SPC150 HV Plasma Cleaner
The SPC150 is a high-vacuum plasma cleaner equipped with three gas lines controlled by MFCs for precise gas flow regulation. A grid between the ion source and the sample chamber provides gentler cleaning, making it particularly suitable for cleaning hydrocarbon and silicon contamination on ultrathin carbon films and other samples. The SPC also enables in-situ plasma treatment of TEM sample holders or Cell chips, as well as in-situ vacuum leak detection for TEM sample holders.
Key Features
- Ultrathin carbon film hydrocarbon contamination cleaning
- TEM sample/sample holder plasma treatment
- Specialized silicon contamination cleaning
Manufacturer
SuPro Instruments
Supro Instruments is committed to providing lean-level preparation, measurement, and control instruments for electron microscopy sample preparation and micro-nano thin film fields, assisting customers in improving research and development and production efficiency, and providing customers with a better user experience.
Product Specification
| Technical Specification | Parameters |
| Vacuum Pump System | Turbo Pump and Oil-free Diaphragm Pump |
| Turbo Pump Inlet Flange | DN63ISO-K (Standard) |
| Turbo pump speed | >85L/s (N2) |
| diaphragm pump speed | >0.7m3/h |
| Ultimate vacuum | <5E-4Pa |
| Pump System Start-up Time | ≤300s |
| TEM Holder Accessories | Compatible with Thermo, JEOL, Hitachi sample holders; supports 2 or more TEM holders |
| Chamber Dimension | ~160*100 mm |
| Plasma Cleaning Source | The Principle of Remote RF Source, Manual Matching |
| Power Supply | 13.56MHz RF power, adjustable from 5W to 50W |
| Gas Control | 3-way MFC control, and can be connected to gases like Ar, O2, and H2 |
| Vacuum Gauge | Full-range Compound Gauge |
| Operating method | Touchscreen Control with the Control System Providing Interlock Protection Functions |
| Weight | ~30Kg |
| Dimensions | ~500mm * 466mm * 390mm |
| Power Supply | 100-220V AC, 50/60Hz Grounding Triangle Plug |
| Power Consumption | <500W |
| Warranty | One year |
Downloads
SPC150 Brochure
Service Support
Comprehensive repairs and servicing
Annual Support Programs
Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.
With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.
CN Tech’s Support Programs are an economical way to guarantee optimal working condition:
- Annual Preventive Maintenance
- Priority Technical Assistance
- Preferred Parts Availability
- On-Site User Training
- Remote Diagnostics
- No surprise repair expense and much more!
Support Contact Example
An example of our service and support contracts are shown below:
Metrology & Instrumentation Annual Support Programs 2024/25
CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.