PHI nanoTOF 3
An advanced multifunctional TOF-SIMS instrument with a sophisticated style, capable of achieving precise surface mass analysis in microscale areas, all within a single system.
Manufacturer
Physical Electronics
Physical Electronics (PHI) is a subsidiary of ULVAC-PHI, the world's leading supplier of UHV surface analysis instrumentation used for research and development of advanced materials in a number of high technology fields including: nanotechnology, microelectronics, storage media, bio-medical, and basic materials such as metals, polymers, and coatings.
Key Features
- High precision analysis with TRIFT-based spectrometer
- Continuous unattended measurement of insulating materials
- Unique ion beam technology
- Molecular structure analysis based on Parallel Imaging MS/MS
- A wide selection of options
Capabilities
- Superior Parallel Imaging MS/MS Analyzer Performance
- Parallel Imaging MS/MS
- HR²
- Cluster Source Ion Guns
- FIB-TOF 3D Chemical Imaging
Triple Focusing Electrostatic Analyser for Complex Sample Geometrics
TRIFT-based analyser for a wide range of sample geometries, wide bandpass energy, and wide acceptance angle.
In general, secondary ions are emitted from the surface of the sample at different energies and angles. As a result, even secondary ions with exactly the same mass will have different flight times in the analyser. This is particularly noticeable for samples with height differences or uneven surfaces/
The triple ion focusing time-of-fight spectrometer is able to simultaneously compensate for differences in flight time caused by differences in energy and emission angle. This is a key feature of the spectrometer which achieves high mass resolution and high detection sensitivity as well as imaging with reduced shadows as demonstrated in the examples on the right.
Primary Ion Gun for High-Precision Analysis
Advanced ion beam technology achieves high spatial resolution and high mass resolution.
PHI nanoTOF 3 offers TOF-SIMS analysis with a high spatial resolution of < 500 nm in high mass resolution mode and <50 nm in high spatial resolution mode. The combination of a high brightness ion source having a high precision pulse mechanism and a high resolution spectrometer ensures low noise, high sensitivity and high resolution measurements. In both modes measurements are completed within a few minutes.
The first-ever automated unattended TOF-SIMS analysis of multiple insulating samples
With the newly developed auto sample bias adjustment feature, it is now possible to perform unattended TOF-SIMS measurements on samples including insulating samples. The process is thoroughly simplified; 1) taking an intro photo, 2) selecting the analysis points on the intro photo, and 3) pressing the start button. In the past, skilled operators had to be dedicated to the instrument for analysis, but now the high quality data can be obtained regardless of operator skill.
Automated sample transport system and parking position as standard
The instrument is equipped with an automatic sample transfer system that has been proven in more than 300 XPS Q-Series units. Sample sizes of up to 100 mm x 100mm are possible, and the analysis chamber has a built-in parking position as standard. The system allows continuous automated unattended analysis of large numbers of samples.
New Pulsed Argon Ion Gun for Complete Turnkey Charge Neutralisation
The pulsed low-energy electrons and argon ions can easily neutralise surface charge for both positive and negative ion polarities regardless of the type and shape of the insulating sample.
Remote access function allows the instrument to be controlled remotely
The PHI nanoTOF 3 allows you to access the instrument via your company's local area network or the internet. Once the sample holder is mounted in the intro chamber, functions such as transferring the sample into t analysis chamber, sample holder exchange with the parking position, setting of the measurement conditions (including all options), and data acquisition can all be performed remotely. Diagnostics of the instrument hardware and electronics can also be accessed remotely.
FIB fabrication followed by cross-section imaging with a single LMIG beam
FIB function with standard LMIG
A FIB processing function has been added to the LMIG primary ion source. This makes it possible to perform FIB processing and cross-sectional TOF-SIMS imaging with a single ion gun. Stage rotation is involved from processing to observation, but the Eucentric function allows the stage to return to the same field of view after rotation, easily identifying the FIB position. To achieve 3D tomography, the dedicated Ga-FIB option is recommended. The Ga-FIB may be further optioned to operate as a second analysis beam.
Molecular Structure Analysis based on Parallel Imaging MS/MS
Lossless Acquisition of MS¹ and MS² Data
By combining a tandem mass spectrometer (MS2) with a conventional TOF-SIMS analyser (MS1), MS¹ and MS² data can be acquired simultaneously in the same measurement field with high sensitivity and speed.
The MS¹ spectrum can be complex due to the large number of mass peaks generated by all components and fragments. Conversely, the MS² spectrum, which is extracted and segmented by the precursor selector, has a much simpler spectral pattern. his provides information about the molecular structure, such as terminal groups, linear chains, or double bonds, and enables specific molecular structure imaging.
TOF-DR Software for TOF-SIMS Tandem MS Imaging Data Processing
TOF-DR 3.0 is the latest release of PHI’s software for the treatment, processing, presentation and reporting of TOF-SIMS tandem MS imaging data.
The new release includes new or improved capabilities for instant viewing of raw data, peak identification, graphical data presentation and report generation.
Features include:
- Windows 10 64-bit compatibility
- TOF-SIMS MS/MS spectra and 2D/3D image analysis
- Spectral dead time correction
- 2D/3D region-of-interest (ROI) analysis
- Software-guided batch data processing with output to Excel® for plotting and graphical viewing of the raw and normalised data
- Data Review Utility tool for instant and simultaneous observation of peaks, images and profiles with identification tools
- Report Generation tool for easy layout and presentation of data with automated creation of PowerPoint® slides
- PLS_Toolbox® compatibility for full uni- and multi-variate data analysis
- NIST MS/MS® compatibility for tandem MS precursor identification
Downloads
PHI nanoTOF 3 Brochure
XPS and TOF-SIMS for the Pharmaceutical Industry
WinCadence Compound Identification Tool
Tuning the Matsuda Voltage of the Trift Spectrometer to Optimise the Mass Accuracy for Peak Identification
TOF-SIMS Characterisation of Multi-Layer Paint Coatings
TOF-SIMS Imaging of High Mass Oligomers Localised to Marine Aerosol Particle Surfaces
TOF-SIMS Molecular Imaging of a Micropatterned Biological Ligand
TOF-SIMS Imaging of a Drug Pellet - Cross-Section Using a Bi₃² + Cluster Ion Beam
TOF-SIMS Chemical Imaging of Metal Interconnects on a Flexible Organic Substrate
TOF-SIMS Analysis of the Glass Phase in Alumina-Zirconia-Silica (AZS) Materials
TOF-SIMS Analysis of Organic LED Thin Films
Time-of-Flight Secondary Ion Mass Spectrometry
Relative Quantification of a Transition Metal Dopant in a Polycrystalline Matrix by TOF-SIMS
Quantitative Analysis of Topographic Effects on Conductive Surfaces in the PHI nanoTOF
TOF-SIMS Parallel Imaging MS/MS of PET Crystalline Oligomers
Optimising C₆₀ Incidence Angle for Polymer Depth Profiling by TOF-SIMS
Large Area TOF-SIMS Imaging of the Antibacterial Distribution in Frozen-Hydrated Contact Lenses
Molecular Imaging of Micron-Scale Features
Large Area (Mosaic) C₆₀+ Imaging by TOF-SIMS
Imaging the Phase Segregation in PS/PMMA Copolymer Blends by TOF-SIMS
Identification of Eu Oxidation States in a Doped Phosphor by TOF-SIMS Imaging
Imaging Additives on Human Hair with the PHI nanoTOF
Differentiation of Epicuticular Wax Components on the Surface of Arabidopsis Organs by TOF-SIMS Imaging
Complementary XPS and TOF-SIMS for Organic Analysis
Chemical Imaging of Particles with the PHI nanoTOF
Chemical Imaging at the Interface of a Bulk Elastomer Laminate
Advantages of the TRIFT Analyser for Imaging and Spectroscopy in the PHI nanoTOF
Adjustable Height Sample Holder
Additive Identification using TOF-SIMS Parallel Imaging MS/MS
3D Imaging of a Pharmaceutical Coating Using TOF-SIMS
3D FIB-TOF Imaging - the Microstructure of an Alloy
3D Characterisation of PS/P2VP Block Copolymer Films by TOF-SIMS with GCIB Sputtering
Options
Heating / Cooling Sample Holder can be Transferred without air exposure
The 25mm sample heating/cooling sample holder, well-recognised from the PHI Genesis and PHI VersaProbe series, is also available for use with the PHI nanoTOF 3. Furthermore, this sample holder enables sample transfer from a glove box to the analysis chamber without air exposure.
Transfer Vessel Compatible with Multiple PHI Surface Analysis Instruments
The inert gas/vacuum transfer vessel is an option for introducing samples into the nanoTOF 3 without exposure to the atmosphere. Typically, the samples are mounted in a glove box and then transferred to the instrument.
The samples can later be returned to the glovebox after measurement without exposure to the atmosphere. This is ideal for samples that react easily with the atmosphere, such as lithium ion batteries.
Inert Gas Glove Box for Sample Introduction Chamber
A glove box that can be attached directly to the sample intro chamber. It is possible to attach samples that easily react with the atmosphere, such as lithium-ion batteries and organic EL materials, to the sample stage while maintaining a low dew point.
Argon Gas Cluster Ion Gun for Low-Damage Depth Profiling
The use of argon gas cluster ion beam enables low-damage ion etching for organic materials. This allows depth profiling of organic compounds while maintaining their molecular structure.
Cesium Ion Gun and Oxygen Ion Gun for Rapid Depth Profiling of Inorganic Materials
The cesium and oxygen ion gun are used to expand the range of applications for depth analysis of inorganic materials. Both ion guns are capable of generating short pulses for rapid depth profiling by alternately irradiating the sample with primary and sputter ions at high repetition rates.
Service Support
Comprehensive repairs and servicing
Annual Support Programs
Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.
With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.
CN Tech’s Support Programs are an economical way to guarantee optimal working condition:
- Annual Preventive Maintenance
- Priority Technical Assistance
- Preferred Parts Availability
- On-Site User Training
- Remote Diagnostics
- No surprise repair expense and much more!
Support Contact Example
An example of our service and support contracts are shown below:
Metrology & Instrumentation Annual Support Programs 2024/25
CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.