Nanoindenters

Nanomechanical testers from KLA Instruments for materials characterisation and process control. These nanoindenters provide precise, reliable and repeatable testing to characterise static and dynamic mechanical properties of materials, under a wide range of test conditions.

Benchtop/Tabletop

Compact nanoindenters that make measuring hard coatings, thin films, and small volumes of material easy. These accurate, flexible and user-friendly instruments can perform a wide range of nanoscale mechanical tests including nanoindentation, hardness, scratch and universal nanoscale testing.

iNano® Nanoindenter

iNano® Nanoindenter

iMicro Nanoindenter

iMicro Nanoindenter

Freestanding

User-friendly nanoscale mechanical testers that quickly deliver accurate, quantitative results.

Nanoindenter® G200x

Nanoindenter® G200x

In-situ

Nanomechanical testers compatible with scanning electron microscope (SEM) and focused ion beam (FIB) chambers, or standalone vacuum chambers. The unique software-integrated tip-calibration system provides fast and accurate tip calibration.

NanoFlip® Nanoindenter

NanoFlip® Nanoindenter

Nanoindenter Comparison

Product Range
iNano iMicro G200X
Lab Facility
R&D failure labs with targeted focus Yes Yes Yes
R&D and failure labs with multiple requirements Yes Yes
Multi-user faclities Yes
Force Range
50mN Yes Yes Yes
1N Yes Yes
10N
SPM & Mapping
High speed indentation mapping Yes Yes Yes
Scanning probe microscopy Yes
Survey Scanning Yes
Targeting Accuracy
5μm Yes Yes Yes
<5μm Yes Yes
<1μm Yes
<20nm with NanoVision Yes
Stage Translation
75mm X 75mm Yes Yes Yes
100mm X 100mm Yes Yes
200mm X 200mm Yes
Displacement Range
lnForce50: 50μm (0.2pm Resolution) Yes Yes Yes
lnForce1000: 80μm (0.04nm Resolution) Yes Yes
DCM II: 70μm (0.2pm Resolution)
XP: 1.5mm (0.01nm Resolution)
>25mm Z-axis (<50nmResolution) Yes Yes Yes
Force Range
lnForce50: 50mN (3nN Resolution) Yes Yes Yes
lnForce1000: 1N (6nN Resolution) Yes Yes Yes
DCM II: 30mN (3nN Resolution)
XP: 500mN_10N optional (50nN Resolution)

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