XY Stages
Precision, high rigidity UHV specimen translator having X and Y motions.
Manufacturer
Prevac
Prevac are a world leader in the design and production of analytical and deposit scientific and research equipment. Their systems operate in a high and ultra high vacuum environment. They design and construct UHV and HV systems fully adapted to the individual requirements of research projects and industrial applications.
Description
The standard mounting flange is DN 160CF. A DN 100CF mounting flange version is also available. The stage can work in any orientation. The XY stages has been designed for ease and convenience of use. X and Y movement are ± 25.0 mm, depending on the accessories that are fitted. They can also be used to reposition a chamber port with an axis that is parallel to, but slightly off, the desired direction. In this last usage it is sometimes referred to as an XY adjuster and is a very economical alternative to other devices.
Technical data
Base flange | DN 100CF or DN 160CF | |||
Travelling flange | DN 63CF or DN 100CF | |||
Max free diameter | 102 mm | |||
X, Y range | ± 12.5 mm or ± 25 mm | |||
positional control | micrometer / stepper motor (option) | |||
resolution (manual/motorised) | 5 μm / 1 μm | |||
Bakeout temperature | up to 150 °C | |||
MAXIMUM XY RANGES |
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Base flange | Travelling flange | Ø B [mm] | X,Y range [mm] real stroke (circle) |
X,Y range [mm] real stroke (square) |
DN 100CF | DN 63CF | Ø 38 | ± 25) | ± 17.5 |
DN 100CF | DN 100CF | Ø 62 | ± 12.5 | ± 9 |
DN 160CF | DN 63CF | Ø 38 | ± 25 | ± 17.5 |
DN 160CF | DN 100CF | Ø 75 | ± 25 | ± 17.5 |
XY Stage DN 160/100CF ranges (example) |
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Ø B [mm] | ||||
ØA-ØB)/2 = real stroke (circle) | Ø 50 | Ø 80 | Ø 100 | |
DN 160/100CF XY ± 12.5 mm mounting flange bore ØA=125 mm | ± 12.5 | ± 12.5 | ± 12.5 | |
DN 160/100CF XY ± 12.5 mm mounting flange bore ØA=125 mm | ± 25 | ± 22.5 | ± 12.5 | |
DN 160/100CF XY ± 12.5 mm mounting flange bore ØA=125 mm | ± 25 | ± 25 | ± 25 |
Downloads
Manipulators and Transferring Systems Brochure
Service Support
Comprehensive repairs and servicing
Annual Support Programs
Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.
With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.
CN Tech’s Support Programs are an economical way to guarantee optimal working condition:
- Annual Preventive Maintenance
- Priority Technical Assistance
- Preferred Parts Availability
- On-Site User Training
- Remote Diagnostics
- No surprise repair expense and much more!
Support Contact Example
An example of our service and support contracts are shown below:
Metrology & Instrumentation Annual Support Programs 2024/25
CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.