Evactron® Model E25 Plasma De-Contaminators™
The microprocessor based Evactron® E25 monitors plasma operation, has internal memory and is factory programmed to allow minimum operator training.
Manufacturer
Evactron Plasma Cleaning by XEI Scientific
XEI Scientific, Inc. is the recognised leader in downstream plasma cleaning. The Evactron® Plasma De-Contaminator™ is an RF plasma cleaner that reduces hydrocarbon contamination in vacuum chambers. This significantly improves electron microscope imaging and analytical performance. Evactron plasma cleaners can also be used as an in-situ solution for cleaning EUV and X-ray optics as well as SEM and TEM samples. The Evactron De-Contaminator plasma cleaner can be installed on most vacuum chambers and electron microscopes. Controllers in rack mounted or tabletop configurations are available.
Key Features
- RF Power: 0-20 Watts at 13.56 MHz
- LEDs: Power on, Enable, RF On, Plasma On, and Fault
- Front Panel Display and Encoder Knob and Enable/Disable button for Front Panel Control
- Computer control with RS 232 I/O, DB9 Connector, Null Model Cable, 56k Baud
- GUI with Event Log
- Fixed RF Match mounted on RF feed through
- MKS MicroPirani Transducer for vacuum pressure measurement
- Electrically adjusted metering valve for flow/pressure adjustment
- RF power interlock prevents starting when out of vacuum pressure range
- Nitrogen purge feature
- 100-240 VAC 50/60 Hz input
Overview
The tabletop Evactron® E25 Controller uses a microprocessor with embedded software to regulate a leak valve and control the chamber pressure by a MicroPirani™ gauge. The microprocessor also regulates the RF power and has a clock to time the downstream plasma cleaning and nitrogen purging cycles. The microprocessor also records the operational and fault log. The Encoder Knob sets parameters in menus shown on the front panel display, and the Enable/Disable Button readies the Evactron® E25 for downstream plasma cleaning. The RS232 interface communicates operating parameters, forward and reflected RF power, vacuum level read outs, and operation/fault log between the Evactron® E25 and a remote computer through the provided Graphical User Interface (GUI).
Downloads
E25 Product Sheet
Related Products
Service Support
Comprehensive repairs and servicing
Annual Support Programs
Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.
With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.
CN Tech’s Support Programs are an economical way to guarantee optimal working condition:
- Annual Preventive Maintenance
- Priority Technical Assistance
- Preferred Parts Availability
- On-Site User Training
- Remote Diagnostics
- No surprise repair expense and much more!
Support Contact Example
An example of our service and support contracts are shown below:
Metrology & Instrumentation Annual Support Programs 2024/25
CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.