Evactron® Model E16 Plasma De-Contaminator™

Evactron® Model E16 Plasma De-Contaminator™

The Evactron® E16 De-Contaminator is a compact yet simplified plasma cleaner for Electron and Ion Beam Instrument load locks such as SEMs, TEMs, FIBs, and sample preparation chambers.


Evactron Plasma Cleaning by XEI Scientific

XEI Scientific, Inc. is the recognised leader in downstream plasma cleaning. The Evactron® Plasma De-Contaminator™ is an RF plasma cleaner that reduces hydrocarbon contamination in vacuum chambers. This significantly improves electron microscope imaging and analytical performance. Evactron plasma cleaners can also be used as an in-situ solution for cleaning EUV and X-ray optics as well as SEM and TEM samples. The Evactron De-Contaminator plasma cleaner can be installed on most vacuum chambers and electron microscopes. Controllers in rack mounted or tabletop configurations are available.

Key Features

  • RF Power: 5 to 16W continuous
  • Energy efficient radio frequency hollow cathode plasma (RFHC)
  • Compact PRS – WxHxD: 2.5”x2.125”x3.75” (6.3×5.4×9.5cm)
  • Programmable ignition power, cleaning power, cycle time, number of cycles
  • Power Centre controller – WxHxD: 12.25”x3.5”x9.34”(31×8.9×23.7cm)
  • Touchpad programming of cleaning recipes
  • Wide range of pressure operation: 1 Torr to 1.0 E-3 Torr
  • Fixed input air flow rate, no adjustments needed
  • Turbo pump compatible
  • PRS can be flush-mounted on the chamber or the load lock
  • No match or gas flow adjustments needed for plasma ignition
  • TÜV, NRTL and CE safety certified


The E16 delivers gentle and effective cleaning for superior resolution and imaging plus improved detector and probe sensitivity that are compromised by contamination. New design features of the Evactron® E16 Plasma Radical Source (PRS) include a unique flush-mounting flange and compact size to fit in restricted spaces on a chamber wall. The Evactron® E16 Power Centre controller has a small footprint and can be placed horizontally or vertically to conserve space.

Service Support

Comprehensive repairs and servicing

Annual Support Programs

Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.

CN Tech’s Support Programs are an economical way to guarantee optimal working condition:

  • Annual Preventive Maintenance
  • Priority Technical Assistance
  • Preferred Parts Availability
  • On-Site User Training
  • Remote Diagnostics
  • No surprise repair expense and much more!

Support Contact Example

An example of our service and support contracts are shown below:


Metrology & Instrumentation Annual Support Programs 2022/23

CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

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