F54 Series Automatic Thin Film Mapping Analyser

F54 Series Automatic Thin Film Mapping Analyser

Map film thickness on samples up to 450mm in diameter easily and quickly with the Filmetrics F54 series. Measures up to 2 points a second, with a wide range of mapping templates. Multiple models available supporting different thickness ranges. Choose one of the dozens of predefined polar, rectangular, or linear map patterns, or create your own with no limit on the number of measurement points.

Manufacturer

Filmetrics

Filmetrics was founded in 1995 with the mission of making thin-film measurements simple and affordable. Our approach, borne of the microelectronics and software revolution, results in film-thickness measurements that take less than a second - by operators who can be trained in minutes.

Product Videos

Filmetrics F54

Key Features

  • Intuitive Analysis Software
  • 1.5mm to 150μm Spot Size
  • Large Material Reference Library
  • Wide Spectrometer Wavelength Range
  • Measures up to 2 Points per Second
  • Maximum 450mm Sample Diameter

Automatic Film Thickness Mapping

Filmetrics’ F54 series of automatic film thickness mappers are simple to use, and provide fast, accurate results. Able to measure up to 2 points a second, the F54 series are highly efficient and can produce even large maps in a short time. Automatic mapping produced with a motorised R-Theta stage, supporting samples up to 450mm in diameter, and designed to be reliable and robust. Numerous thickness maps a predefined, including polar, rectangular, and linear map patterns. Users can also configure custom maps, with no limit on the number of measurement points. The F54 platform is simple to set up and intuitive to use, requiring little user training.

Visualise Thickness in 2D & 3D with FILMapper

To make film thickness mapping fast and easy, Filmetrics have developed the FILMapper software package. The built-in material reference library includes over 130 materials, with thousands of additional materials available. FILMapper has a selection of film thickness map types preconfigured, and operators can also set up custom maps. Map shape and pattern, centre or edge exclusion, and spot density can all be customised. Thickness amps can be viewed in fully rotatable 3D, providing the best possible visualisation of samples. For each film thickness analysis tool, Filmetrics provides a comprehensive support package. This includes 24-hour online assistance, diagnostics, and applications support.

Model Specifications

Thickness and Wavelength Range

Model Specifications

Thickness Measurement Range

What’s Included

  • Integrated spectrometer/light source unit
  • MA-Cmount microscope adapter with Cmount fitting
  • Fibre optic cable
  • BK7 reflectance standard
  • TS-Focus-SiO2-4-10000 Focus/Thickness standard
  • 4", 6" and 200mm wafer reflectance standards
  • Vacuum pump
  • Spare TH-1 lamp

Additional Perks

  • Library with over 130 materials included with every system, along with access to 100s more
  • Applications Engineers available for immediate 24-hour assistance (Mon-Fri)
  • Online "Hands On" support
  • Hardware upgrade program

Downloads

Product Videos

Filmetrics F54

Brochures

F54 Series Automatic Thin Film Mapping Analyser Brochure

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Options

NIST-traceable thickness standard

SiO2-on-Si thickness standard, approx 7200Å thick, 4 inch wafer.

F50 chuck - 100mm 200mm 300mm and 450mm (F50-450 req'd for 450mm chuck)

F50 chuck assembly for 4", 5", 6", 200mm, 300mm & 450mm wafers.

Service Support

Comprehensive repairs and servicing

Annual Support Programs

Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.

CN Tech’s Support Programs are an economical way to guarantee optimal working condition:

  • Annual Preventive Maintenance
  • Priority Technical Assistance
  • Preferred Parts Availability
  • On-Site User Training
  • Remote Diagnostics
  • No surprise repair expense and much more!

Support Contact Example

An example of our service and support contracts are shown below:

Brochures

Metrology & Instrumentation Annual Support Programs 2022/23

CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

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