Zeta-20 True Colour 3D Optical Profiler

Exceptional 3D imaging and metrology. Based on proprietary ZDot technology, the Zeta-20 images and analyzes surface features on samples of all types: smooth to rough, low reflectivity to high reflectivity, transparent to opaque. Easy to install and easy to use.

The Zeta-20 is also a high-end microscope that can be used for sample review or automated defect inspection.

Manufacturer

KLA

A global technology leader who make an impact by creating solutions that drive progress and transform industries. Collaboration is the key to their success. KLA provide leading-edge technology and devices using advanced inspection tools, metrology systems, and computational analytics. Their solutions accelerate tomorrow’s electronic devices. The enable evolution and innovation in the data era across key industries including automotive, mobile and data center.  

 

Key Features

  • ZDot™ High Resolution 3D Imaging
  • Multi-Mode Optics with 6 Techniques
  • Fully Automated Measurements
  • Configurable Stages & Chucks
  • Simple & Intuitive User Interface
  • ZXI: White light interferometry for wide area measurements with high z resolution
  • ZIC: Interference contrast for quantitative 3D data of surfaces with sub-nanometer roughness
  • ZSI: Shearing interferometry for images with high z resolution
  • ZFT: Film thickness and reflectance is measured with an integrated broadband reflectometer
  • AOI: Automatic optical inspection to quantify defects on the sample
  • Production capability: Fully automated measurements with sequencing and pattern recognition

ZDot™ High Resolution 3D Topography & Imaging

KLA's innovative and patented ZDot™ technology allows the Zeta-20 to simultaneously collect high-resolution 3D topography data alongside True Colour infinite focus imaging. Proprietary 3D measurement technology is combined with powerful algorithms to ensure the highest quality results. This combination allows for scanning with incredible detail and clarity, while remaining quick and easy to use.

Shown left: ZDot™ High Resolution 3D Topography Data
Shown Righ: ZDot™ Infinite Focus True Colour Imaging

ZDot™ also makes operating the Zeta-20 straightforward, by projecting a focusing grid onto a samples surface™. The top and bottom surfaces can be easily located, as the ZDot™ grid will appears at it's highest contrast when the surface is in focus.

Shown left: The ZDot™ grid visible when the bottom surface is in focus
Shown Righ: The ZDot™ grid visible when the top surface is in focus

Multi-Mode Optics

With Multi-Mode Optics, the Zeta-20 can feature up to six different optical metrology technologies in a single integrated platform. Additional 3D measurement techniques, such as white light interferometry, Nomarski interference contract microscopy, and shearing interferometry can provide additional surface topography capabilities. The Zeta-20 can support film thickness measurements on a variety of materials. The powerful optics and motorised stages available on the Zeta-20 make it suitable as a high end microscope for sample review and automated defect inspection.

Product range

Profilm3D Optical Profiler
Zeta-20
Zeta-300
Zeta-388

 

Applications

  • Step height: 3D step height from nanometers to millimeters
  • Texture: 3D roughness and waviness
  • Form: 3D bow and shape
  • True Color: Total Focus image of the 3D surface topography
  • Edge rolloff: 3D edge profile measurements
  • Defect review: 3D defect surface typography

Industries

  • Solar: photovoltaic solar cells
  • Semiconductor and compound semiconductor
  • Semiconductor WLCSP (wafer-level chip scale packaging)
  • Semiconductor FOWLP (fan-out wafer-level packaging)
  • PCB (printed circuit board) and flexible PCB
  • MEMS: Micro-electro-mechanical systems
  • Medical devices and microfluidic devices
  • Data storage
  • Universities, research labs and institutes

And more: Contact us with your requirements

Options

ZFT: Zeta Film Thickness

The Zeta-20 offers an integrated broadband spectrometer for transparent thin film thickness measurements from 30nm to 100µm. It is capable of measuring single layer or multi-layer stack film thickness with the user selecting the refractive index values from the library of materials. The film thickness can be mapped across the sample to determine the sample uniformity. ZFT works on some of the least reflective surfaces, such as solar cells with reflectance of less than 0.1%. Many film thickness tools have difficulty obtaining a signal from these type of surfaces, since they depend on specular reflected light to calculate phase change or other parameters. The broadband white light and normal incidence illumination allow the tool to be used for a variety of optically transparent films with low reflectance.

ZXI: Zeta Vertical-Scanning Interferometry

The Zeta-20 supports phase scanning interferometry (PSI) and vertical scanning interferometry (VSI) when combined with the piezo stage and an interferometric objective lens. PSI enables fast measurements of step heights from angstroms to hundreds of nanometers. VSI enables measurement of step heights from hundreds of nanometers to hundreds of microns. Both are performed at better than nanometer-level resolution, independent of the objective numerical aperture.

ZIC: Zeta Interference Contrast

The Zeta-20 utilizes Nomarski differential interference contrast microscopy to provide enhanced imaging of fine surface detail. Nomarski microscopy uses polarization and a prism to change the phase to enhance changes in slope on the sample surface. This enables visualization of defects on super-smooth surfaces, such as a monolayer of a contaminant. The ZIC scanning mode can convert these images into quantitative measurements of sub-nanometer level roughness by correlating the change in slope with roughness measured by another technique.

ZSI: Zeta Shearing Interferometer

The Zeta-20 shearing interferometer measurement technique (ZSI) enhances the ZIC measurement by adding a change in the phase. Multiple images are collected with different phases, then processed through advanced algorithms to generate a quantitative measure of surface topography with angstrom-level resolution. This technique does not require interferometric objectives and has no Z-stage scanning, resulting in high-resolution measurements from angstroms to 80nm.

Objective Lenses

A broad range of objective lenses are available including 1.25x – 150x normal objectives, long working distance objectives, ultra-long working distance objectives, refractive index corrected objectives, through transmissive objectives, liquid immersion objectives, and vertical scanning interferometry objectives.

Couplers

The Zeta-20 can be configured with four different optical couplers to change the optics magnification. The system can be configured with the 1x coupler to keep the native magnification, or configured with 0.35x, 0.5x, or 0.63x couplers to increase the magnification.

Objective Lens Turret

The Zeta-20 can be configured with a 5 or 6 position manual turret and an objective lens sensor for automatic objective identification. The system can also be configured with a 6 position motorized turret for fully automated operation.

Sample Lighting

The Zeta-20 uses dual high-brightness white LEDs as standard lighting. Backlighting through the sample chuck is also available to enhance the light for challenging transparent samples. The Zeta-20 also supports darkfield lighting from the side.

Offline Analysis Software

The Zeta-20 offline software has the same data analysis and recipe creation capability that exists on the tool. This enables the user to create recipes and analyze data without using valuable tool time.

Apex Analysis Software

Apex analysis software enhances the tool’s standard data analysis capability with an extended suite of leveling, filtering, step height, roughness, and surface topography analysis techniques. Apex supports ISO roughness calculation methods plus local standards, such as ASME. Apex also serves as a report writing platform with the capability to add text, annotations, and pass/fail criteria. Apex is offered in eight languages.

Stitching Software

Automated image stitching software utilizes the motorized XY stage to combine adjacent scans to generate a stitched data set that is larger than a single field of view. The system automatically measures every site, aligns the images, and combines them into one data set. The results can be analyzed like any other results file.

Automated Sequencing Software

Automated sequencing software utilizes the motorized XY stage to allow the user to program measurement locations on the sample. The system will automatically measure each site and save the results in user-defined folders. An output report with sample statistics is generated to summarize the results. Advanced sequencing software includes pattern recognition to automatically align the sample. This enables fully automated measurements, reducing the impact of operator error. Auto calibration can also be enabled when using embedded standards on the stage.

Step Height and Film Thickness Standards

The Zeta-20 uses thin and thick film NIST traceable step height standards offered by VLSI Standards. The standards feature an etched quartz step with a chrome coating. A step height range of 8nm to 250µm is available. An available certified multi-step standard has nominal step heights of 8, 25, 50, and 100µm. The standard has various pitch patterns for XY calibration. A certified film thickness standard is available for ZFT that includes a reference silicon surface and a nominal 270nm silicon dioxide film thickness. Reference roughness and mirror samples are also available.

Isolation Tables

The Zeta-20 has passive isolation feet built into the base of the system. If additional isolation is required, passive and active benchtop isolation tables are available.

Sample Chucks

The Zeta-20 has a range of chucks available to support application requirements. Solar samples require a 156mm sample chuck or a solar tilt edge chuck to tilt the sample to measure the edge. Backlight chucks are available for transparent substrates to support transmitted illumination. A 300mm wafer chuck is available. If we do not have the chuck you need, please contact us with your requirements.

Stages

The Zeta-20 can be configured with a variety of stages to enhance system performance. A piezo Z-axis stage can be added to improve Z resolution for measurement of nanometer-level step heights with the ZDot or ZXI measurement modes. The Z-stage can be mounted on a swivel to enable rotating the head about the sample to change the angle of incidence on the surface. The XY stage can be configured with manual 100 or 300mm travel or motorized 150 or 200mm travel. A manual rotary stage can be added to the XY stage. A manual tip and tilt stage can be added to level the stage for interferometry measurements.

Downloads

Zeta-20 True Colour 3D Optical Profiler Brochure

Zeta-20 True Colour 3D Optical Profiler Brochure

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To learn more about KLA’s Zeta range of 3D optical profilers, contact the technical experts at CN Tech today. We would be happy to provide more information, and discuss your surface profilometry requirements in more detail. Contact us today!