- High-vacuum level with built-in turbo pump (Leybold)
- Suitable for deposition of a wide range of materials
- 300 mm OD × 210 mm H vacuum chamber
- Dimensions: 580 × 500 × 630 mm (H × W × D)
- Precise control over the sputtering rate to achieve finer grain structure
- Automatic control of the deposition power independent of pressure
- Automatic control of the cathode’s temperature to protect the lifetime of the magnets
- Rapid data input through fully automatic touch screen panel
- Real-time plots of coating parameters
- Deposition process data transfer to PC by a USB port
- Utilities: 220 V-110 V, 50/60 HZ – 2 kW
- Shipping weight: 50 kg
DST1-300 – Magnetron Desk Sputter Coater
The high-vacuum magnetron desk sputter coater model DST1-300 is a compact coating system capable of performing durable deposition of uniform coatings of semiconductors, dielectrics and metals (oxidising and non-oxidising) with fine-grain sizes in a large 300 mm dia. chamber. The large chamber DST1-300 with a 2, 3, or 4-inch water-cooled magnetron cathode is ideally suitable for coating large specimens with diameters of up to 15 cm, or multiple smaller specimens over a similar diameter.
Manufacturer
Vac Coat
Vac Coat Limited is a designer and manufacturer of high-quality tailor-made Physical Vapour Deposition (PVD) and Vacuum Coating Systems with excellent customer care and after sale services. Equipped with more than 25 years’ experience in the vacuum and Thin Film deposition technologies. Their research and development team supported by academic scientists and qualified engineers are highly active to develop new designs and meet special inquiries received from clients. Designed and manufactured components by Vac Coat's engineering team meets high-quality standards. Their vacuum coating systems have been sold to many universities and research centres through distributors worldwide with very good references and feedback.
Key Features
- Built-in turbomolecular pump (Leybold)
- Two stage rotary vane vacuum backing pump (Diaphragm and scroll pump)
- Full range vacuum gauge (Leybold)
- DC power supply 600W
- Quartz crystal thickness monitor with precision of 1 nm and resolution of 1 Å
- Electronic gas valves
- Sample rotation, height, and tilt adjustable
- Thermal evaporation feed-throughs (optional)
- Electronic shutter
- Easy-to-change specimen stages (rotation stage as standard)
- Two-year warranty
- CE standard conformity
- Intuitive touch screen to control the coating process and rapid data input
- User friendly software, updatable via network
- Controls coating rate to achieve finer grain structures
- Semi-Full automatic coating process (optional)
- Repeatable and programmable sputtering process in the automatic mode
- Manual or automatic timed and thickness sputtering deposition
- Able to record and plot coating parameters graphs
- Storing coating recipes for repeatable depositions
Touch Screen Control
The DST1-300 is equipped with a 7” coloured touch screen and full automatic control using a user-friendly software to control and adjust the deposition process data. The vacuum and coating sequence information can be observed as digital data or curves on the touch screen. The last 300 coatings information is saved on the history page.
Sample Holder
The samples in DST1-300 can be mounted on different rotatory sample holder stages. The standard sample holder stage is rotatable with adjustable height and angle and can be changed easily.
Specifications
Applications
- Metal, semiconductor, and dielectric Films
- Nano and microelectronic
- Solar cell applications
- Optical components coating
- Thin film sensors
- Magnetic thin film devices
- Computer memory applications
- Able to perform Glad sputtering (with optional planetary rotation_
- Fine grain structural deposition for SEM and FE-SEM sample preparation
Options
- Substrate bias voltage
- RF generator and auto matching box
- Substrate heater (Up to 500 C)
- Quartz crystal sensor
- Thermal evaporation boats/baskets
- Planetary rotating sample holder
- Plasma cleaner
- Spare glass chamber
- Vacuum cylindrical spare glass chamber
- Sputtering targets
- Sealing gaskets
Related Products
Service Support
Comprehensive repairs and servicing
Annual Support Programs
Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.
With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.
CN Tech’s Support Programs are an economical way to guarantee optimal working condition:
- Annual Preventive Maintenance
- Priority Technical Assistance
- Preferred Parts Availability
- On-Site User Training
- Remote Diagnostics
- No surprise repair expense and much more!
Support Contact Example
An example of our service and support contracts are shown below:
Brochures
Metrology & Instrumentation Annual Support Programs 2024/25
CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.