Optical Profilers - KLA

Optical Profilers - KLA
Our range of KLA Optical Profilers are available to offer the most complete range of optical surface measurement features meeting the needs of the engineering and research communities.

Top products in this category

7 Item(s)
    MicroXAM-800 Optical Profiler
    White Light Interferometer for 3D Measurement of Surface Topography
    ZETA-20 True Colour 3D Optical Profiler
    The Zeta-20 3D optical profiler provides Exceptional 3D imaging and metrology. Based on proprietary ZDot technology, the Zeta-20 images and analyzes surface features on samples of all types: smooth to rough, low reflectivity to high reflectivity, transparent to opaque. All hardware is easy to install and easy to use.
    ZETA-300 Precision Surface Metrology Optical Profiler
    The Zeta-300 is an advanced optical profiler designed to provide maximum configuration flexibility and enhanced measurement sensitivity and repeatability. The low noise floor of the Zeta-300 makes it suitable for nm level step height and roughness measurements.
    ZETA-500 3D Optical Profiler for 300mm Wafers
    The Zeta-500 profiler is a semi-automated 300mm capable metrology tool that can address a variety of applications such as bump height, roughness, etch depth, film thickness as well as wafer bow. Based on Zeta's revolutionary multi-mode approach to measurements, the Zeta-500 profiler packs the power of several tools into one compact platform.
    ZETASCAN Series
    The ZetaScan series are fully automated 300mm capable defect inspection tools that can address a variety of substrates such as opaque and transparent wafers as well as touch panels, rough ground, polished or unpolished substrates.
    ZETA-388 Optical Profiler for PSS and AOI
    The Zeta-388 is a fully automated wafer metrology system capable of handling 6-inch or 8-inch wafers. The system can address a variety of applications such as bump height, roughness, etch depth, film thickness as well as wafer bow.
    ZETA-580 Automated 300mm Metrology
    Fully Automated 300mm capable metrology tool that can address a variety of applications such as bump height, roughness, etch depth, film thickness as well as wafer bow.
7 Item(s)

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