J20 Dual-Target Sputter Coater
Field emission scanning electron microscopes (FE-SEMs) have higher resolution compared to filament SEMs, with magnifications reaching up to 100K times. This poses higher demands on the particle size of the sputter coating instrument, requiring fine particles that do not cover the sample surface and provide improvements in charge elimination and contrast enhancement.
Key Features
- Dual-Target Magnetron Sputtering: Patented Pt-Au Layered Recipe
- SUV in Ion Sputter Coaters: Universal Sample Compatibility
- Tilted Target & Rotary Stage: Optimized for 3D Microstructures
Manufacturer
SuPro Instruments
Supro Instruments is committed to providing lean-level preparation, measurement, and control instruments for electron microscopy sample preparation and micro-nano thin film fields, assisting customers in improving research and development and production efficiency, and providing customers with a better user experience.
Product Information
The conventional approach for sample preparation in FE-SEMs is sputter coating with Pt metal. However, the conductivity and electron signal excitation capability of Pt is not as good as Au, especially in 3D powder, porous, and membrane sample scenarios where Pt deposition alone is not sufficient.
Therefore, we have designed a dual target ion sputter coater and developed a layering process: first sputtering a layer of Pt and then a layer of Au. This layered sputter coating mode effectively suppresses the formation of Au islands, while also considering conductivity and particle size, resulting in excellent charge elimination and contrast enhancement for powder and membrane samples.
Product Specification
| Technical Specifications | |
| Application Scenarios | Conductive Coating Preparation for HR/UHR FE-SEM Samples |
| Vacuum Pump | Rotary Vane Pump |
| Pumping Speed | ≥4m3/h |
| Ultimate Vacuum | <1Pa |
| Working Pressure | 4-10Pa |
| Pumping Down Time | <2-3Min |
| Sputtering Timer | 0-300S |
| Vacuum Gauge | Pirani Vacuum Gauge |
| Chamber Dimension | ~Ø150×120mm |
| Rotary Sample Stage | Diameter: 80mm; Rotation Speed: 60RPM; TSD: 55-70mm continuously adjustable |
| Sputtering Target | Ø30×0.2-1mm/2pcs, Single-Target sputtering and Dual-Target Sequential sputtering |
| Sputtering Power | Constant Power Magnetron Sputtering DC Power Supply ( Max.30W, Max.100 mA, 0-800V DC ) |
| Operation Mode | Touchscreen control, the control system provides interlock protection function |
| Weight | Main Unit~15kg |
| Dimension | ~250mm W×360mm D×374mm H |
| Power Supply | 100-240V AC, 50/60Hz Grounded Three-prong Plug |
| Power Consumption | <500W |
| Warranty | 1 Year |
Downloads
J20 Brochure
Service Support
Comprehensive repairs and servicing
Annual Support Programs
Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.
With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.
CN Tech’s Support Programs are an economical way to guarantee optimal working condition:
- Annual Preventive Maintenance
- Priority Technical Assistance
- Preferred Parts Availability
- On-Site User Training
- Remote Diagnostics
- No surprise repair expense and much more!
Support Contact Example
An example of our service and support contracts are shown below:
Metrology & Instrumentation Annual Support Programs 2024/25
CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.