DSR1 – Dedicated Sputter Coater
The desk sputter coater model DSR1 is a compact coating system able to coat noble metals such as gold (Au), palladium (Pd), platinum (Pt), and gold/palladium (Au/Pd) thin films on non-conductive or poorly conductive specimens. Uniform thin films with fine-grain sizes can form in a fast cycle time which makes it an ideal coating system for sample preparation for scanning electron microscopy (SEM) analysis.
Manufacturer
Vac Coat
Vac Coat Limited is a designer and manufacturer of high-quality tailor-made Physical Vapour Deposition (PVD) and Vacuum Coating Systems with excellent customer care and after sale services. Equipped with more than 25 years’ experience in the vacuum and Thin Film deposition technologies. Their research and development team supported by academic scientists and qualified engineers are highly active to develop new designs and meet special inquiries received from clients. Designed and manufactured components by Vac Coat's engineering team meets high-quality standards. Their vacuum coating systems have been sold to many universities and research centres through distributors worldwide with very good references and feedback.
Key Features
- Two-stage, direct drive rotary vane pump 6 m3/h
- 80 W switching DC power supply
- Quartz crystal thickness monitor with precision of 1nm and resolution of 1 Å
- One 2-inch magnetron cathode
- Electronic gas valves
- Sample rotation, height and tilt adjustable
- Equipped with electronic shutter
- Easy-to-change specimen stages (Rotation stage as standard)
- Two-year warranty
- CE conformity
Touch Screen Control
The DSR1 is equipped with a 7” coloured touch screen and full automatic control using a user-friendly software to control and adjust the deposition process data. The vacuum and coating sequence information can be observed as digital data or curves on the touch screen. The last 300 coatings information is saved on the history page and can be transferred to PC by a USB port on the device.
Sample Holder Stages
The DSR1 can be equipped with different sample stage configurations depending on the user requirements. The standard sample stage is rotatable with adjustable height and angle and can be changed easily. The rotary planetary sample stage is a good choice for uniform coating of porous specimens (optional).
Detailed Features
| Dimensions | 420 x 480 x 370 mm (H x W x D) |
| Weight | 30kg |
| Vacuum Chamber Dimension | Borosilicate Glass, 170 mm Dia.× 140 mm Height |
| Display Screen | 7" Diagonal (16:9) 800x480 High Colour - Graphic TFT-LCD |
| Data Transfer | USB Port - For transferring the data and graph to PC |
| Target Dimension | 1 disc, diameter ranging 50-56mm, Thickness 0.1 ~ 3mm (The preferred thickness less than 1mm) |
| Sample Holder Dimension | Diameter 60mm, can contain: 11x6mm stubs or 6x7mm stubs or 5x19mm stubs |
Thickness Sensor
| Specification | Crystal thickness gauge with sensor, gold coated crystal quartz, oscillator |
| Resolution | ±1 Angstrom |
| Accuracy | ±1 nanometre |
Vacuum Equipment
| Vacuum Pump | Two-stage rotary vane |
| Vacuum Gauge Range | 103-1×10-3 Torr |
| Final Vacuum | 30×10-3 Torr |
Service and Other Information
| * Single-phase AC power with appropriate earth connection is required | |
| Gas | Argon as a carrier gas with %99.999 purity |
| Electric Power Supply | DC: 80 W switching DC power supply |
| Control of Argon supply | Electronic leak valve |
| Electrical Inlet | Inlet: 220-240V, 50/60Hz; or 110V, 50/60Hz * |
Applications
The DSR1 is a scanning electron microscope sample preparation system equipped with a rotary pump to achieve vacuum less than 50 mTorr, which is a suitable vacuum range for noble metals sputter coating.
- Noble metal coating for SEM and FE-SEM sample preparation
- Contact coating
- Glow discharge plasma for surface modifications and improved surface hydrophilicity (pptional)
Options
- Quartz crystal sensor
- Planetary sample rotation stage
- Spare glass chamber
- Sputtering targets
- Sealing gaskets
- Glow discharge plasma rod
Related Products
Service Support
Comprehensive repairs and servicing
Annual Support Programs
Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.
With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.
CN Tech’s Support Programs are an economical way to guarantee optimal working condition:
- Annual Preventive Maintenance
- Priority Technical Assistance
- Preferred Parts Availability
- On-Site User Training
- Remote Diagnostics
- No surprise repair expense and much more!
Support Contact Example
An example of our service and support contracts are shown below:
Metrology & Instrumentation Annual Support Programs 2024/25
CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.