ZETA-20 True Colour 3D Optical Profiler

Availability:
  • Contact Us
Short Description
  • The Zeta-20 3D optical profiler provides Exceptional 3D imaging and metrology. Based on proprietary ZDot technology, the Zeta-20 images and analyzes surface features on samples of all types: smooth to rough, low reflectivity to high reflectivity, transparent to opaque. All hardware is easy to install and easy to use.

Get a quote

Product Brochure
  • Please contact us to request a quote or further information
  • Contact Us
Product Overview
  • Key Features

    The Zeta-20 is available with several advanced imaging techniques to match your requirements:

    • ZDot innovative 3D imaging is standard on all our optical profilers. The ZDot technology with our unique transmissive and dark field illumination schemes as well as a variety of objectives allows the tool to handle the most 'difficult' of surfaces.
    • ZIC enhanced differential interference contrast imaging is great for nanometer level surface roughness.
    • ZSI shearing interferometer provides Angstrom level vertical resolution.
    • ZX5 vertical scanning interferometry is ideal for measuring nanometer heights over large field of view.
    • ZFT reflectometry based thin film thickness measurement option.

    Overview

    The Zeta-20 3D optical profiler provides Exceptional 3D imaging and metrology. Based on proprietary ZDot technology, the Zeta-20 images and analyzes surface features on samples of all types: smooth to rough, low reflectivity to high reflectivity, transparent to opaque. Hardware and software options customize the Zeta-20 for specialized measurement needs. All hardware is easy to install and easy to use.

Specification
  • Performance

    • Z Resolution 0.1nm
    • Z Repeatability (Step Height)< 0.5%
    • Z Accuracy (Step Height)< 0.75%
    • RMS Repeatability (Roughness) 0.05nm

    Optics & Illumination

    Multi-Mode Measurement & Imaging Capability

    • ZDot (Confocal Grid Structured Illumination), True Color, Standard
    • ZFT (Thin Film Spectrometer), Option
    • ZIC (Intereference Contrast Imaging), Option
    • ZX5/100 (Vertical Scanning Interferometer), Option
    • ZSI (Shearing Interfometer), Option

    Illumination Optics

    • Triple optical path for Multi-Mode Optics
    • Dual Ultra Bright LED, White, Standard
    • Dual Ultra Bright LED, Blue, Option

    Illumination Options

    • Bright Field, Standard
    • Polarized Light, Option
    • Through Transmissive (Bottom), Option
    • Dark Field, Option
    • Multiple Angle Side Illumination, Option

    Objectives & Imaging

    Objective Options

    • 1.25X - 150X Normal Objectives
    • Long Working Distance Objectives, Ultra Long Working Distance Objectives
    • Through Transmissive Objectives, Liquid Immersion Objectives
    • Vertical Scanning Interferometry Objectives

    Field of View

    • From 9µm x 7µm up to 18mm x 14mm (objective dependent)

    Turret Options

    • From 1-position up to 6-position Manual
    • 6-position Automated

    Camera

    • Color CCD camera, Software controlled, Variable image size, from 640x480 pixels up to 1920x1440 pixels
    • Larger pixel formats also available for custom applications

    Total Magnification

    • 5500 times optical / 66000 times digital

    Scan Range & Speed

    Z Scan Range

    • Up to 25mm in a single scan

    Z Scan Speed

    • > 150µm/sec

    Stage and Sample Dimensions

    Z Scan Stage

    • 40mm Standard, Closed loop with optical feedback control, 13nm resolution
    • 240mm Extended Option, Closed loop with optical feedback control, 13 nm resolution
    • 200µm Ultra High Precision Piezo Stage Option, 0.1nm resolution

    XY Stage Options

    • Manual XY Stage: Up to 175mm x 350mm
    • Motorized XY Stage: Up to 180mm x 200mm

    Tip/Tilt Options

    • Precision & Coarse Tip/Tilt stage options up to 20° of tilt
    • "CM" Option for disk and wafer edge measurements
    • "Swivel Head" Option for tilting optical head around large samples

    Sample Chuck

    • 360° rotary chuck with vacuum connection
    • Glass chuck for through transmissive imaging (backlight)
    • Custom chucks and fixtures for specific applications

    Sample Weight

    • Up to 15Kg, depending on XY stage selected
    • >15Kg Option available for specific applications

    Sample Size

    • XY Size: Up to 350mm depending on XY Stage
    • Z Size: 125mm, Standard; 350mm with Extended Z-Stage Option
    • Custom extended staging options available

    Software Feature Set

    Zeta3D

    • The comprehensive Zeta3D software package is a fully integrated data acquisition, analysis and reporting package. Step height, roughness, profile and area analysis based on ISO standards are all included in the Zeta3D software package.

    Advanced Applications

    • CD - Critical Dimension
    • Feature detection
    • Multi-surface
    • Film thickness
    • HDR - high dynamic range
    • Bow/Warp Mapping
    • Wafer Edge Profile
    • AOI - Defect Inspection

    External Applications & Controls

    • ZMorf
    • MATLAB
    • SPIP
    • TCP/IP
    • SECS/GEM

    Automation Suite

    • Auto-illumination
    • Autofocus
    • Auto sequence
    • Auto deskew
    • Pattern recoginition
    • Auto-stitching
Product Brochure

Sign up to our newsletter

Keep up to date with company news, product launches and industry news.

Sign up