Filmetrics® F60-c Automated Film Thickness Mapper
The F60-c is a fully automated cassette-to-cassette metrology system for measuring film thickness on unpatterned production and monitor wafers. Seven configurations cover film thickness from 5nm up to 2mm.
Key Features
- Industry-leading thin-film measurement technology
- Intuitive analysis software standard with every system
- Built-in online diagnostics
- Library with over 130 materials included with every system
- 24-hour (M-F) phone, email, and online support from highly trained application engineers
- System package includes integrated spectrometer/light source unit, TS-SiO2-8-8000 thickness standard, 6” and 200mm wafer reflectance standards, and more!
Manufacturer
KLA
A global technology leader who make an impact by creating solutions that drive progress and transform industries. Collaboration is the key to their success. KLA provide leading-edge technology and devices using advanced inspection tools, metrology systems, and computational analytics. Their solutions accelerate tomorrow’s electronic devices. They enable evolution and innovation in the data era across key industries including automotive, mobile and data centre.
Product Overview
The Filmetrics® F60-c series extends the film thickness and index mapping capabilities of the F50 series by adding several features specifically designed for production environments. These include automatic notch finding, automatic on-board baselining, an enclosed measurement stage with motion interlock, and an industrial computer with pre-installed software.
The re-engineered F60-c improves upon the automation capability of the F60-c series by offering an automated cassette-to-cassette system for easy switching between wafer sizes. This system is ideal for incoming and outgoing process tool qualification, and chemical supplier quality control.
Product Comparison
| Model | Thickness Range (film stack dependent) | Wavelength Range |
| F60-c | 20nm – 70µm | 380 – 1050nm |
| F60-c-UV | 5nm – 40µm | 190 – 1100nm |
| F60-c-NIR | 100nm – 250µm | 950 – 1700nm |
| F60-c-EXR | 20nm – 250µm | 380 – 1700nm |
| F60-c-UVX | 5nm – 250µm | 190 – 1700nm |
| F60-c-XT | 0.2µm – 450µm | 1440 – 1690nm |
| F60-c-s1310 | 7µm – 2mm | 1280 – 1340nm |
Applications
Automated film-thickness measurement with a cassette-to-cassette system that can easily switch between wafer sizes
Mapping of n & k
Industry
Silicon Wafer and Membrane Thickness Measurement
Filmetrics® systems include tabletop, mapping, and production systems for silicon wafer thickness measurement and membrane thickness measurement. Wafer materials commonly measured include single-polished or double-polished Silicon, Sapphire, Fused Silica, SiC, LiTaO3, GaN, and Glass.
Our technical experts can help you find the best Filmetrics tool that fits your thickness measurement requirements, which may include a need for various thickness ranges, single-spot measurement, thickness mapping requirement, etc.
Downloads
Filmetrics F60-c Product Specifications
F60-c Brochure
Options
NIST-traceable Film Thickness Standards
KLA Instruments offers offers a wide selection of thin-film thickness standards for calibrating and verifying the accuracy of thin-film measurement systems. Filmetrics thin-film thickness standards meet the highest industry standards and can be supplied as NIST-traceable. If you don’t see the thickness standard you need for your film thickness measurements, please contact us. Our team of experts will work with you to provide the right thin-film thickness standard solution for your needs.
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Service Support
Comprehensive repairs and servicing
Annual Support Programs
Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.
With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.
CN Tech’s Support Programs are an economical way to guarantee optimal working condition:
- Annual Preventive Maintenance
- Priority Technical Assistance
- Preferred Parts Availability
- On-Site User Training
- Remote Diagnostics
- No surprise repair expense and much more!
Support Contact Example
An example of our service and support contracts are shown below:
Metrology & Instrumentation Annual Support Programs 2024/25
CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.