UNECS Portable High-speed Spectroscopic Ellipsometer

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Short Description
  • With a compact size, low weight and ULVAC's ultra-fast measurement technology, the UNECS-Portable can be easily transported for quality assurance and acceptance testing applications. The ellipsometer's stage can be detached for measuring directly on large samples.

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Product Overview
  • The UNECS Portable High Speed Spectroscopic Ellipsometer from ULVAC features ultra-fast measurement technology in a lightweight and compact form factor. Easily transportable, and supplied in a rugged carry case, the UNECS Portable is ideally suited for quality assurance and acceptance testing applications. The ellipsometer's sample stage can be easily detached for measuring directly on large samples. With ULVAC's ultra-fast measurement system, taking thickness measurements on the go is simple and efficient.

    Ultra-Fast Spectroscope Ellipsometry

    ULVAC have taken ellipsometry to the next level with a unique snapshot technique for measurement. The UNECS range provides high speed, accurate and repeatable measurements in a compact and affordable form. UNECS ellipsometers measure as fast as 20ms per point. ULVAC's snapshot technology is also highly reliable and low maintenance, contain fewer moving or consumable parts than conventional systems.

    Portable Ellipsometry

    The UNECS Portable weighs only 2.2 kg, and has a compact form factor with integrated carry handle. For use on large or oversize samples, the ellipsometer's stage can be detached, allowing measurements to be taken directly on the sample's surface.

    Measurement is ultra-fast, as low as 20ms per point. There are 2 supported spectral ranges, the standard 530nm to 750nm and a visible wavelength spectral range between 380nm to 760nm.

    ULVAC's unique snapshot measurement technology is robust and reliable, and easy to maintain. The measurement system contains no moving parts, and only a single consumable part, the halogen bulb light source. This makes the UNECS Portable a dependable mobile solution in demanding environments.

Specification
  • Wavelength Range530 to 750nm or 380 to 760nm
    Spot Size⌀1mm or ⌀0.3mm
    Angle of Incidence70°
    Film Thickness Repeatability1σ = 0.1nm
    Film Thickness Measurement Range1nm to 2µm
    Measurment TimeSampling : 20ms to 3000ms Analyzing time : 300ms
    Sample StageFixed Stage (⌀150mm, detachable)
    Control PCLaptop PC including analysis software
    ConfigurationMeasurement unit (including fixed stage). Control box. Light source unit.
    Control PC (Laptop type) and operation manual (CD).
Application
  • Extinction Coefficient
  • Film Thickness
  • Reflective Index
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