Zeta-388 True Colour 3D Optical Profiler

The Zeta-388 builds on the capability of the Zeta-300 with the addition of a cassette-to-cassette handler for fully automated 3D surface topography in a fully-featured platform. Supports both R&D and product environments by providing cassette-to-cassette wafer handling, and automated sample inspection and defect review, with pattern recognition. The Zeta-388 is also a high-end microscope that is highly accurate and efficient, and simple to operate.

Manufacturer

KLA

A global technology leader who make an impact by creating solutions that drive progress and transform industries. Collaboration is the key to their success. KLA provide leading-edge technology and devices using advanced inspection tools, metrology systems, and computational analytics. Their solutions accelerate tomorrow’s electronic devices. The enable evolution and innovation in the data era across key industries including automotive, mobile and data center.

 

Key Features

  • 6 Integrated Optical Metrology Techniques
  • Multiple Stage Options for Large Samples
  • Integrated Vibration Isolation
  • Fully Automated Imaging & Measurement
  • CD Measurement Capability
  • ZDot: Simultaneously collects a high-resolution 3D scan and a True Color infinite focus image
  • ZXI: White light interferometry for wide area measurements with high z resolution
  • ZIC: Interference contrast for quantitative 3D data of surfaces with sub-nanometer roughness
  • ZSI: Shearing interferometry for images with high z resolution
  • ZFT: Film thickness and reflectance is measured with an integrated broadband reflectometer
  • AOI: Automatic optical inspection to quantify defects on the sample
  • Production capability: Fully automated measurements with sequencing and pattern recognition

ZDot™ High Resolution 3D Topography & Imaging

With KLA’s patented ZDot™ technology, is possible to collect high resolution 3D topography data simultaneously with True Colour infinite focus imaging. Through a combination of innovative 3D measurement technology, and advanced computer algorithms, high quality surface measurements and imagery is collected with efficiency and accuracy. Combined with the Zeta-388’s automated wafer handling, the Zeta-388 provides high-throughput sample inspection capabilities with incredible clarity.

Shown left: ZDot™ High Resolution 3D Topography Data
Shown Righ: ZDot™ Infinite Focus True Colour Imaging

The ZDot™ technology also simplifies operation and setup, by projecting a focusing onto the samples top and bottom surfaces. When the top or bottom surface is correctly focused, the ZDot™ grid will appear in the highest contract, making it fast and intuitive to correctly set up samples. The Zeta-388 is easy to operate, even for less experienced users.

Shown left: The ZDot™ grid visible when the bottom surface is in focus
Shown Righ: The ZDot™ grid visible when the top surface is in focus

Multi-Mode Optics

KLA’s Multi-Mode optics provides unmatched flexibility, by integrating six different optical metrology techniques into a single compact platform. Multi-Mode optics makes it possible to handle a wide variety of materials and measurement types. The Zeta-388’s capabilities can also be further enhanced with options for white light interferometry, Nomarski interference contract microscopy, and shearing interferometry. Film thickness measurements are supported a on a wide variety of materials. Together with motorised stage options, and the integrated automatic sample handling, the Zeta-388 is a comprehensive high-throughput inspection platform.

Product range

Profilm3D Optical Profiler
Zeta-20
Zeta-300
Zeta-388

 

Applications

  • Step height: 3D step height from nanometers to millimeters
  • Texture: 3D roughness and waviness
  • Form: 3D bow and shape
  • Stress: 2D thin film stress
  • Film thickness: transparent film thickness from 30nm to 100µm
  • Defect inspection: capture defects greater than 1µm
  • Defect review: KLARF files are used to navigate to defects to measure 3D surface topography or scribe defect locations

Industries

  • LED: light emitting diodes and PSS (patterned sapphire substrates)- Semiconductor and compound semiconductor
  • Semiconductor and compound semiconductor
  • Semiconductor WLCSP (wafer-level chip scale packaging)
  • Semiconductor FOWLP (fan-out wafer-level packaging)
  • PCB (printed circuit board) and flexible PCB
  • MEMS: Micro-electro-mechanical systems
  • Medical devices and microfluidic devices

And more: Contact us with your requirements

Options

ZFT: Zeta Film Thickness

The Zeta-388 offers an integrated broadband spectrometer for transparent, thin film thickness measurements from 30nm to 100µm. It is capable of measuring single layer or multi-layer stack film thickness with the user selecting the refractive index values from the library of materials. The film thickness can be mapped across the sample to determine the sample uniformity. ZFT works on some of the least reflective surfaces, such as samples with reflectance of less than 0.1%. Many film thickness tools have difficulty obtaining a signal from these type of surfaces, since they depend on specular reflected light to calculate phase change or other parameters. The broadband white light and normal incidence illumination allow the tool to be used for a variety of optically transparent films with low reflectance.

ZXI: Zeta Vertical-Scanning Interferometry

The Zeta-388 supports phase scanning interferometry (PSI) and vertical scanning interferometry (VSI) when combined with the piezo stage and an interferometric objective lens. PSI enables fast measurements of step heights from angstroms to hundreds of nanometers. VSI enables measurement of step heights from hundreds of nanometers to hundreds of microns. Both are performed at better than nanometer-level resolution, independent of the objective numerical aperture.

ZIC: Zeta Interference Contrast

The Zeta-388 utilizes Nomarski differential interference contrast microscopy to provide enhanced imaging of fine surface detail. Nomarski microscopy uses polarization and a prism to change the phase to enhance changes in slope on the sample surface. This enables visualization of defects on super-smooth surfaces, such as a monolayer of a contaminant. The ZIC scanning mode can convert these images into quantitative measurements of sub-nanometer level roughness by correlating the change in slope with roughness measured by another technique.

ZSI: Zeta Shearing Interferometer

The Zeta-388 shearing interferometer measurement technique (ZSI) enhances the ZIC measurement by adding a change in the phase. Multiple images are collected with different phases, then processed through advanced algorithms to generate a quantitative measure of surface topography with angstrom-level resolution. This technique does not require interferometric objectives and has no Z-stage scanning, resulting in high-resolution measurements from angstroms to 80nm.

Objective Lenses

A broad range of objective lenses are available including 1.25x – 150x normal objectives, long working distance objectives, ultra-long working distance objectives, refractive index corrected objectives, through transmissive objectives, liquid immersion objectives, and vertical scanning interferometry objectives.

Couplers

The Zeta-388 can be configured with four different optical couplers to change the optics magnification. The system can be configured with the 1x coupler to keep the native magnification, or configured with 0.35x, 0.5x, or 0.63x couplers to increase the magnification.

Objective Lens Turret

The Zeta-388 can be configured with a 5 or 6 position manual turret and an objective lens sensor for automatic objective identification. The system can also be configured with a 6 position motorized turret for fully automated operation.

Sample Lighting

The Zeta-388 uses dual high-brightness white LEDs as standard lighting. Backlighting through the sample chuck is also available to enhance the light for challenging transparent samples, such as patterned sapphire substrates (PSS). The Zeta-388 also supports darkfield

Offline Analysis Software

The Zeta-388 offline software has the same data analysis and recipe creation capability that exists on the tool. This enables the user to create recipes and analyze data without using valuable tool time.

Apex Analysis Software

Apex analysis software enhances the tool’s standard data analysis capability with an extended suite of leveling, filtering, step height, roughness, and surface topography analysis techniques. Apex supports ISO roughness calculation methods plus local standards, such as ASME. Apex also serves as a report writing platform with the capability to add text, annotations, and pass/fail criteria. Apex is offered in eight languages.

Stitching Software

Automated image stitching software utilizes the motorized XY stage to combine adjacent scans to generate a stitched data set that is larger than a single field of view. The system automatically measures every site, aligns the images, and combines them into one data set. The results can be analyzed like any other results file.

Automated Sequencing Software

Automated sequencing software utilizes the motorized XY stage to allow the user to program measurement locations on the sample. The system will automatically measure each site and save the results in user-defined folders. An output report with sample statistics is generated to summarize the results. Advanced sequencing software includes pattern recognition to automatically align the sample. This enables fully automated measurements, reducing the impact of operator error. Auto calibration can also be enabled when using embedded standards on the stage.

Step Height and Film Thickness Standards

The Zeta-388 uses thin and thick film NIST traceable step height standards offered by VLSI Standards. The standards feature an etched quartz step with a chrome coating. A step height range of 8nm to 250µm is available. An available certified multi-step standard has nominal step heights of 8, 25, 50, and 100µm. The standard has various pitch patterns for XY calibration. A certified film thickness standard is available for ZFT that includes a reference silicon surface and a nominal 270nm silicon dioxide film thickness. Reference roughness and mirror samples are also available.

Isolation Tables

The Zeta-388 has passive isolation built into the base of the system. For applications requiring better isolation, an active isolation table is available. The Zeta-388 has a standard acoustic enclosure to isolate the system from environmental noise, and to protect the user from sample handler motion.

Sample Chucks

The Zeta-388 has a range of chucks available to support application requirements for samples from 50 to 200mm, including chucks to support bowed wafers. Backlight chucks are available for transparent substrates to support transmitted illumination, required for patterned sapphire substrates. If we do not have the chuck you need, get in touch with your requirements.

Stages

The Zeta-388 can be configured with a variety of stages to enhance system performance. A piezo Z-axis stage can be added to improve z resolution for measurement of nanometer-level step heights with the ZDot™ or ZXI measurement modes. The XY stage is motorized and can be configured with standard chuck, bowed wafer chuck, or backside illumination chuck.

Downloads

Zeta-388 True Colour 3D Optical Profiler Brochure

Zeta-388 True Colour 3D Optical Profiler Brochure

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To request more information on the Zeta-388 optical profiler, please contact us today. The technical experts at CN Tech are happy to discuss your sample inspection requirements, and provide more information on the optical profiler systems from KLA. Contact us today!