XYZ Mini Stages

High precision UHV specimen translator having X, Y and Z motions.



Prevac are a world leader in the design and production of analytical and deposit scientific and research equipment. Their systems operate in a high and ultra high vacuum environment. They design and construct UHV and HV systems fully adapted to the individual requirements of research projects and industrial applications.


The standard mounting flange is DN 63CF and the standard travelling flange is DN 40CF. All three axes are merged in one miniature stage that delivers outstanding performance at exceptionally low prices. The translators can work in any orientation.

Additional information
Only the Z movement can be motorised.

Technical data

Base flange DN 63CF or DN 100CF
Travelling flange DN 40CF
X, Y range ± 12.5 mm
resolution 5 μm
Z range 75 – 100 mm
resolution (manual) 0.5 mm
Bakeout temperature up to 150 °C
Compressed / Extended Length Compressed length [mm]
Extended length [mm]
Z range [mm] DN 40/40CF
bellow ID39
bellow ID39
bellow ID39
75 179
100 179.5


The XYZ mini manipulator has been designed for ease and convenience of use. X and Y movement is ± 12.5 mm, depending on the accessories that are fitted. Z movement is 75-250 mm, depending on the application.



Manipulators and Transferring Systems Brochure

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Service Support

Comprehensive repairs and servicing

Annual Support Programs

Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.

CN Tech’s Support Programs are an economical way to guarantee optimal working condition:

  • Annual Preventive Maintenance
  • Priority Technical Assistance
  • Preferred Parts Availability
  • On-Site User Training
  • Remote Diagnostics
  • No surprise repair expense and much more!

Support Contact Example

An example of our service and support contracts are shown below:


Metrology & Instrumentation Annual Support Programs 2022/23

CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

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