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Stylus Profilers

Alpha-Step® D-500 Stylus Profiler

The KLA Alpha-Step® D-500 Stylus Profiler provides high resolution 2D profiling, 2D stress and profile stitching. These features are integrated into an easy to use, compact form factor platform with the best price to performance ratio available.

Alpha-Step® D-600 Stylus Profiler

The KLA Alpha-Step® D-600 Stylus Profiler offers high resolution 2D & 3D profiling, 2D stress and profile stitching. These features and more are included in an easy to use platform with the best price to performance on the market.

P-7 Stylus Profiler

The KLA P-7 Stylus Profiler provides KLA’s superior measurement technology in a platform with a great price-to-performance ratio and excellent measurement repeatability. The P-7’s 150mm scan stage provides a long scan capability without stitching.

P-17 Stylus Profiler

The KLA P-17 Stylus Profiler offers industry leading measurement repeatability for reliable measurement performance. With a 200 mm scan stage as standard, the P-17 offers the longest on scan length capability on the market.

P-170 Stylus Profiler

The KLA P-170 Stylus Profiler combines the industry leading P-17 with the capability for automatic wafer cassette handling. With fully featured capabilities for automation the P-170 provides a high-performance solution for production environments.