R2/R3 Tilt Modules Combined with XY stages
Provides short inclination in relation to one of the orthogonal directions (X or Y axis) in the ± 3° range.
Manufacturer
Prevac
Prevac are a world leader in the design and production of analytical and deposit scientific and research equipment. Their systems operate in a high and ultra high vacuum environment. They design and construct UHV and HV systems fully adapted to the individual requirements of research projects and industrial applications.
Description
Integration with XY stage (through a common bellows) is recommended for best motion range. Module geometry is customised in order to maintain the radius of rotation around the focus point and other customer requirements. The R2/R3 rotation can be motorised or manual.
Technical data
Base flange | DN 160CF |
Travelling flange | DN 100CF, DN 63CF |
R3 range | ± 3° |
R3 motion control | handwheel / stepper motor (option) |
resolution (manual/motorised) | 0.1° / 0.01° |
Bakeout temperature | up to 150 °C |
Applications
The R2/R3 tilt module has been designed to achieve the best angular resolution, thanks to a large radius of rotation.
In addition, the rigid design allows attachment of heavy loads to the end-effector. Another advantage of this solution is the lack of mechanical parts on the vacuum side. The functionality can be extended by changing the arrangement of chosen modules (R2 tilt, R3 tilt, R1 rotation, XY stage, Z slide).
Downloads
Manipulators and Transferring Systems Brochure
Service Support
Comprehensive repairs and servicing
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Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.
With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.
CN Tech’s Support Programs are an economical way to guarantee optimal working condition:
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Metrology & Instrumentation Annual Support Programs 2024/25
CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.