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Zeta-388 True Colour 3D Optical Profiler

Product Features

Key Features

  • 6 Integrated Optical Metrology Techniques
  • Multiple Stage Options for Large Samples
  • Integrated Vibration Isolation
  • Fully Automated Imaging & Measurement
  • Auto Sample Handling System
  • CD Measurement Capability
KLA Zeta-388 optical profiler system

ZDot™ High Resolution 3D Topography & Imaging

With KLA’s patented ZDot™ technology, is possible to collect high resolution 3D topography data simultaneously with True Colour infinite focus imaging. Through a combination of innovative 3D measurement technology, and advanced computer algorithms, high quality surface measurements and imagery is collected with efficiency and accuracy. Combined with the Zeta-388’s automated wafer handling, the Zeta-388 provides high-throughput sample inspection capabilities with incredible clarity.

A 3D view of a sample surface, produced from topography data generated by ZDot ZDot™’s high resolution 3D scanning
ZDot™ High Resolution 3D Topography Data
An infinite focus, true colour image of a sample taken with ZDot™
ZDot™ Infinite Focus True Colour Imaging

The ZDot™ technology also simplifies operation and setup, by projecting a focusing onto the samples top and bottom surfaces. When the top or bottom surface is correctly focused, the ZDot™ grid will appear in the highest contract, making it fast and intuitive to correctly set up samples. The Zeta-388 is easy to operate, even for less experienced users.

A sample viewed through the Zeta-20’s optics, focused at the bottom surface. The high-contrast grid is clearly visible
The ZDot™ grid visible when the bottom surface is in focus
The same sample viewed through the Zeta-20’s optics, focused at the top surface. The high-contrast grid can be seen clearly
The ZDot™ grid visible when the top surface is in focus

Multi-Mode Optics

KLA’s Multi-Mode optics provides unmatched flexibility, by integrating six different optical metrology techniques into a single compact platform. Multi-Mode optics makes it possible to handle a wide variety of materials and measurement types. The Zeta-388’s capabilities can also be further enhanced with options for white light interferometry, Nomarski interference contract microscopy, and shearing interferometry. Film thickness measurements are supported a on a wide variety of materials. Together with motorised stage options, and the integrated automatic sample handling, the Zeta-388 is a comprehensive high-throughput inspection platform.

  • ZDot™ High Resolution 3D Imaging
  • ZIC Interference Contrast
  • ZXI White Light Interferometry
  • ZFT Film Thickness & Reflectance
  • ZSI Shearing Interferometry
  • AOI Automatic Optical Inspection

Technical Specifications

Performance
Z Resolution 0.1nm
Z Repeatability (Step Height) < 0.5%
Z Accuracy (Step Height) < 0.75%
RMS Repeatability (Roughness) 0.05nm
Optics & Illumination
Multi-Mode Measurement & Imaging Capability ZDot (Confocal Grid Structured Illumination) True Color, Standard
ZFT (Thin Film Spectrometer) Option
ZIC (Intereference Contrast Imaging) Option
ZX5/100 (Vertical Scanning Interferometer) Option
ZSI (Shearing Interfometer) Option
Illumination Optics Triple optical path for Multi-Mode Optics
Dual Ultra Bright LED, White Standard
Dual Ultra Bright LED, Blue Option
Illumination Options Bright Field Standard
Polarized Light Option
Through Transmissive (Bottom) Option
Dark Field Option
Multiple Angle Side Illumination Option
Objectives & Imaging
Objective Options 1.25X - 150X Normal Objectives
Long Working Distance Objectives
Ultra Long Working Distance Objectives
Through Transmissive Objectives
Liquid Immersion Objectives
Vertical Scanning Interferometry Objectives
Field of View From 9µm x 7µm up to 18mm x 14mm (objective dependent)
Turret Options From 1-position up to 6-position Manual
6-position Automated
Camera Color CCD camera, Software controlled, Variable image size, from 640x480 pixels up to 1920x1440 pixels
Larger pixel formats also available for custom applications
Total Magnification 5500 times optical / 66000 times digital
Scan Range & Speed
Z Scan Range Up to 25mm in a single scan
Z Scan Speed > 150µm/sec
Stage and Sample Dimensions
Z Scan Stage 40mm Standard, Closed loop with optical feedback control, 13nm resolution
240mm Extended Option, Closed loop with optical feedback control, 13 nm resolution
200µm Ultra High Precision Piezo Stage Option, 0.1nm resolution
XY Stage Options Manual XY Stage: Up to 175mm x 350mm
Motorized XY Stage: Up to 180mm x 200mm
Tip/Tilt Options Precision & Coarse Tip/Tilt stage options up to 20° of tilt
"CM" Option for disk and wafer edge measurements
"Swivel Head" Option for tilting optical head around large samples
Sample Chuck 360° rotary chuck with vacuum connection
Glass chuck for through transmissive imaging (backlight)
Custom chucks and fixtures for specific applications
Sample Weight Up to 15Kg, depending on XY stage selected
>15Kg Option available for specific applications
Sample Size XY Size: Up to 350mm depending on XY Stage
Z Size: 125mm, Standard; 350mm with Extended Z-Stage Option
Custom extended staging options available
Software Feature Set
Zeta3D The comprehensive Zeta3D software package is a fully integrated data acquisition, analysis and reporting package. Step height, roughness, profile and area analysis based on ISO standards are all included in the Zeta3D software package.
Advanced Applications CD - Critical Dimension
Feature detection
Multi-surface
Film thickness
HDR - high dynamic range
Bow/Warp Mapping
Wafer Edge Profile
AOI - Defect Inspection
External Applications & Controls ZMorf
MATLAB
SPIP
TCP/IP
SECS/GEM
Automation Suite Auto-illumination
Autofocus
Auto sequence
Auto deskew
Pattern recoginition
Auto-stitching

Product Downloads

Literature

Product Brochure

KLA Zeta-388 Optical Profiler Brochure.

Application Notes

Automated Process Metrology in Solar Cell Manufacturing

Author: Vamsi Velidandla, et. al.
Publication: 37th IEEE Photovoltaic Specialists Conference (2011)

Measurements with 3D non-contact optical profilometry

Author: Nelluri Srinivas, et. al.
Publication: South Asian Journal of Engineering and Technology Vol.1, No.1 (2015) 41–45

Texture Process Monitoring in Solar Cell Manufacturing Using Optical

Author: Vamsi Velidandla, et. al.
Publication: 37th IEEE Photovoltaic Specialists Conference (2011)

Recent Major Advances In 3D Optical Profiling of Micro Surfaces

Author: Dr. Ian Holton
Publication: Commercial Micro Manufacturing International Vol 6 No.1

Measuring Sealed Micro Fluidic Devices

Author: Dr. Diane Hickey-Davis, Dr. Ian Holton
Publication: Commercial Micro Manufacturing International Vol 9 No.1

How Do You Optimise Your Laser Settings for Precise Micro Manufacturing

Author: Dr. Diane Hickey-Davis
Publication: Commercial Micro Manufacturing International Vol 9 No.3