R2/R3 Tilt Modules Combined with XY stages

Provides short inclination in relation to one of the orthogonal directions (X or Y axis) in the ± 3° range.

Manufacturer

Prevac

Prevac are a world leader in the design and production of analytical and deposit scientific and research equipment. Their systems operate in a high and ultra high vacuum environment. They design and construct UHV and HV systems fully adapted to the individual requirements of research projects and industrial applications.

Description

Integration with XY stage (through a common bellows) is recommended for best motion range. Module geometry is customised in order to maintain the radius of rotation around the focus point and other customer requirements. The R2/R3 rotation can be motorised or manual.

Technical data

Base flange DN 160CF
Travelling flange DN 100CF, DN 63CF
R3 range ± 3°
R3 motion control handwheel / stepper motor (option)
resolution (manual/motorised) 0.1° / 0.01°
Bakeout temperature up to 150 °C

Applications

The R2/R3 tilt module has been designed to achieve the best angular resolution, thanks to a large radius of rotation.
In addition, the rigid design allows attachment of heavy loads to the end-effector. Another advantage of this solution is the lack of mechanical parts on the vacuum side. The functionality can be extended by changing the arrangement of chosen modules (R2 tilt, R3 tilt, R1 rotation, XY stage, Z slide).

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Service Support

Comprehensive repairs and servicing

Annual Support Programs

Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.

CN Tech’s Support Programs are an economical way to guarantee optimal working condition:

  • Annual Preventive Maintenance
  • Priority Technical Assistance
  • Preferred Parts Availability
  • On-Site User Training
  • Remote Diagnostics
  • No surprise repair expense and much more!

Support Contact Example

An example of our service and support contracts are shown below:

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Metrology & Instrumentation Annual Support Programs 2022/23

CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

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