PHI 710

Exceptional Spatial Resolution

High performance electron optics, precision sample handling, and advanced vibration and thermal isolation provide a superior environment for anno-scale Auger imaging and analysis at working magnifications of 500,000 X and higher. A robust imaging registration capability ensures long term image stability when it is needed. The sample to the right presents the cross-section of alternating layer of GaAIAs and GaAs of known thickness in a spatial resolution reference sample. On the left is an AI Auger map and to the right is an AI line scan that was extracted from the map data. The shape of the single 4nm line acquired for the 24 hours demonstrates the high stability of the 710 and the effectiveness of its image registration software.

Unobstructed Visualisation

PHI's coaxial electron gun and analyser geometry provides the sensitivity and unobstructed vision needed to fully characterise the microstructures that exist on most real-world samples. Instruments with non-coaxial geometry suffer from geometric effects that dramatically reduce instrumental sensitivity and create shadows that limit the usefulness of compositional images. With the 710's coaxial geometry, Auger data is obtained from all sides of particulates and between particles with equally high sensitivity providing Auger maps with meaningful compositional information.

Specialised Solutions for In-Situ Characterisation

The PHI 710 has multiple optional technique add-ons and accessories for specialised experiments. Liquid metal focused ion bean (FIB) allows for in-situ cross-sectioning of particles, defects and coatings. Energy dispersive X-ray Spectroscopy (EDS) detector provides qualitative and quantitative elemental information. The windowless software driven motor-controlled detector has a short working distance for wide acceptance angles. Backscattered Electron Detector (BSE) provides topographic information and compositional information of the sample by using a four-quadrant detector. Electron Backscatter Diffraction (EBSD) detector provides information about crystal structure and grain orientation.

The secondary electron image (top left) shows a particle within a titanium zirconium passivated aluminium sample. The particle was first observed by SEM/EDS and the EDS map (top right) of the region showed that the particle contained iron. A FIB cut across the centre of the particle (SEM image, bottom left) reveals the iron containing particle is platelet shaped and buried beneath the sample surface (bottom right). Analysis of these types of buried features requires the complementary analytical capabilities of EDS, FIB, and AES.

High Energy Resolution

The 710's high energy resolution mode of operation provides for continuous adjustment of the analyser energy resolution to as low as 0.1%. The high energy resolution capability can be used to enhance the chemical information content of spectra and AES images while maintaining all the advantages of the CMA with a coaxial electron source for obtaining data with high sensitivity and nearly eliminating topography induced artefacts. Additionally, the PHI 710 Scanning Auger Nanoprobe has no incorporated new electronics and data interpretation software to facilitate chemical state mapping based on images that contain a spectrum at each pixel.

The Si KLL peak area image from a semiconductor bond pad (left) is shown with three regions of interest. The extracted basis spectra from each ROI (right) reveals three distinct chemical states of silicon. This is enabled by the spectral window imaging mode, where in a Si KLL spectrum is collected and stored for each image pixel.