DST2-TG – Sputter Coater and Thermal Evaporator for Glove Box
The DST2-TG, double-target turbo pumped sputter coater with thermal evaporator for glove box use, is a multi-vacuum coater system that combines thermal evaporator and sputter coater in one single compact desktop system. The high vacuum system is suitable for the deposition of a wide range of materials. Double magnetron target desk sputter coater can easily switch between evaporation and sputtering deposition for the preparation of multilayer coatings, without breaking the vacuum.
Manufacturer
Vac Coat
Vac Coat Limited is a designer and manufacturer of high-quality tailor-made Physical Vapour Deposition (PVD) and Vacuum Coating Systems with excellent customer care and after sale services. Equipped with more than 25 years’ experience in the vacuum and Thin Film deposition technologies. Their research and development team supported by academic scientists and qualified engineers are highly active to develop new designs and meet special inquiries received from clients. Designed and manufactured components by Vac Coat's engineering team meets high-quality standards. Their vacuum coating systems have been sold to many universities and research centres through distributors worldwide with very good references and feedback.
Key Features
- Two-stage rotary vane backing pump
- High-vacuum built-in turbo pump 90 l/s
- Full range vacuum gauge
- Electrical lift arm to ride up and down the vacuum chamber
- Two 2” water-cooled sputtering cathodes
- Two quartz crystal sensors (1 nm precision) for real-time thickness measurement
- Two precision Mass Flow meter (MFC) for fine control of vacuum and pressure
- Electronic shutters
- Cathode selection motor
- Sample rotation, height, and tilt adjustable
- Two-year warranty
- CE conformity
- Intuitive touch screen to control the coating process and rapid data input
- User friendly software, updatable via network
- Semi-Full automatic coating process
- Software controllable vertical movement of the vacuum glass chamber
- Manual or automatic sputter coating in Timed and Thickness modes
- Storing sputter coating recipes for repeatable depositions
- Automated cathode selection for multilayer thin film deposition
- Co-sputtering with sample oscillation settings
Overview
The DST2-TG magnetron desk sputter coater is a high-precision semi/fully automated vacuum coating system equipped with a large chamber (300 mm diameter) and two 2” diameter water-cooled cathodes, which make it suitable for long-time deposition. The system is a single platform for sputtering, carbon fibre, and metal evaporation. The magnetron desk sputter coater can sputter semiconductors, dielectrics, and metal targets. Sputtering cathodes and thermal evaporation boats could be installed together or interchangeably, with an overall three deposition sources accessible (When placing the order). Carbon deposition is also made possible by utilising carbon fibre (Thread).
This sputter coater and thermal evaporator for glove box can be equipped with optional facilities including:
- RF power supply with an auto-adjustable matching box which minimises the reflected power in the RF sputtering process
- Glow discharge plasma for removing organic matter from the substrate surface before thin film deposition
Clean Vacuum
The vacuum chamber of DST3-T is Cylindrical Pyrex with 300 mm OD and 200 mm H (Adjustable to 250 mm H). The DST3-T is fitted with an internally mounted turbomolecular pump, backed by a 6 m3/h two-stage rotary vane pump (optional). It introduces a clean vacuum without oil contamination which normally exists with an ordinary diffusion pump.
Touch Screen Control
DST3-T is equipped with a 7” coloured touch screen panel using user-friendly software to control and adjust the deposition process data. The vacuum and coating sequence information can be observed as digital data or curves on the touch screen and the last 300 coatings are saved on the history page.
Two Configurations of DST2-TG for Glovebox Integration
DST2-TG-On-Deck
Instrument case (chamber and connections) is placed completely inside the glove box.
Glovebox mounted KF40 feedthroughs for power supplies, vacuum, water, gas connections, and electrical connections.
The panel window is available on pc through a Wi-Fi connection used for coating process management and data transfer.
DST2-TG-In-Deck
The chamber is placed into the floor of the glove box and sealed by specially designed chamber base.
No Special feedthrough is needed for the electrical, vacuum, water and gas connections.
The panel window is available outside the glovebox to manage coating process. The graphs and data transfer is viable through a USB port.
Detailed Features of DST2-TG
- Dimensions: 705 x 600 x 670 mm (H x W x D) (when the chamber is open, the height is 825 mm)
- Rack Dimensions:
- With RF, DC, High current: 850 x 560 x 710 mm (H x W x D)
- Without RF: 450 x 560 x 710 mm (H x W x D) - Weight: 80-100 Kg (Instrument case with rack)
- Glass Chamber Dimensions: Pyrex Cylinder Shape, Diameter 300mm, Height 200/250mm (optional), Thickness 7mm
- Glovebox Integration:
-On-Deck model: Max. 12xISOKF40 feedthroughs for power supplies (DC, RF, and High- Current (HC)), vacuum pump hose, water cooling, argon/reactive gas and electrical connections should be installed on the glovebox backside (if all accessories ordered)
- In-Deck model: A rectangle (470mmx400mm) from the glovebox floor is removed to place and install the chamber base. Sealing gaskets on the chamber base, provided by the manufacturer, ensure reaching high vacuum level inside the chamber. Before ordering the glovebox, its drawings should be checked with the manufacturer. - Display Screen: 7” Diagonal (16:9) 800×480 High Colour- Graphic TFT- LCD
- User Interface: Colour & Touch Screen
- Data Transfer: USB Port / Wi-Fi connection (based on the model)– For Transferring the data and graph to PC
- Target Dimension: 1-3 Discs, 2 inches Dia., Thickness 0.1~6 mm (Less than 3 mm thickness is preferred), Thickness of ferromagnetic targets should be less than 0.5 mm. For long-term, high-power sputtering processes, targets need a ferromagnetic back plate with thickness of 0.1-0.2 mm.
- Thermal evaporation boat/basket dimension: Length 4-7 cm
- Sample Holder Dimension: Max Diameter 3″
- Chamber’s Lid: Made of Aluminium, chamber and lid up/down movement by electrical lift arm
Applications
- Metal, semiconductor, and dielectric Films
- Nano and microelectronic
- Solar cell applications
- Thin film battery applications
- Co-Sputtering processes
- Glad sputtering
- Optical components coating
- Thin film sensors
- Magnetic thin film devices
- Fine grain structural deposition for SEM and FE-SEM sample preparation
Options
- Quartz crystal sensor
- Spare glass chamber
- Sputtering targets
- Sealing gaskets
- Thermal source holders (Boat/ basket)
- Glow discharge plasma rod
Related Products
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