UNECS Automatic High-speed Spectroscopic Ellipsometer

An automatic stage and auto focus system allow the UNECS Automatic range to provide film thickness mapping of a samples entire surface. Maps can be generated in both 2D and 3D with colour thickness maps. A range of 3 models support 150, 200 and 300mm diameter samples.

Manufacturer

ULVAC

ULVAC Technologies was established in 1992 as the US subsidiary of ULVAC, Inc. Headquartered in Methuen, Massachusetts, ULVAC Technologies provides Sales and Services to all countries in Western Hemisphere. In addition, this facility is equipped with a class-10 clean-room for process development, customer demonstration and manufacturing of the ENVIRO solvent-free dry photo resist stripper and Compound Semiconductor Materials Etch Systems. Other in-house services include Foundry Etch (for Deep Oxide and Compound Semiconductor materials), Thermal Processing, Materials Characterization, and Vacuum Pump/Leak Detector Repair.

Key Features

  • Compact Size with Small Footprint
  • Ultra-Fast Measurement
  • Reliable & Low Maintenance Design
  • Automatic Stage
  • 2D & 3D Thickness Maps
  • Multiple Wavelength Range Options

Ultra-Fast Spectroscope Ellipsometry

ULVAC have taken ellipsometry to the next level with an innovative and unique snapshot method for measurement. The UNECS range provides high speed, accurate and repeatable measurements in a compact and affordable form. UNECS ellipsometers measure as fast as 20ms per point. Compared to conventional ellipsometers, ULVAC's snapshot technology is also highly reliable and low maintenance, contain fewer moving or consumable parts.

Automatic Ellipsometry

The UNECS automatic range is available in 3 models, for 150mm, 200mm and 300mm diameter samples. An auto mapping R-θ sample stage and auto focus system can measure film thickness across the full surface of a sample. Thickness maps can be produced in 2D and 3D, with thickness distribution displayed with a colour key.

Measurements are high-speed, as fast as 20ms per point. There are 2 supported spectral ranges, the standard 530nm to 750nm and a visible wavelength spectral range between 380nm to 760nm.

With ULVAC's novel snapshot measurement system, the UNECS ellipsometers are dependable and easy to maintain. There are no moving parts in the measurement system, and the only consumable part is the halogen bulb light source. ULVAC UNECS ellipsometers can be relied up for fast, efficient and cost-effective measurement in demanding environments.

Product range

UNECS Portable High-speed Spectroscopic Ellipsometer
UNECS Automatic High-speed Spectroscopic Ellipsometer

Downloads

High-speed Spectroscopic Ellipsometer [ENECS Series] Brochure

High-speed Spectroscopic Ellipsometer [ENECS Series] Brochure

To learn more about the ultra-fast automatic measurement capabilities offered by ULVAC, contact us today and request more information. The technical specialists at CN Tech would be pleased to discuss your film thickness requirements in detail. Contact us today!