Profilm3D Optical Profiler
- Affordable & Expandable
- Sub-nanometre Vertical Resolution
- Automated 100mm XY Stage
- Tip-Tilt Stage
- Wide Field of View
- Profilm Analysis Software
Affordable & Accurate Optical Profilometry
The Filmetrics Profilm3D is a low-cost optical profiler system, designed with state of the art white light interferometry technology. Options are also available for phase shifting interferometry. The Profilm3D can produce high-quality surface topography from sub-nanometre to millimetre ranges, and capture infinite depth of field True colour images.
The Profilm3D hardware platform has a comprehensive range of features, and is expandable and upgradeable. An automatic XY stage with 100mm of travel and tip and tilt function is included as standard. An optional 200mm travel stage is also available with the Profilm3DPlus. The Profilm3D also features a 4-position turret, and has an exceptionally wide field of view – 2mm wide with a 10x objective.
Intuitive Profilm & ProfilmOnline Analysis Software
Filmetrics’ Profilm software is a fully featured and intuitive to use software package for viewing and analysing Profilm3D images. The Profilm3D is also fully supported by ProfilmOnline, a cloud-based software platform providing access to profiler images and data from anywhere – even on a smartphone or tablet. ProfilmOnline can also be used to share images and collaborate on analysing data with other users.
The Profilm desktop software includes a comprehensive range of features. A variety of levelling and liftering options are provided to enhance accuracy and clarity. Surfaces can be analysed with line, rectangle, and histogram step heights, and all 47 standard ASME/EUR/ISO roughness parameters. Profilm provides powerful 3D visualisation capabilities to provide the best view of a sample’s surface.
|Scan Speed, Vertical||12μm/sec|
|XY Stage Type||Automated|
|Sample Max Weight||2.5kg|
|Tip-Tilt Stage||+/- 5°, Manual|
|Camera||2592 x 1944 (5 megapixels)|
|Camera Zoom4||1X, 2X, 4X|
|Thickness Range, WLI||50nm - 10mm|
|Thickness Range, PSI||0 - 3μm|
|RMS Repeatability, WLI1||1.0nm|
|RMS Repeatability, PSI1||0.1nm|
|Sample Reflectance Range||0.05% - 100%|
|ISO 25178 Compliant||Yes|
|Mechanical – Profilm3D|
|XY Stage Range||100mm x 100mm|
|Sample Max Width||265mm|
|System Size, W x D x H||305mm x 305mm x 550mm|
|Mechanical – Profilm3DPlus|
|XY Stage Range||200mm x 200mm|
|Sample Max Width||365mm|
|System Size, W x D x H||406mm x 406mm x 550mm|
Objective Specifications (Nikon CF IC Epi Plan)5
|Field of View at 1X Zoom||4.0mm x 3.4mm||2.0mm x 1.7mm||1.0mm x 0.85mm||0.4mm x 0.34mm||0.2mm x 0.17mm|
|Spatial Sampling at 4X Zoom6||1.76μm||0.88μm||0.44μm||0.176μm||0.088μm|
|Resolving Power of Lens||2.1μm||0.92μm||0.69μm||0.5μm||0.4μm|
|Maximum Sample Slope7||8.5°||14°||21°||25°||42°|
1 Typical value
2 8μm step
3 Precision is 1σ of 30 measurements of a 10μm Step-Height Standard, average of 1σ over 20 successive days. Ambient stable to within 1°C.
Stability is 2σ of daily average of 30 measurements of a 10μm Step-Height Standard over 20 successive days. Ambient stable to within 1°C.
4 Digitally realized. Number of effective pixels after binning is 648 x 484 for all zooms.
5 Sold separately
6 Pixel size projected on sample
7 Greater (better) for rough surfaces
Filmetrics Profilm3D Optical Profiler Data Sheet