With desk sputter coater model DSCR-300, one can deposit on different substrates for thin film applications such as micro and nano electronic and SEM sample preparation. It is also capable to sputter noble non-oxidising metals (deposition material table) such as gold (Au), palladium (Pd), platinum (Pt), and gold/palladium (Au/Pd) on non-conductive or poorly conductive samples. Besides, the nano-structured specimen coated with a thin carbon film can be characterised through various techniques like FE-SEM, TEM, and EDX.
DSCR-300 - Desk Sputter & Carbon Coater
The large chamber rotary pumped DSCR-300, desk sputter and carbon coater, with a 3 or 4-inch water-cooled magnetron cathode is a compact coating system for both sputter and carbon coating. This system is suitable for non-oxidising targets deposition on large specimens. The water-cooled magnetron allow prolonged sputtering time, making it suitable for deposition of thick and thin layers.
Manufacturer
Vac Coat
Vac Coat Limited is a designer and manufacturer of high-quality tailor-made Physical Vapour Deposition (PVD) and Vacuum Coating Systems with excellent customer care and after sale services. Equipped with more than 25 years’ experience in the vacuum and Thin Film deposition technologies. Their research and development team supported by academic scientists and qualified engineers are highly active to develop new designs and meet special inquiries received from clients. Designed and manufactured components by Vac Coat's engineering team meets high-quality standards. Their vacuum coating systems have been sold to many universities and research centres through distributors worldwide with very good references and feedback.
Key Features
- Two-stage, direct drive rotary vane pump 6 m3/h
- 80 W DC switching power supply for sputtering
- 0-25 A pulsed DC power supply for carbon fibre evaporation
- 0-100 A DC power supply for carbon rod evaporation (optional)
- Quartz crystal thickness monitor with precision of 1nm and resolution of 1 Å
- One 2, 3, or 4-inch magnetron cathode
- Electronic venting valve
- Sample rotation, height, and tilt adjustable
- Electronic shutter
- Easy-to-change specimen stages (rotation stage as standard)
- Two-year warranty
- CE conformity
- Intuitive touch screen to control the coating process and rapid data input
- User friendly software, updatable via network
- Precise control over coating rate to achieve finer grain structures
- Manual or automatic timed and thickness deposition
- Semi-full automatic sputtering
- Semi-full automatic carbon fibre/rod deposition process
- Pulsed or flash carbon fibre coating modes
- Pulsed or ramped carbon rod coating modes
- Repeatable and programmable sputtering and carbon coating process in the automatic mode
- Records and plots coating parameters graphs
- Storing coating recipes for repeatable depositions
Overview
The 3-inch magnetron can be used to uniformly coat a sample of diameter up to 12 cm, and a sample with a diameter of about 15 cm can be coated with the 4-inch magnetron. Also, more than 50 SEM small stubs (1 cm dia.) can be loaded onto the 4-inch sample stage.
The DSCR-300 rotary pumped coater is configured for DC sputtering and carbon fibre (Thread) or carbon rod coating with interchangeable heads in one instrument. The full-automatic sputter and carbon coating processes allows easy, precise, and repeatable performance.
Pulsed Carbon Fibre Evaporation
The DSCR-300 coater is able to perform pulsed carbon fibre evaporation. Short pulses provide more controlled deposition and significantly reduces the number of debris associated with traditional carbon deposition.
Carbon Rod Evaporation (Optional)
The DSCR-300 could be equipped with carbon rod evaporator head (optional). For this case, an external 0-100 A high current power supply should be used instead of the internal high current power supply designed for carbon fibre evaporation.
Touch Screen Control
DSCR-300, the desk SEM coater, is equipped with a 7” coloured touch screen and full automatic control using a user-friendly software to control and adjust the deposition process data. The vacuum and coating sequence information can be observed as digital data or curves on the touch screen. The last 300 coatings information is saved on the history page.
Sample Holder Stages
The DSCR-300 can be equipped with different sample stage configurations up to 15 cm, depending on the user requirements. The standard sample stage is rotatable with adjustable height and angle and can be changed easily.
Sample Holder Stages (copy)
| Dimensions | 58 cm H x 50 cm W x 63 cm D |
| Ultimate vacuum | Less than 50 mTorr |
| Utilities | 220 V/110 V, 50/60 HZ – 1.7 kW |
| Shipping weight | 42 Kg |
Applications
- Fine grain structural deposition of noble metals for SEM, FE-SEM, EDX, and TEM sample preparation
- Conductive layers
- GLAD sputtering
- TEM grid plasma treatment for improved hydrophilicity
Options
- Head and external power supply for carbon rod evaporation
- Quartz crystal sensor
- Planetary sample rotation stage
- Spare cylindrical vacuum glass chamber
- Sputtering targets
- Sealing gaskets
- Plasma cleaner
- Carbon fibre source
Related Products
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Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.
With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.
CN Tech’s Support Programs are an economical way to guarantee optimal working condition:
- Annual Preventive Maintenance
- Priority Technical Assistance
- Preferred Parts Availability
- On-Site User Training
- Remote Diagnostics
- No surprise repair expense and much more!
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CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.