S20 High Vacuum Ion Sputter Coater
The S20 is a high-vacuum dual-target ion sputter coater based on magnetron sputtering technology. It integrates a turbo molecular pump and an oil-free diaphragm pump to provide an ultra-clean high-vacuum environment (<5×10⁻² Pa). Featuring a coordinated design of tilted dual-target and rotary sample stage, it deposits uniform and stable conductive coatings on sample surfaces.
Key Features
- Widely suitable for (ultra-)high-resolution FE-SEM sample preparation, particularly for 3D powder samples and delicate specimens
- Available sputtering materials include Au, Pt, Pd, Ir as well as Pt-Au and Pt-Pd layered alloys, etc.
- Touchscreen automatic control, plug and play.
- Tilted dual target Design: Sputter Pt/Ir/W Excellent for 3D samples
- Built-in oil-free high vacuum pump set: High repeatability, oil-free
- Auto rotating stage: Uniform coating for φ75mm, WD:55-70mm
Manufacturer
SuPro Instruments
Supro Instruments is committed to providing lean-level preparation, measurement, and control instruments for electron microscopy sample preparation and micro-nano thin film fields, assisting customers in improving research and development and production efficiency, and providing customers with a better user experience.
Product Specification
| Application Scenarios | Conductive Coating Preparation for HR/UHR FE-SEM Samples |
| Vacuum Pump | Turbo Molecular Pump + Oil-Free Diaphragm Pump |
| Pumping Speed | ≥Diaphragm Pump 0.7 m3/h +Molecular Pump 30.5 m3/h |
| Ultimate Vacuum | < 5×10-2 Pa |
| Working Pressure | 0.5-2Pa |
| Gas Control | Constant gas control, MFC Control（50 SCCM N2） |
| Pumping Down Time | <3-5Min |
| Sputtering Timer | 0-300S |
| Vacuum Gauge | High-Vacuum Composite Vacuum Gauge [Atmospheric Pressure to 10-3 Pa Range] |
| Chamber Dimension | ~Ø150×120mm |
| Rotary Sample Stage | Diameter: 80mm; Rotation Speed: 60RPM; TSD: 55-70mm continuously adjustable |
| Sputtering Target | Ø30×0.2-1mm/2pcs, Single-Target sputtering and Dual-Target Sequential sputtering |
| Sputtering Power | Constant power magnetron sputtering DC power supply Max. 30W, Max. 100mA, 0-800V DC |
| Gas Inlet | Ø6mm Air tube |
| Operating Mode | Touchscreen control，The control system provides interlock protection function |
| Weight | ~15kg |
| Dimension | ~250mm W×360mm D×374mm H |
| Power Supply | 100-240V AC, 180W Max. |
| Warranty | 1 Year |
Downloads
S20 Brochure
Service Support
Comprehensive repairs and servicing
Annual Support Programs
Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.
With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.
CN Tech’s Support Programs are an economical way to guarantee optimal working condition:
- Annual Preventive Maintenance
- Priority Technical Assistance
- Preferred Parts Availability
- On-Site User Training
- Remote Diagnostics
- No surprise repair expense and much more!
Support Contact Example
An example of our service and support contracts are shown below:
Metrology & Instrumentation Annual Support Programs 2024/25
CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.