Filmetrics® R50-4PP Four-Point Probe System and Filmetrics R50-EC Eddy Current System
The Filmetrics R50-4PP contact four-point probe systems and Filmetrics R50-EC non-contact eddy current systems map metal layer thickness, sheet resistance, sheet resistivity, sheet conductance, and sheet conductivity. A large Z range makes the R50-4PP ideal for a wide variety of applications. The R50-EC system is ideal for measuring resistance and film thickness on sensitive and/or flexible conductive surfaces.
Key Features
- Available in Four-Point Probe (4PP) or non-contact Eddy-Current (EC) configuration
- 60mm sample Z range with coarse and fine height control and adjustable approach speed
- 4PP sheet resistance measurement spans a ten-decade range on conductive and semi-conductive films
- User-specified sample point mapping using rectangular, linear, polar, and custom configurations
- High precision X-Y stage provides travel up to 300mm
- Easy-to-use software interface
- Compatible with all KLA sheet resistance probes
Manufacturer
Filmetrics
Filmetrics was founded in 1995 with the mission of making thin-film measurements simple and affordable. Our approach, borne of the microelectronics and software revolution, results in film-thickness measurements that take less than a second - by operators who can be trained in minutes.
Filmetrics R50-Series Advanced Sheet Resistance Mapping System
The Filmetrics R50 is the latest innovation in KLA Instruments benchtop sheet resistance and conductivity mapping systems. Since the introduction of our first resistivity gauge in 1975, our product groups have revolutionized the measurement of both sheet resistance and thickness for conductive layers.
Industries
- Automotive
- Solar
- LED
- Semiconductor wafer substrates
- Glass substrates
- Circuit boards and PCB patterned features
- Flat panel display layers and patterned features
- VR display
- Metal foils
- Conductive rubbers and elastomers
- Research and academia
Available Models
| Model | Sensor Type | Measurement Range | Maximum Map Diameter | XY Stage Range | Maximum Sample Height |
| R50-4PP | Contact 4PP | 1mΩ/sq – 200MΩ/sq | 100mm | 100mm x 100mm | 100mm |
| R50-EC | Non-contact eddy current | 1mΩ/sq – 50Ω/sq | 100mm | 100mm x 100mm | 100mm |
| R50-200-4PP | Contact 4PP | 1mΩ/sq – 200MΩ/sq | 200mm | 200mm round | 100mm |
| R50-200-EC | Non-contact eddy current | 1mΩ/sq – 50Ω/sq | 200mm | 200mm round | 100mm |
| R54-200-4PP | Contact 4PP | 1mΩ/sq – 200MΩ/sq | 200mm | 200mm x 200mm | 15mm |
| R54-200-EC | Non-contact eddy current | 1mΩ/sq – 50Ω/sq | 200mm | 200mm x 200mm | 15mm |
| R54-300-4PP | Contact 4PP | 1mΩ/sq – 200MΩ/sq | 300mm | 300mm round (Automated X-Y-Θ stages) | 15mm |
| R54-300-EC | Non-contact eddy current | 1mΩ/sq – 50Ω/sq | 300mm | 300mm round (Automated X-Y-Θ stages) | 15mm |
Applications
Metal Film Uniformity
Sheet resistance uniformity of metal films is critical to ensure device performance, and most metal films can be measured by both 4PP and EC. EC is recommended for thicker, highly conductive metal films and 4PP for thinner metal films ( > 10Ω/sq), but very high 4PP/EC correlation ensures accurate results using either method.
The R50 resistivity maps highlight film uniformity, deposition quality, and other process variations. This EC map of a 2μm AlCu film identifies and quantifies an off-centre deposition.
Ion Implantation Characterization
4PP is the standard technique for measuring ion implant processes. Mapping an ion implant after thermal annealing can identify hot and cold spots due to lamp failure, poor wafer/platen contact, or implant dose variations. For an ion implanted silicon layer, thermal annealing is required to activate the dopant ions.
In this example, the three red (high resistance) spots indicate locations of greatest heat loss during ion implant anneal due to the three wafer supports. Temperature uniformity is critical for the annealing process, and heat loss at the wafer edge and contact points can be a serious challenge to activation uniformity. Note that for light-sensitive samples, the Filmetrics R54-Series enclosed sheet resistance mapper is generally recommended.
Film Thickness/Resistivity/Sheet Resistance
Measured wafer data can be mapped as sheet resistance, film thickness, or resistivity. By entering a resistivity value for a material, the thickness can be calculated and displayed; the resistivity can be calculated if the thickness value is entered.
Data Acquisition and Visualization
RsMapper is the R50 intuitive user interface that combines data acquisition and analysis features into a single platform that can be used on the tool itself or for offline analysis. Data acquisition for measurement sites can be easily specified using a variety of coordinate layouts.
The RsMapper platform can display the measurement results in either 2D or 3D for quick visualization of critical film uniformity data, as shown for the ion beam scanning issue shown at left. The software easily switches between maps of individual measurement parameters and rotatable 3D profiles to deliver customized views of the process parameters. Whether measuring sheet resistance, resistivity or metal film thickness, RsMapper delivers compelling visual data.
Downloads
R50 Brochure
Technical Note R50 Non Contact Sheet Resistance
Technical Note R50 Probe Care
Application Note Metal Film Sheet Resistance and Thickness Mapping
Related Products
Filmetrics® R54-200 and Filmetrics R54-300 Sheet Resistance Mapping Systems
Filmetrics® R54-200 and Filmetrics R54-300 Sheet Resistance Mapping SystemsService Support
Comprehensive repairs and servicing
Annual Support Programs
Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.
With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.
CN Tech’s Support Programs are an economical way to guarantee optimal working condition:
- Annual Preventive Maintenance
- Priority Technical Assistance
- Preferred Parts Availability
- On-Site User Training
- Remote Diagnostics
- No surprise repair expense and much more!
Support Contact Example
An example of our service and support contracts are shown below:
Metrology & Instrumentation Annual Support Programs 2024/25
CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.