Stylus Profilers

A complete range of advanced stylus profilometers from KLA Instruments to meet all surface metrology needs.

Production Series Automated

The Tencor P-170 stylus profilometer enables fully automated measurements for the compound semiconductor industry, supporting cassette-to-cassette wafer handling including silicon, sapphire, silicon carbide, gallium arsenide, glass and more.

Tencor™ P-170 Stylus Profiler

Tencor™ P-170 Stylus Profiler

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