and SIMS technologies provide unique tools to solve challenging materials problems and accelerate the development of new materials and products.

Scanning XPS/HAXPES Microprobe

Fully automated multi-technique scanning XPS/HAXPES microprobe

PHI Genesis

PHI Genesis

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