Sheet Resistance Measurement

Sheet Resistance Measurement

The FilmetricsĀ® R54-series and R50-series sheet resistance measurement instruments have been developed based on over 45 years of KLA sheet resistance measurement innovation. The R50 measures metal layer thickness, sheet resistance, and sheet conductance. The R54-series adds a light-tight enclosure, along with 300mm support, to provide metal thickness measurement solutions for semiconductor and compound semiconductor manufacturing.

Filmetrics R50-Series

Filmetrics R50-Series

Filmetrics R54-Series

Filmetrics R54-Series

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