Optical Profilers
Advanced and flexible optical profilometers by KLA Instruments equipped with 3D imaging to support a variety of measurement techniques, including white light interferometry, True Colour imaging and ZDot™ confocal grid structured illumination.
Zeta
3D non-contact optical profilers featuring patented ZDot™ technology and flexible multi-mode optics for measurement of 3D surface topography, film thickness and automated defect inspection.
