XY Stages

Precision, high rigidity UHV specimen translator having X and Y motions.

Manufacturer

Prevac

Prevac are a world leader in the design and production of analytical and deposit scientific and research equipment. Their systems operate in a high and ultra high vacuum environment. They design and construct UHV and HV systems fully adapted to the individual requirements of research projects and industrial applications.

Description

The standard mounting flange is DN 160CF. A DN 100CF mounting flange version is also available. The stage can work in any orientation. The XY stages has been designed for ease and convenience of use. X and Y movement are ± 25.0 mm, depending on the accessories that are fitted. They can also be used to reposition a chamber port with an axis that is parallel to, but slightly off, the desired direction. In this last usage it is sometimes referred to as an XY adjuster and is a very economical alternative to other devices.

Technical data

Base flange DN 100CF or DN 160CF
Travelling flange DN 63CF or DN 100CF
Max free diameter 102 mm
X, Y range ± 12.5 mm or ± 25 mm
positional control micrometer / stepper motor (option)
resolution (manual/motorised) 5 μm / 1 μm
Bakeout temperature up to 150 °C
MAXIMUM
XY RANGES
Base flange Travelling flange Ø B [mm] X,Y range [mm]
real stroke (circle)
X,Y range [mm]
real stroke (square)
DN 100CF DN 63CF Ø 38 ± 25) ± 17.5
DN 100CF DN 100CF Ø 62 ± 12.5 ± 9
DN 160CF DN 63CF Ø 38 ± 25 ± 17.5
DN 160CF DN 100CF Ø 75 ± 25 ± 17.5
XY Stage DN
160/100CF ranges (example)
Ø B [mm]
ØA-ØB)/2 = real stroke (circle) Ø 50 Ø 80 Ø 100
DN 160/100CF XY ± 12.5 mm mounting flange bore ØA=125 mm ± 12.5 ± 12.5 ± 12.5
DN 160/100CF XY ± 12.5 mm mounting flange bore ØA=125 mm ± 25 ± 22.5 ± 12.5
DN 160/100CF XY ± 12.5 mm mounting flange bore ØA=125 mm ± 25 ± 25 ± 25

Downloads

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Manipulators and Transferring Systems Brochure

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Service Support

Comprehensive repairs and servicing

Annual Support Programs

Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.

CN Tech’s Support Programs are an economical way to guarantee optimal working condition:

  • Annual Preventive Maintenance
  • Priority Technical Assistance
  • Preferred Parts Availability
  • On-Site User Training
  • Remote Diagnostics
  • No surprise repair expense and much more!

Support Contact Example

An example of our service and support contracts are shown below:

Brochures

Metrology & Instrumentation Annual Support Programs 2022/23

CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

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