R50 Sheet Resistance Measurement

Filmetrics® sheet resistance measurement tools marry the technology developed and perfected by KLA for over 30 years with the bench-top instrument technology developed over the last 20 years by the Filmetrics team. KLA technologies include both contact and non-contact methods.

Manufacturer

Filmetrics

Filmetrics was founded in 1995 with the mission of making thin-film measurements simple and affordable. Our approach, borne of the microelectronics and software revolution, results in film-thickness measurements that take less than a second - by operators who can be trained in minutes.

 

Key Features

  • Improves Productivity
  • Accurate Greater Than ±1%
  • Fast Measurement in Seconds
  • Non-Invasive Measurement
  • Easy to Operate
  • Turn-Key Setup

Filmetrics® sheet resistance measurement

Filmetrics® sheet resistance measurement tools marry the technology developed and perfected by KLA for over 30 years with the bench-top instrument technology developed over the last 20 years by the Filmetrics team. KLA technologies include both contact and non-contact methods. The Filmetrics family of sheet resistance measurement instruments can measure conductive sheets and thin films deposited on various substrates including:

  • Semiconductor wafer substrates
  • Glass substrates
  • Plastic (flexible) substrates
  • PCB patterned features
  • Solar Cells
  • Flat panel display layers and patterned features
  • Metal foils

Options

NIST-traceable thickness standard

Lens assemblies

Would you like to learn more about how Filmetrics’ r50 Sheet Resistance Measurement System? Contact our experienced technical team today to discuss your workflow, and let us help you find the right measurement solution for you.