Sheet Resistance Measurement
4-Point Probes
In the world of semiconductors, electrical measurement systems are crucial for measuring and monitoring sheet resistance and resistivity of thin films and bulk materials. Filmetrics® specialises in providing benchtop metrology instruments, including sheet resistance mapping systems (4-point probe and eddy current). The 4-point probes have a variety of pin tip options, including different radii and spacing, to be used for various applications like metal measurements, implantation measurements or high impedance surface measurement. They provide a reliable and accurate way of measuring the sheet resistance of thin films and semiconductors.