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Zeta-20 True Colour 3D Optical Profiler

Product Features

Key Features

  • ZDot™ High Resolution 3D Imaging
  • Multi-Mode Optics with 6 Techniques
  • Fully Automated Measurements
  • Configurable Stages & Chucks
  • Simple & Intuitive User Interface
KLA Zeta-20 optical profiler, with an example 3D surface topography image

ZDot™ High Resolution 3D Topography & Imaging

KLA's innovative and patented ZDot™ technology allows the Zeta-20 to simultaneously collect high-resolution 3D topography data alongside True Colour infinite focus imaging. Proprietary 3D measurement technology is combined with powerful algorithms to ensure the highest quality results. This combination allows for scanning with incredible detail and clarity, while remaining quick and easy to use.

A 3D view of a sample surface, produced from topography data generated by ZDot ZDot™’s high resolution 3D scanning
ZDot™ High Resolution 3D Topography Data
An infinite focus, true colour image of a sample taken with ZDot™
ZDot™ Infinite Focus True Colour Imaging

ZDot™ also makes operating the Zeta-20 straightforward, by projecting a focusing grid onto a samples surface™. The top and bottom surfaces can be easily located, as the ZDot™ grid will appears at it's highest contrast when the surface is in focus.

A sample viewed through the Zeta-20’s optics, focused at the bottom surface. The high-contrast grid is clearly visible
The ZDot™ grid visible when the bottom surface is in focus
The same sample viewed through the Zeta-20’s optics, focused at the top surface. The high-contrast grid can be seen clearly
The ZDot™ grid visible when the top surface is in focus

Multi-Mode Optics

With Multi-Mode Optics, the Zeta-20 can feature up to six different optical metrology technologies in a single integrated platform. Additional 3D measurement techniques, such as white light interferometry, Nomarski interference contract microscopy, and shearing interferometry can provide additional surface topography capabilities. The Zeta-20 can support film thickness measurements on a variety of materials. The powerful optics and motorised stages available on the Zeta-20 make it suitable as a high end microscope for sample review and automated defect inspection.

  • ZDot™ High Resolution 3D Imaging
  • ZIC Interference Contrast
  • ZXI White Light Interferometry
  • ZFT Film Thickness & Reflectance
  • ZSI Shearing Interferometry
  • AOI Automatic Optical Inspection

Technical Specifications

Performance
Z Resolution 0.1nm
Z Repeatability (Step Height) < 0.5%
Z Accuracy (Step Height) < 0.75%
RMS Repeatability (Roughness) 0.05nm
Optics & Illumination
Multi-Mode Measurement & Imaging Capability ZDot (Confocal Grid Structured Illumination) True Color, Standard
ZFT (Thin Film Spectrometer) Option
ZIC (Intereference Contrast Imaging) Option
ZX5/100 (Vertical Scanning Interferometer) Option
ZSI (Shearing Interfometer) Option
Illumination Optics Triple optical path for Multi-Mode Optics
Dual Ultra Bright LED, White Standard
Dual Ultra Bright LED, Blue Option
Illumination Options Bright Field Standard
Polarized Light Option
Through Transmissive (Bottom) Option
Dark Field Option
Multiple Angle Side Illumination Option
Objectives & Imaging
Objective Options 1.25X - 150X Normal Objectives
Long Working Distance Objectives
Ultra Long Working Distance Objectives
Through Transmissive Objectives
Liquid Immersion Objectives
Vertical Scanning Interferometry Objectives
Field of View From 9µm x 7µm up to 18mm x 14mm (objective dependent)
Turret Options From 1-position up to 6-position Manual
6-position Automated
Camera Color CCD camera, Software controlled, Variable image size, from 640x480 pixels up to 1920x1440 pixels
Larger pixel formats also available for custom applications
Total Magnification 5500 times optical / 66000 times digital
Scan Range & Speed
Z Scan Range Up to 25mm in a single scan
Z Scan Speed > 150µm/sec
Stage and Sample Dimensions
Z Scan Stage 40mm Standard, Closed loop with optical feedback control, 13nm resolution
240mm Extended Option, Closed loop with optical feedback control, 13 nm resolution
200µm Ultra High Precision Piezo Stage Option, 0.1nm resolution
XY Stage Options Manual XY Stage: Up to 175mm x 350mm
Motorized XY Stage: Up to 180mm x 200mm
Tip/Tilt Options Precision & Coarse Tip/Tilt stage options up to 20° of tilt
"CM" Option for disk and wafer edge measurements
"Swivel Head" Option for tilting optical head around large samples
Sample Chuck 360° rotary chuck with vacuum connection
Glass chuck for through transmissive imaging (backlight)
Custom chucks and fixtures for specific applications
Sample Weight Up to 15Kg, depending on XY stage selected
>15Kg Option available for specific applications
Sample Size XY Size: Up to 350mm depending on XY Stage
Z Size: 125mm, Standard; 350mm with Extended Z-Stage Option
Custom extended staging options available
Software Feature Set
Zeta3D The comprehensive Zeta3D software package is a fully integrated data acquisition, analysis and reporting package. Step height, roughness, profile and area analysis based on ISO standards are all included in the Zeta3D software package.
Advanced Applications CD - Critical Dimension
Feature detection
Multi-surface
Film thickness
HDR - high dynamic range
Bow/Warp Mapping
Wafer Edge Profile
AOI - Defect Inspection
External Applications & Controls ZMorf
MATLAB
SPIP
TCP/IP
SECS/GEM
Automation Suite Auto-illumination
Autofocus
Auto sequence
Auto deskew
Pattern recoginition
Auto-stitching

Product Downloads

Literature

Product Brochure

KLA Zeta-20 Optical Profiler Brochure.

Application Notes

Automated Process Metrology in Solar Cell Manufacturing

Author: Vamsi Velidandla, et. al.
Publication: 37th IEEE Photovoltaic Specialists Conference (2011)

Measurements with 3D non-contact optical profilometry

Author: Nelluri Srinivas, et. al.
Publication: South Asian Journal of Engineering and Technology Vol.1, No.1 (2015) 41–45

Texture Process Monitoring in Solar Cell Manufacturing Using Optical

Author: Vamsi Velidandla, et. al.
Publication: 37th IEEE Photovoltaic Specialists Conference (2011)

Recent Major Advances In 3D Optical Profiling of Micro Surfaces

Author: Dr. Ian Holton
Publication: Commercial Micro Manufacturing International Vol 6 No.1

Measuring Sealed Micro Fluidic Devices

Author: Dr. Diane Hickey-Davis, Dr. Ian Holton
Publication: Commercial Micro Manufacturing International Vol 9 No.1

How Do You Optimise Your Laser Settings for Precise Micro Manufacturing

Author: Dr. Diane Hickey-Davis
Publication: Commercial Micro Manufacturing International Vol 9 No.3