Sample Preparation > Vacuum Coating Systems > Sputter Coaters
Sputter coating as a common method for thin film deposition by vacuum plasma is used in various applications, such as fabrication of nano-electronic and optical devices, sensors, solar cells, as well as SEM sample preparation.
Programmable deposition process, real-time monitoring of the chamber pressure, cathode temperatures, and coated layer thickness by Quartz-crystal microbalance (QCM) sensors, and many other innovative features have made Vac Coat magnetron sputter coaters among the pioneer coating devices.
DSR1 – Dedicated Sputter Coater
DST3-A - Sputter Only – Angled Cathodes
DST3-S - Sputter Only – Straight Cathodes
DST3-TA - Sputter + Thermal Evaporation – Angled Cathodes
DST3-TS - Sputter + Thermal Evaporation – Straight Cathodes
DSCR – Dual Purpose Sputter and Carbon Coater
DSCR-300 - Desk Sputter & Carbon Coater
DST1-170 - High Vacuum Desk Sputter Coater
DST3 – Triple Target Sputter Coater
DST3-T – Sputter Coater and Thermal Evaporator
DST2-TG – Sputter Coater and Thermal Evaporator for Glove Box
DSCT – Dual Purpose Sputter and Carbon Coater
DSCT-T – Sputter Coater and Carbon/Thermal Evaporator
DSCT-300 High Vacuum Dual Sputter and Carbon Coater
