The EM-30AX is one of the most advanced tabletop SEM systems on the market today, offering high-end capabilities in a compact form factor. COXEM have developed the only benchtop SEM configurable with either a Tungsten (EM-30AX Plus) or CeB6 (EM-30AX LE) electron source. Featuring high resolution imaging, with integrated dual SE and BSE detectors, the EM-30AX has powerful imaging capabilities. With the simple NanoStation operating software, and a 3-axis motorised stage as standard, ease of used is assured. The EM30AX includes integrated EDS (Energy Dispersive Spectroscopy) from Oxford Instruments for elemental microanalysis.
Ease of Use
The integrated features of the EM-30AX and COXEM's simple NanoSation operating software make ease of use guaranteed. Ideal for novice SEM users, NanoStation provides a simple and clean graphical interface, with quick access to common imaging settings. Users can click to move around the sample via a mini-map, which provides an overall view of the sample. NanoStation's Expert mode will satisfy the most demanding advanced users with access to a full range of settings and advanced features.
The EM30AX includes a motorised 3-axis XYT sample stage as standard, making it efficient and easy to control the position of the sample while in the chamber. An optional "NavCam" can capture an image of the sample holder when loaded, allowing users to navigate the samples visually.
- 5 nm resolution
- 150,000X magnification
- 1 - 30 kV beam energy
- Dual SE & BSE detectors
- Integrated EDS
Backscatter Electron Detector
COXEM's EM30AX benchtop SEM features dual secondary electron (SE) and backscatter electron (BSE) detectors. The 4 quadrant BSE detector can be operated in Composition mode for atomic weight contrasted images, or Topo mode for producing topographic images of flat samples.
The BSE detector integrated into the EM-40AX is retractable without disconnection, being able to pivot away to a parking position. This unique feature can only be found in COXEM benchtop SEMs. Retracting the BSE detector allows for a shorter working distance when using the SE detector.
3-Axis Sample Positioning Stage
A motorised 3-axis XYT sample position stage ins included as standard with COXEM's EM-30AX. Navigating a sample is easy with the NanoStation operating software, which features a "click to move" interface. To provide easier examination of a flat sample's topography, the stage can be tilted. Stage tilting is compucentric, adjusting the X axis to ensure the desired region of interest always remains the field of view while tilting.
Using the 3-axis motorised stage and NanoStation operating software together provides a Panorama mode, for capturing high resolution images of large samples. Hundreds of thousands of images can be collected across a large sample, through automatic control of the motorised stage. COXEM's NanoStation software can then automatically stitch the images together, creating a single high magnification image of a large sample.
Energy Dispersive Spectroscopy (EDS) capability is fully integrated into the COXEM EM-30AX SEM. The Oxford Instruments AZtecOneGO system the intuitive AZtecOneGo software, and Oxford Instrument's reliable and accurate compact x-act Silicon Drift Detector (SDD). AZtecOneGO is the ideal solution for conducting EDS analysis as quickly and easily as possible.
With a simple, streamlined interface, AZtecOneGO is quick and easy to use, even by novice users with no advanced knowledge of the EDS technique. Features include X-ray mapping and linescanning, spectrum acquisition, and fast report generation.
Electron Beam System Electron Source Tungsten (EM-30 Plus) or CeB6 (EM-30 LE) Resolution 5nm Accelerating Voltage 1kV to 30kV Detector SE Detector, BSE Detector Imaging Capabilities Magnification x20 ~ x150,000 Image Sizes RDE: 320x240 TV: 640x480 Slow: 800x600 Photo: 1280x960, 2560x1920, 5120x3840 Frame Rates RDE: Max 30 frames/sec TV: Max 10 frames/sec Slow: Max 2 frames/sec Image Formats BMP, JPEG, PNG, TIFF Auto Functions Auto Focus Auto Contrast Auto Brightness Auto Filament Auto Start Sample Positioning Stage Stage Type Motorised 3 Axis XYT X 35mm Y 35mm T 0 to 45° R 360° Z 5 to 50mm Maxium Sample Size 60mm in diameter 45mm in height Dimensions Main Unit Width 400mm Main Unit Length 600mm Main Unit Height 550mm