Which Site Survey System is for you?

The SC11 Analysis System is purpose-designed for making site surveys for SEMs, TEMs and similar sensitive equipment. It has become standard equipment for electron microscope and electron beam lithography instrument vendors and consultants.

Manufacturer

Spicer Consulting

Spicer Consulting has built a world-wide reputation in magnetic field cancelling for electron microscopes and similar instruments. Today, working with equipment manufacturers and users alike, the company is recognised as an industry expert in maximising the performance of electron microscopes, electron beam lithography systems, CD-SEM and focused ion beam tools. Spicer Consulting magnetic field cancelling systems protect sensitive equipment in the world's leading laboratories, universities and semiconductor manufacturing plants, as well as in the test facilities of electron and ion beam equipment manufacturers. Its magnetic field, vibration and acoustic analysis systems have been adopted as standard equipment for the conduct of site surveys by leading equipment manufacturers.

Key Features

  • Measures acoustic and floor vibration spectra and compares to microscope specification
  • Measures 50-60Hz AC line and 16.67 Hz train line magnetic fields
  • Measures 9 KHz magnetic fields from overhead wafer transports in semiconductor clean rooms
  • Measures slowly varying (psuedo DC) magnetic fields from trains, trams, trolley buses and lifts (elevators)
  • Software runs on Windows XP/Vista/7
  • Measurement programs: Oscilloscope, Spectrum Analyser and Chart Recorder included
  • Automation programs: Wizard (runs a single measurement) and Survey (runs a whole survey) included
  • Results presentation program: SCplot included
  • Connects to computer using USB
  • Laptop computer optional

Overview

All SC11 models measure and analyse magnetic fields, vibrations and acoustics in a compact integrated system. The system is accurate, easy to operate with the minimum of training and produces results displayed graphically in a user friendly form.

SC11 Compact Analysis System

  • Lower Cost
  • Smaller
  • Easy to Use
  • Can run without AC power.
  • 1 x 3-axis AC magnetic field sensor
  • 1 x Accelerometer input
  • 1 x BNC input
  • 1 x Accelerometer included
  • 1x Sound Level meter included
  • Medium size carrying case included
  • Optional flux gate magnetometer can be added to measure DC magnetic fields
  • Recommended for SEM site surveys

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SC11 Sensor Interface Analysis System

  • Configure your own system
  • Higher performance
  • More sensor options
  • SC11 Sensor Interface included
  • AC powered 120/240V, 50/60 Hz
  • 2 x 3-Axis Magnetic Field Sensor inputs
  • 3 x Accelerometer inputs
  • 1 x Precision microphone input
  • 1 x BNC input
  • Medium size carrying case included
  • All sensors optional
  • Recommended for SEM site surveys
  • Recommended for TEM site surveys using 2 Magnetic field sensors to check field uniformity
  • Use 3 accelerometers to measure X, Y and Z vibrations at the same time
  • Precision microphone sensitive to lower frequencies

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SC11 Auto Survey System

  • The ultimate SC11/SI system for automated surveys
  • SC11 Sensor Interface included
  • AC powered 120/240V, 50/60 Hz
  • 2 x 3-axis DC magnetic field sensors included
  • 3 x accelerometers included
  • 1 x Precision microphone incuded
  • 1 x BNC input
  • Tripod for sensors incuded
  • Large carrying case included
  • Recommended for SEM site surveys
  • Recommended for TEM site surveys using 2 Magnetic field sensors to check field uniformity
  • Use 3 accelerometers to measure X, Y and Z vibrations at the same time
  • Precision microphone sensitive to lower frequencies

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If you would like to learn more about Site Survey Systems, contact our experienced technical team today. We would be happy to help you find the right solution for your needs. Contact us today!