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UNECS Automatic High-speed Spectroscopic Ellipsometer

Product Features

Key Features

  • Compact Size with Small Footprint
  • Ultra-Fast Measurement
  • Reliable & Low Maintenance Design
  • Automatic Stage
  • 2D & 3D Thickness Maps
  • Multiple Wavelength Range Options
UNECS Automatic ellipsometer main unit, with an example film thickness map

Ultra-Fast Spectroscope Ellipsometry

ULVAC have taken ellipsometry to the next level with an innovative and unique snapshot method for measurement. The UNECS range provides high speed, accurate and repeatable measurements in a compact and affordable form. UNECS ellipsometers measure as fast as 20ms per point. Compared to conventional ellipsometers, ULVAC's snapshot technology is also highly reliable and low maintenance, contain fewer moving or consumable parts.

Automatic Ellipsometry

The UNECS automatic range is available in 3 models, for 150mm, 200mm and 300mm diameter samples. An auto mapping R-θ sample stage and auto focus system can measure film thickness across the full surface of a sample. Thickness maps can be produced in 2D and 3D, with thickness distribution displayed with a colour key.

Measurements are high-speed, as fast as 20ms per point. There are 2 supported spectral ranges, the standard 530nm to 750nm and a visible wavelength spectral range between 380nm to 760nm.

With ULVAC's novel snapshot measurement system, the UNECS ellipsometers are dependable and easy to maintain. There are no moving parts in the measurement system, and the only consumable part is the halogen bulb light source. ULVAC UNECS ellipsometers can be relied up for fast, efficient and cost-effective measurement in demanding environments.

Technical Specifications

Model 1500A 2000A 3000A
Wavelength Range 530 to 750nm or 380 to 760nm
Spot Size ⌀1mm or ⌀0.3mm
Angle of Incidence 70°
Film Thickness Repeatability 1σ = 0.1nm
Film Thickness Measurement Range 1nm to 2µm
Measurment Time Sampling : 20ms to 3000ms Analyzing time : 300ms
Sample Stage ⌀150mm ⌀200mm ⌀300mm
Maximum Automatic Measurable Points 200 200 2,000
Control PC Laptop PC including analysis software
Configuration Measurement unit.
Control unit. Control PC (Laptop type) and operation manual (CD).

Product Downloads

Literature

Product Brochure

ULVAC UNECS Ellipsomter Range Brochure.