P-17 Stylus Profiler

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Short Description
  • The KLA P-17 Stylus Profiler offers industry leading measurement readability for reliable measurement performance. With a 200 mm scan stage as standard, the P-17 is the only stylus profiler on the market offering long scan capability without stitching. The UltraLite® sensor provides the highest vertical resolution.

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Product Overview
  • Key Features

    • Unmatched repeatability and reproducibility for reliable measurements
    • Long-scan capability and vertical range for flexibility in large topography variations
    • Extensive list of standard features including Apex 2D, 20-site sequence and dual view optics
    • Advanced Apex surface analysis software for improved user-friendliness
    • Fast, accurate location of measurement features with minimum operator intervention

    Product Description

    The KLA P-17 Stylus Profiler is the 8th generation of KLA's P-series stylus profiler, building on over 35 years of profilometry experience. The KLA P-17 offers industry leading surface measurement repeatability for reliable measurement performance. The P-17 offers a programmable scan stage, low noise, and high quality, high resolution long scans. These features make the P-17 suitable for the measurement of a variety of surfaces and applications.

    The P-17 Stylus Profiler offers industry leading measurement repeatability for reliable measurement performance. The surface measurement system has a 200 mm scan length standard, and is the only stylus profiler on the market to offer long scan capability without the need for stitching.

    The P-17 Stylus profiler features the UltraLite® sensor, which includes dynamic force control, excellent linearity, and the highest vertical resolution making it the best sensor available on a stylus profiler.

    To further enhance the system's capabilities and user experience, the P-17 Stylus Profiler includes features such as top and side view optics, etch depth monitoring, and motorized theta/levelling stages.

    To provide excellent usability and productivity, the P-17 Stylus Profiler features point-and-click operation and a comprehensive productivity package, which makes the P-17 Stylus Profiler the easiest to use tool on the market.

    For applications requiring the handling or larger samples, KLA also offer the P-17 OF (open frame). This model includes all of the capabilities of the P-17, but allows for the loading of larger samples on the 9.5 by 9.5 inch square stage or 300 mm sample chuck.

    Features & Options

    The KLA P-17 Stylus Profiler includes an unprecedented range of features and capabilities for a mid-range general purpose instrument. A variety of options are available to enhance the system's standard capabilities, to better tailor the system for different applications.

    • Stylus Profiling
      A precision scan stage enables high quality 2D and 3D scans over the entire 200mm sample stage, with up to 200mm scan length and 1mm Z range.
    • Step Height Repeatability
      A step height repeatability of 4 Å, one-sigma or better on samples up to 1 µm tall offers the best measurement performance in the industry.
    • Apex Software
      The Apex software contains advanced filtering, levelling, and analysis functions, controlled with a simple and intuitive interface. Over 40 key parameters are available, including depth, step height, roughness, waviness, slope, flatness, radius of curvature, stress, bearing ratio, distance, volume, and peak count distribution.
    • Productivity Package
      The Productivity Package includes pattern recognition, 1000 sequence sites and a sequence queue. Can be combined with integrated Apex software for filly automated data collection and reporting.
    • 3D Imaging
      3D imaging and viewing of surface topography in photo-realistic, colour-coded, and rotatable 3D or top-down contour maps. Perform comprehensive analysis of scanned features as they appear in 3D and in 2D by examining cross-sections.
    • 2D Stress Analysis
      Stress is measured in 2D using Stoney's equation to calculate the stress of a processing step, such as thin film deposition, by measuring the change in curvature of the substrate.
  • KLA's P-17 and P-17 open frame (OF) stylus profilers provide leading edge surface measurement and analysis capabilities. The P-17 is the tool of record for production environments and offers excellent performance for research and development.


    The P-17 features industry leading step height repeatability due to superior sensor and scanning stage design.

    Steps ≤ 1 µm Steps > 1 µm
    Repeatability1 4 Å 0.10%
    Reproducibility1 15 Å 0.25%

    1. Repeatability and reproducibility are defined as standard deviation of 30 trials using best known methods on a well-defined step height.

    UltraLite® Sensor

    The UltraLite® sensor is a linear variable differential capacitive (LVDC) sensor with the lowest mass, lowest noise, and highest resolution of any sensor available. It is the only sensor technology with constant force control over the entire vertical range.

    Standard Low Force Extended
    Total Dynamic Range 327 µm 131 µm 1000 µm
    Vertical Resolution 0.01 / 0.04 / 0.20 Å
    low / mid / high range
    0.01 / 0.02 / 0.10 Å
    low / mid / high range
    0.01 / 0.08 / 0.60 Å
    low / mid / high range
    Stylus Force 0.5 - 50 mg 0.03 - 50 mg 0.5 - 50 mg
    Force Control constant constant constant
    Vertical Linearity2 ± 0.5% > 2000 Å
    10 Å ≤ 2000 Å
    ± 0.5% > 2000 Å
    10 Å ≤ 2000 Å
    ± 0.5% > 2000 Å
    10 Å ≤ 2000 Å
    Sampling Rate 5 to 2000 Hz 5 to 2000 Hz 5 to 2000 Hz

    2. Vertical linearity is measured by the maximum non-linearity component divided by the vertical range.

    Scan Size

    The P-17 is the only system available that offers a 200 mm scan length with no stitching required.

    2D Scanning 3D Scanning
    Maximum Scan Length 200 mm - no stitching required any rectangle inscribed within a 200 mm diameter circle
    Lateral Resolution 0.025 µm 0.5 µm
    Maximum Points per Scan 2 million 4 million
    Scanning Speed 2 µm/sec to 25 mm/sec -

    Scan Flatness

    The P-17 has superior scan flatness over the entire scan length for excellent short scan, long scan, and stress measurements.

    Specification Conditions
    Scan Flatness 20 nm over 0.5 mm scan 1/20 λ, 150 mm optical flat
    30 nm over 2 mm scan
    40 nm over 30 mm scan
    75 nm over 60 mm scan
    170 nm over 130 mm scan
    Bow Repeatability 0.1% 20 m radius mirror
    Stress Repeatability 2.5% with polynomial fit enabled


    The P-17 includes the following motorized stages standard:

    Stage Specifications
    X and Y Stage 2 µm repeatability
    Z Stage soft touch stylus null
    optical sensor
    Theta Stage ± 360°
    0.1° resolution
    Level ± 3°


    The P-17 microhead V is the only system to offer top and side view optics, at the highest camera resolution.

    Optics Specifications
    Top View: FoV 1400 x 1400 µm
    Side View: FoV 850 x 1200 µm
    Camera 4.9 MP, colour
    Zoom 3.5x, optical


    The P-17 offers a full range of styli, plus custom designs:

    Radius Angle
    Standard 2 - 50 µm 60°
    Submicron 0.2 µm > 90°
    High Aspect Ratio 0.04 - 2 µm 20 - 45°

    Vacuum Chuck

    All P-17 systems include a vacuum chuck, with universal chuck design including movable stop and stress pins.

    P-17 P-17 OF
    Standard universal 240 mm sq
    Optional solar 300 mm

    Enhanced Productivity

    P-17 recipes offer enhanced productivity (standard):

    • Feature Detection and Feature Find
    • Manual and single site deskew sample alignment
    • 20 measurement sites with site naming
    • Multi-analysis, correlation scanning, link to Apex
    • Automatic saving, export, printing

    Productivity packages (optional):

    • 1000 measurement sites with site naming
    • Pattern recognition deskew alignment: XY and Θ
    • Site pattern recognition and die grid alignment
    • Sequence queue to run multiple sequence recipes

    Standards Compliance

    The P-7 complies with the latest industry standards:

    • CE compliance; EC directives
    • Harmonized safety and electromagnetic standards
    • SEMI S2-0703, S8-0705, S14-0704
    • RoHS compliance for computer and peripherals

    Computer Specifications

    P-17 computer specifications (minimum):

    Processor 3.0 GHz dual core
    RAM 4 GB
    Hard Drive 250 GB
    Access USB and Ethernet
    Software Windows 7 and MS Office
    Monitor 23-inch
    optional secondary monitor


    The P-17 and P-17 OF (open frame) dimensions:

    P-17 P-17 OF
    Height 43 cm 43 cm
    Width 56 cm 74 cm
    Depth 97 cm 97 cm
    Weight 100 kg 109 kg

    Environmental Performance

    Best results using a solid workbench or isolation table.

    Relative Humidity 30 - 40%
    Temperature 16 - 25°C
    rate of change ≤ 2°deg;C/hr
    Floor Vibration ≤ 250 µ-inch/sec
    1 to 100 Hz
    Audio Noise ≤ 80 dB
    C-weighting scale
    Laminar Airflow ≤ 100 ft/min
    down blowing

    Facilities Requirements

    P-17 facilities requirements:

    Electrical 90 - 260 V
    50 - 60 Hz
    Power 430 VA
    Vacuum 500 mm Hg
    27 liters/min
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