DSCT-300 High Vacuum Dual Sputter and Carbon Coater
The DSCT-300 is configured as a dual sputter coater and carbon coater capable of performing successive sputtering and carbon evaporation deposition with fine-grain sizes without breaking the vacuum in a large 300 mm dia. chamber, suitable for research purposes and scanning electron microscope (SEM) sample preparation.
Manufacturer
Vac Coat
Vac Coat Limited is a designer and manufacturer of high-quality tailor-made Physical Vapour Deposition (PVD) and Vacuum Coating Systems with excellent customer care and after sale services. Equipped with more than 25 years’ experience in the vacuum and Thin Film deposition technologies. Their research and development team supported by academic scientists and qualified engineers are highly active to develop new designs and meet special inquiries received from clients. Designed and manufactured components by Vac Coat's engineering team meets high-quality standards. Their vacuum coating systems have been sold to many universities and research centres through distributors worldwide with very good references and feedback.
Key Features
- High vacuum level with built-in turbo pump 90 L/s (Leybold)
- Two-stage rotary vane backing pump (Diaphragm and scroll pump)
- 160 W sputtering switching DC power supply
- 500 W switching DC power supply for carbon fibre deposition
- Carbon fibre (Thread) evaporation head
- Quartz crystal thickness monitor with precision of 1 nm and resolution of 1 Å
- One 2-inch magnetron cathode
- Automatic venting valve
- Sample rotation, height, and tilt adjustable
- Planetary sample holder (Optional)
- Electronic shutter
- Easy-to-change specimen stages (Rotation stage as standard)
- Two-year warranty
- CE conformity
- Intuitive touch screen to control the coating process and rapid data input
- User-friendly software, updatable via network
- Repeatable, programmable coating process in the automatic mode
- Semi-full automatic sputtering deposition process in Timed or Thickness modes
- Semi-full automatic carbon fibre/rod deposition process
- Automatic carbon fibre coating in flash or pulsed modes
- Automatic carbon rod coating in pulsed or ramped modes
- Records and plots coating parameters graphs
- Storing coating recipes for repeatable depositions
Overview
The DSCT-300 can be used for the deposition of uniform coatings of semiconductors, dielectrics and metals (Noble and oxidizing), such as gold (Au), platinum/palladium (Pt/Pd) alloy, silver (Ag), chromium (Cr), tungsten (W), iridium (Ir), etc., together with carbon thread (Fibre)/rod to coat thin films on various surfaces, for different applications like micro and nano-electronic, metalising and electron microscopy imaging.
The high vacuum coater is equipped with a turbomolecular pump that offers high-quality uniform films with fine grain sizes under high vacuum conditions, suitable for specimens that require high resolution characterisation such as FE-SEM, EDS/WDS, TEM, and EBSD.
The DSCT-300 coating system is equipped with a 160W switching DC and 24V high current power supply.
It also has a water-cooled cathode, which makes it suitable for long time sputtering deposition. The full-automatic sputter and carbon coating processes allow easy, precise, and repeatable performance. The maximum size of the substrates in this model could be 8 inches.
Pulsed Carbon Fibre Evaporation
The DSCT-300 coater is able to perform pulsed carbon fibre evaporation. Short pulses provide more controlled deposition and significantly reduce the amount of debris associated with traditional carbon deposition.
Carbon Rod Evaporation (Optional)
The DSCT-300 could be equipped with a carbon rod evaporator head (optional). For this case, an external 0-100 A high current power supply should be used instead of the internal high current power supply which is designed for carbon thread evaporation.
Touch Screen Control
DSCT-300 is equipped with a 7” coloured touch-screen panel and fully automatic control utilising user-friendly software to control and adjust the deposition process data. The vacuum and coating sequence information can be observed as digital data or curves on the touch screen. The last 300 coatings information is saved on the history page.
Sample Holder Stages
The DSCT can be equipped with different sample stage configurations depending on the user requirements. The standard sample stage is rotatable with adjustable height and angle and can be changed easily. The rotary planetary sample stage is a good choice for uniform coating of porous specimens (optional).
Specifications
| Pumping Speed (Ls-1 | 90 | 250 | 350 |
| Ultimate Pressure (Torr) | 8x10⁻⁶ | 3x10⁻⁶ | 8x10⁻⁷ |
Applications
- Fine grain structural deposition of carbon and metals (Noble and oxidizing) thin films for SEM, FE-SEM, EDX, and TEM sample preparation
- Nano and microelectronic
- Conductive layers
- Thin Film Sensors
- GLAD sputtering
- TEM grid plasma treatment for improved hydrophilicity (Optional)
Options
- Head and high-current power supply for carbon rod evaporation
- Quartz crystal sensor (Silver/gold coated)
- Planetary sample rotation stage
- Spare cylindrical vacuum glass chamber
- Sputtering targets
- Cathode mask
- Sealing gaskets
- Carbon fibre source
- Glow discharge plasma
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