DST1-170 - High Vacuum Desk Sputter Coater
The high-vacuum magnetron desk sputter coater model DST1-170 is a compact coating system with the ability to coat metals (oxidising and non-oxidising), suitable for short-term deposition periods. DST1-170 is able to deposit uniform thin films with fine-grain sizes in a fast cycle time.
Manufacturer
Vac Coat
Vac Coat Limited is a designer and manufacturer of high-quality tailor-made Physical Vapour Deposition (PVD) and Vacuum Coating Systems with excellent customer care and after sale services. Equipped with more than 25 years’ experience in the vacuum and Thin Film deposition technologies. Their research and development team supported by academic scientists and qualified engineers are highly active to develop new designs and meet special inquiries received from clients. Designed and manufactured components by Vac Coat's engineering team meets high-quality standards. Their vacuum coating systems have been sold to many universities and research centres through distributors worldwide with very good references and feedback.
Key Features
- High vacuum level with built-in turbomolecular pump 90 L/S (Leybold)
- Two stage rotary vane backing pump (Diaphragm and scroll pump)
- Full range vacuum gauge
- DC power supply 80 W
- Quartz crystal thickness monitor with precision of 1nm and resolution of 1 Å
- One 2-inch magnetron cathode
- Electronic leak valve for Argon gas
- Sample rotation, height, and tilt adjustable
- Planetary rotating sample holder
- Equipped with electronic shutter
- Easy-to-change specimen stages (Rotation stage as standard)
- Two-year warranty
- CE standard conformity
- Intuitive touch screen to control the coating process and rapid data input
- User friendly software that can be updated via network
- Controls coating rate to achieve finer grain structures
- Semi-Full automatic coating process (optional)
- Repeatable and programmable sputtering process in the automatic mode
- Manual or automatic timed and thickness deposition
- Able to record and plot coating parameters graphs
- Storing coating recipes for repeatable depositions
Overview
This high vacuum coater offers high quality uniform films with fine grain sizes which are suitable for specimens that require high resolution and high quality characterisation such as FE-SEM, EDS/WDS, TEM, and EBSD. The DST1-170 with a 2” magnetron cathode and 80 W switching DC power supply, could be used for research and different thin film applications.
DST1 can be equipped with a water-cooled cathode which make it suitable for long time deposition.
The maximum size of substrates in this model could be 4 inches.
Clean Vacuum of DST1-170
Touch Screen Control
Sample Holder Stages
Specifications
- Ultimate vacuum: Less than 8 x 10-6 Torr
- Suitable for deposition of oxidising and non-oxidising materials
- Precise control over the sputtering rate to achieve finer grain structure
- Automatic control of the deposition power independent of pressure
- Automatic control of the cathode’s temperature to protect the lifetime of the magnets
- 170 mm OD x 140 mm H vacuum chamber
- Dimensions: 540 x 500 x 450 mm (H × W × D)
- Rapid data input through colourful touch screen panel
- Real-time plots of coating parameters
- Deposition process data transfer to PC by a USB port
- Utilities: 220 V-110 V, 50/60 HZ – 1.5 kW
- Shipping weight: 36 kg
Applications
- Fine grain structural deposition for SEM and FE-SEM sample preparation
- Nano and microelectronic
- Solar cell applications
- Optical components coating
- Thin film sensors
- Able to perform GLAD sputtering
Options
- Quartz crystal sensor
- Planetary sample rotation stage
- Spare glass chamber
- Sputtering targets
- Plasma cleaner
- Sealing gaskets
Related Products
Service Support
Comprehensive repairs and servicing
Annual Support Programs
Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.
With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.
CN Tech’s Support Programs are an economical way to guarantee optimal working condition:
- Annual Preventive Maintenance
- Priority Technical Assistance
- Preferred Parts Availability
- On-Site User Training
- Remote Diagnostics
- No surprise repair expense and much more!
Support Contact Example
An example of our service and support contracts are shown below:
Metrology & Instrumentation Annual Support Programs 2024/25
CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.