PHI Genesis
Fully Automated Multi-Technique Scanning XPS/HAXPES Microprobe
Manufacturer
Physical Electronics
Physical Electronics (PHI) is a subsidiary of ULVAC-PHI, the world's leading supplier of UHV surface analysis instrumentation used for research and development of advanced materials in a number of high technology fields including: nanotechnology, microelectronics, storage media, bio-medical, and basic materials such as metals, polymers, and coatings.
Key Features
- Easy operation & multi-technique options
- Fully automated with sample parking
- High performance large & micro area XPS analysis
- High speed & non destructive depth profiling
- Hard X-ray Cr Ka source for HAXPES
- Comprehensive solution for batteries, semiconductors, organic devices, and other applications
Capabilities
- Micro-Focused Scanning X-ray Source and SEM-Like Operation
- Optimised Thin Film Depth Profile Analysis
- Complete Electronic Band Structure Characterisation
- Auger Electron Spectroscopy (AES)
- Reflection Electron Energy Loss Spectroscopy (REELS)
- Benefits of a Hard X-Ray Source
- Lab-based HAXPES
- Benefits of Combining XPS with HAXPES
Ease of Operation
PHI Genesis offers a new and improved user interface (UI) providing an intuitive and fully-automated operation of the high-performance instrument. The interface allows users to access all necessary functions for setting up routine and advanced multi-technique acquisitions within a single screen, while still retaining essential features like navigation using intro photo and 100% accurate positioning from X-ray induced secondary electron images (SXIs).
Intuitive User Interface
PHI Genesis features a simple, intuitive, and user-friendly interface that allows users to perform both basic operations and automated analysis using all available options.
Auto tuning and Calibration
X-ray, electron, and ion gun sources can be calibrated and tuned automatically using the new auto tuning feature.
Multi-Technique Options
PHI Genesis facilitates same-area automated analysis using multiple techniques that can cover the full range of energy, from measuring the conduction band onset with Low Energy Inverse Photoemission Spectroscopy (LEIPS) to core-level excitation with Hard X-ray Photoelectron Spectroscopy (HAXPES). This unique ability to analyse the same area on a sample with all available multi-technique options provides unprecedented value that is not typically found in conventional X-ray Photoelectron Spectroscopy (XPS) instruments.
Superior Micro Area Analysis
In PHI Genesis, a micro-focused scanning X-ray source is used for intuitive, SEM-like navigation using X-ray induced secondary electron images (SXIs). Multi-point small areas can be defined from SXI images with 100% certainty for all types of acquisitions including spectra, depth profiles, and maps.
A typical XPS analysis on the PHI Genesis begins by collecting an SXI image that is quickly generated using a sub-5 µm diameter raster-scanned X-ray beam. Areas of interest for small or large area spectral analysis or imaging are selected from the SXI image and used to guide the next steps, which may include obtaining high energy resolution spectra for chemical state analysis, chemical state images, or compositional sputter depth profiles.
SEM-Like XPS/HAXPES Microprobe
With the SmartMosaic feature, PHI Genesis allows users to image macroscopic areas by automatically stitching together multiple maps or SXIs into a single image called a mosaic, greatly expanding the analysis size while maintaining high resolution and focus. Stitched mosaic SXI images can be used to investigate the homogeneity of the sample across much larger areas than available in a single SXI image. Areas of interest can be selected from these stitched large area X-ray induced secondary electron images for spectroscopic analysis.
High-Throughput Large Area Analysis
- Automated transfer of samples from intro to analysis chamber and parking positions
- Parking positions allow three sample holders plus in-situ holder with references to be kept inside the instrument for use without breaking vacuum
- 80 x 80 mm large sample holder is available for high throughput
- Can analyse a variety of sample types: powders, rough textures, insulators, large or oddly-shaped samples, and samples with varying heights on the same platen
Software
MultiPak Data Reduction Software
PHI MultiPak is the most comprehensive data reduction and interpretation software package available for electron spectroscopy. The tasks of spectral peak identification, extracting chemical state information, quantification, and detection limit enhancement are addressed with an array of powerful and easy-to-use software tools for spectra, line scans, images and sputter depth profiles. MultiPak can be used on the instrument PC to process data in real time or on an off line PC for report generation.
Advanced Data Reduction Tools
- Auto peak identification
- XPS chemical state database
- XPS spectral deconvolution
- Quantitative analysis
- Non-linear least squares fitting
- Linear least squares fitting
- Target factor analysis
- Retrospective chemical imaging
- Batch mode data processing
Downloads
PHI Genesis Brochure
XPS Depth Profiling of Organic Photovoltaic Films
XPS and TOF-SIMS for the Pharmaceutical Industry
VersaProbe 4 Scanning XPS Microprobe: Unique Instrument for Battery Characterisation
Use of Lab-based HAXPES to Eliminate the Effect of Ion Beam Damage at Interfaces in Depth Profiles
Organic Depth Profiling with the PHI Model 06-C60 Sputter Ion Gun
Probing Interfaces in Fuel Cell Electrodes by XPS and HAXPES
Complementary XPS and TOF-SIMS for Organic Analysis
Cleaning Polymer Surfaces with the PHI 06-C60 Sputter Ion Gun
Characterisation of Graphene using XPS and REELS
Mosaic Mapping for Analysis of Heterogeneous Battery Degradation
Service Support
Comprehensive repairs and servicing
Annual Support Programs
Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.
With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.
CN Tech’s Support Programs are an economical way to guarantee optimal working condition:
- Annual Preventive Maintenance
- Priority Technical Assistance
- Preferred Parts Availability
- On-Site User Training
- Remote Diagnostics
- No surprise repair expense and much more!
Support Contact Example
An example of our service and support contracts are shown below:
Metrology & Instrumentation Annual Support Programs 2024/25
CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.