R2/R3 Tilt Modules Combined with XY stages

Provides short inclination in relation to one of the orthogonal directions (X or Y axis) in the ± 3° range.



Prevac are a world leader in the design and production of analytical and deposit scientific and research equipment. Their systems operate in a high and ultra high vacuum environment. They design and construct UHV and HV systems fully adapted to the individual requirements of research projects and industrial applications.


Integration with XY stage (through a common bellows) is recommended for best motion range. Module geometry is customised in order to maintain the radius of rotation around the focus point and other customer requirements. The R2/R3 rotation can be motorised or manual.

Technical data

Base flange DN 160CF
Travelling flange DN 100CF, DN 63CF
R3 range ± 3°
R3 motion control handwheel / stepper motor (option)
resolution (manual/motorised) 0.1° / 0.01°
Bakeout temperature up to 150 °C


The R2/R3 tilt module has been designed to achieve the best angular resolution, thanks to a large radius of rotation.
In addition, the rigid design allows attachment of heavy loads to the end-effector. Another advantage of this solution is the lack of mechanical parts on the vacuum side. The functionality can be extended by changing the arrangement of chosen modules (R2 tilt, R3 tilt, R1 rotation, XY stage, Z slide).



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