Nanoindenters
Nanomechanical testers from KLA Instruments™ for materials characterisation and process control. These nanoindenters provide precise, reliable and repeatable testing to characterise static and dynamic mechanical properties of materials, under a wide range of test conditions.
Benchtop/Tabletop
Compact nanoindenters that make measuring hard coatings, thin films, and small volumes of material easy. These accurate, flexible and user-friendly instruments can perform a wide range of nanoscale mechanical tests including nanoindentation, hardness, scratch and universal nanoscale testing.
Freestanding
User-friendly nanoscale mechanical testers that quickly deliver accurate, quantitative results.
In-situ
Nanomechanical testers compatible with scanning electron microscope (SEM) and focused ion beam (FIB) chambers, or standalone vacuum chambers. The unique software-integrated tip-calibration system provides fast and accurate tip calibration.
Nanoindenter Comparison
| Product Range | |||
| iNano | iMicro | G200X | |
|
Lab Facility |
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| R&D failure labs with targeted focus | Yes | Yes | Yes |
| R&D and failure labs with multiple requirements | Yes | Yes | |
| Multi-user faclities | Yes | ||
|
Force Range |
|||
| 50mN | Yes | Yes | Yes |
| 1N | Yes | Yes | |
| 10N | |||
|
SPM & Mapping |
|||
| High speed indentation mapping | Yes | Yes | Yes |
| Scanning probe microscopy | Yes | ||
| Survey Scanning | Yes | ||
|
Targeting Accuracy |
|||
| 5μm | Yes | Yes | Yes |
| <5μm | Yes | Yes | |
| <1μm | Yes | ||
| <20nm with NanoVision | Yes | ||
|
Stage Translation |
|||
| 75mm X 75mm | Yes | Yes | Yes |
| 100mm X 100mm | Yes | Yes | |
| 200mm X 200mm | Yes | ||
|
Displacement Range |
|||
| lnForce50: 50μm (0.2pm Resolution) | Yes | Yes | Yes |
| lnForce1000: 80μm (0.04nm Resolution) | Yes | Yes | |
| DCM II: 70μm (0.2pm Resolution) | |||
| XP: 1.5mm (0.01nm Resolution) | |||
| >25mm Z-axis (<50nmResolution) | Yes | Yes | Yes |
|
Force Range |
|||
| lnForce50: 50mN (3nN Resolution) | Yes | Yes | Yes |
| lnForce1000: 1N (6nN Resolution) | Yes | Yes | Yes |
| DCM II: 30mN (3nN Resolution) | |||
| XP: 500mN_10N optional (50nN Resolution) |