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UNECS Portable High-speed Spectroscopic Ellipsometer

Product Features

Key Features

  • Low Weight & Compact Size
  • Detachable Stage for Direct Measurement
  • Ultra-Fast Measurement
  • Robust & Reliable Design
  • Low Maintenance
  • Multiple Wavelength Range Options
UNECS Portable ellipsometer main unit

Ultra-Fast Spectroscope Ellipsometry

ULVAC have taken ellipsometry to the next level with a unique snapshot technique for measurement. The UNECS range provides high speed, accurate and repeatable measurements in a compact and affordable form. UNECS ellipsometers measure as fast as 20ms per point. ULVAC's snapshot technology is also highly reliable and low maintenance, contain fewer moving or consumable parts than conventional systems.

Portable Ellipsometry

The UNECS Portable weighs only 2.2 kg, and has a compact form factor with integrated carry handle. For use on large or oversize samples, the ellipsometer's stage can be detached, allowing measurements to be taken directly on the sample's surface.

Measurement is ultra-fast, as low as 20ms per point. There are 2 supported spectral ranges, the standard 530nm to 750nm and a visible wavelength spectral range between 380nm to 760nm.

ULVAC's unique snapshot measurement technology is robust and reliable, and easy to maintain. The measurement system contains no moving parts, and only a single consumable part, the halogen bulb light source. This makes the UNECS Portable a dependable mobile solution in demanding environments.

Technical Specifications

Wavelength Range 530 to 750nm or 380 to 760nm
Spot Size ⌀1mm or ⌀0.3mm
Angle of Incidence 70°
Film Thickness Repeatability 1σ = 0.1nm
Film Thickness Measurement Range 1nm to 2µm
Measurment Time Sampling : 20ms to 3000ms Analyzing time : 300ms
Sample Stage Fixed Stage (⌀150mm, detachable)
Control PC Laptop PC including analysis software
Configuration Measurement unit (including fixed stage). Control box. Light source unit.
Control PC (Laptop type) and operation manual (CD).

Product Downloads

Literature

Product Brochure

ULVAC UNECS Ellipsomter Range Brochure.