UNECS Automatic High-speed Spectroscopic Ellipsometer

UNECS Automatic High-speed Spectroscopic Ellipsometer

An automatic stage and auto focus system allow the UNECS Automatic range to provide film thickness mapping of a samples entire surface. Maps can be generated in both 2D and 3D with colour thickness maps. A range of 3 models support 150, 200 and 300mm diameter samples.

Manufacturer

ULVAC

ULVAC Technologies was established in 1992 as the US subsidiary of ULVAC, Inc. Headquartered in Methuen, Massachusetts, ULVAC Technologies provides Sales and Services to all countries in Western Hemisphere. In addition, this facility is equipped with a class-10 clean-room for process development, customer demonstration and manufacturing of the ENVIRO solvent-free dry photo resist stripper and Compound Semiconductor Materials Etch Systems. Other in-house services include Foundry Etch (for Deep Oxide and Compound Semiconductor materials), Thermal Processing, Materials Characterisation, and Vacuum Pump/Leak Detector Repair.

Key Features

  • Compact Size with Small Footprint
  • Ultra-Fast Measurement
  • Reliable & Low Maintenance Design
  • Automatic Stage
  • 2D & 3D Thickness Maps
  • Multiple Wavelength Range Options

Ultra-Fast Spectroscope Ellipsometry

ULVAC have taken ellipsometry to the next level with an innovative and unique snapshot method for measurement. The UNECS range provides high speed, accurate and repeatable measurements in a compact and affordable form. UNECS ellipsometers measure as fast as 20ms per point. Compared to conventional ellipsometers, ULVAC's snapshot technology is also highly reliable and low maintenance, contain fewer moving or consumable parts.

Automatic Ellipsometry

The UNECS automatic range is available in 3 models, for 150mm, 200mm and 300mm diameter samples. An auto mapping R-θ sample stage and auto focus system can measure film thickness across the full surface of a sample. Thickness maps can be produced in 2D and 3D, with thickness distribution displayed with a colour key.

Measurements are high-speed, as fast as 20ms per point. There are 2 supported spectral ranges, the standard 530nm to 750nm and a visible wavelength spectral range between 380nm to 760nm.

With ULVAC's novel snapshot measurement system, the UNECS ellipsometers are dependable and easy to maintain. There are no moving parts in the measurement system, and the only consumable part is the halogen bulb light source. ULVAC UNECS ellipsometers can be relied up for fast, efficient and cost-effective measurement in demanding environments.

Downloads

Brochures

High-speed Spectroscopic Ellipsometer [ENECS Series] Brochure

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Service Support

Comprehensive repairs and servicing

Annual Support Programs

Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.

CN Tech’s Support Programs are an economical way to guarantee optimal working condition:

  • Annual Preventive Maintenance
  • Priority Technical Assistance
  • Preferred Parts Availability
  • On-Site User Training
  • Remote Diagnostics
  • No surprise repair expense and much more!

Support Contact Example

An example of our service and support contracts are shown below:

Brochures

Metrology & Instrumentation Annual Support Programs 2022/23

CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

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