Evactron® E25
The microprocessor based Evactron E25 monitors plasma operation, has internal memory and is factory programmed to allow minimum operator training. The tabletop Evactron E25 Controller uses a microprocessor with embedded software to regulate a leak valve and control the chamber pressure by a MicroPirani™ gauge. The microprocessor also regulates the RF power and has a clock to time the downstream plasma cleaning and nitrogen purging cycles. The microprocessor also records the operational and fault log. The Encoder Knob sets parameters in menus shown on the front panel display, and the Enable/Disable Button readies the Evactron E25 for downstream plasma cleaning. The RS232 interface communicates operating parameters, forward and reflected RF power, vacuum level read outs, and operation/fault log between the Evactron E25 and a remote computer through the provided Graphical User Interface (GUI).
Key Features
- Microprocessor control: Embedded software regulates the leak valve and chamber pressure for automated, repeatable cycles
- MicroPirani™ pressure monitoring: An MKS MicroPirani gauge gives accurate vacuum measurement, with selectable pressure units, throughout the cycle
- Regulated RF power: Adjusts and monitors 0–20 W RF output at 13.56 MHz for controlled downstream cleaning
- Cycle & purge management: Clock-based timing controls plasma cleaning and nitrogen-purge steps
- Data logging: Records operational and fault events to internal memory
- Remote operation: RS232 (DB9) interface with GUI enables full computer control
- Dual-action cleaning: Combines plasma and UV afterglow to remove hydrocarbon contamination
- Non-damaging: Gentle downstream cleaning that protects sensitive samples and components
- Alternate-gas capability: Runs on air or alternate process gases for tailored cleaning chemistry
Manufacturer
Evactron Plasma Cleaning by XEI Scientific
For almost three decades XEI Scientific has helped researchers, engineers, and manufacturers to maintain cleaner vacuum environments for electron microscopy and advanced analytical instrumentation.
XEI Scientific pioneered downstream plasma cleaning for electron microscopes and introduced the Evactron® De-Contaminator, the first commercial in-situ plasma cleaning system for electron microscope vacuum chambers. Today, Evactron plasma cleaning technology is trusted by laboratories worldwide to remove hydrocarbon contamination, support pristine vacuum conditions, and improve performance across SEM, TEM, FIB, UHV, EUV, X-ray optics, and specimen-preparation applications.
Their mission is straightforward: to help scientists and engineers achieve cleaner systems, clearer data, and more dependable results. As XEI Scientific enters its next chapter, we remain committed to practical innovation, responsive customer support, and the high standards of quality and reliability that have defined the Evactron name.
Downloads
E25 Product Sheet
Related Products
Service Support
Comprehensive repairs and servicing
Annual Support Programs
Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.
With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.
CN Tech’s Support Programs are an economical way to guarantee optimal working condition:
- Annual Preventive Maintenance
- Priority Technical Assistance
- Preferred Parts Availability
- On-Site User Training
- Remote Diagnostics
- No surprise repair expense and much more!
Support Contact Example
An example of our service and support contracts are shown below:
Metrology & Instrumentation Annual Support Programs 2024/25
CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.