The uNano is a micromechanical workstation specifically designed for undergraduate laboratories. Based on KLA’s industry-grade mechanical testers, the uNano performs experiments in demanding environments. Designed using a patented Depth Sensing Actuator (DSA), the uNano is a safe and robust testing platform for any microscopic mechanical test. The built-in XYZ motion system allows remote sample positioning, and an integrated microscope allows specimen visualization and test-site selection. Additional modular options expand the range of testing modes from the standard force/displacement to oscillatory, fatigue, tribology, surface mapping, high temperature, and more.



A global technology leader who make an impact by creating solutions that drive progress and transform industries. Collaboration is the key to their success. KLA provide leading-edge technology and devices using advanced inspection tools, metrology systems, and computational analytics. Their solutions accelerate tomorrow’s electronic devices. The enable evolution and innovation in the data era across key industries including automotive, mobile and data center.  


Key Features

  • InForce 1000 DSA for capacitance displacement measurement and electromagnetic force actuation with interchangeable tips and platens
  • Optional InForce 50 DSA, providing maximum 50mN normal force for measuring soft materials, thin films, and small structures
  • InQuest high-speed controller electronics, enabling up to 100kHz D/A rate and 20us time constant
  • XYZ motion system with easy mounting magnetic sample holder
  • High stiffness oriented carbon-fiber gantry with integrated vibration isolation
  • Integrated microscope with digital zoom for precise targeting and imaging
  • InView software package with RunTest, ReviewData, InFocus reporting, InView University online training, and InView mobile application
  • Workbook and sample kit for microstructure & strength of 1018 Steel, Al-Cu, and TiN films


A variety of different types of tests you can run with your uNano:

- Structure/ property/process

- Strength of materials

- Plasticity

- Viscoelasticity

- Hardness testing

- Strain rate

- Statistical analysis

Product range

Nano Indenter® G200
Nano Indenter® G200X


  • Microhardness (Vickers) testing
  • Depth sensing indentation hardness and modulus (Oliver-Pharr)
  • ISO 14577 hardness testing
  • Polymer tan delta, storage & loss modulus
  • Scratch and wear testing
  • Strength of materials
  • Statistical analysis of material properties
  • Correlation of mechanical properties to material structure and processes
  • Strain rate effects
  • High temperature mechanical testing
  • Surface property mapping


  • Universities, research labs and institutes
  • Semiconductor and packaging industry
  • Polymers and plastics
  • MEMS: Micro-electro-mechanical systems/nanoscale universal testing
  • Ceramics and glass
  • Metals and alloys
  • Pharmaceuticals
  • Coatings and paints
  • Polymer manufacturing
  • Composites
  • Batteries and energy storage


Continuous Stiffness Measurement (CSM)

Continuous stiffness measurement is used to quantify dynamic material properties, such as strain rate and frequency-induced effects. The CSM technique involves oscillating the probe during indentation to measure properties as a function of depth, force, time, or frequency. The option comes with a constant strain rate experiment that measures hardness and modulus as a function of depth or load, which is the most common test method used across academia and industry. CSM is also used for other advanced measurement options, including the ProbeDMA™ method for storage and loss modulus measurements and AccuFilm™ substrate-independent measurements. The CSM is integrated into the InQuest controller and InView software to deliver ease of use and data quality.

InForce 50 Depth Sensing Actuator

The InForce 50 actuator performs nanomechanical tests with forces up to 50mN. The patented electromagnetic force application ensures robust measurements and long-term force and displacement stability. Industry-leading mechanical design ensures that harmonic motion is constrained to one degree of freedom so that force and displacement are controlled along a single axis. The InForce 50 actuator is compatible with the CSM, NanoBlitz, ProbeDMA, biomaterials, sample heating, scratch, wear and ISO 14577 testing options. Tips are interchangeable among the entire line of InForce and Gemini actuators.

300°C Sample Heating

The 300°C sample heating option allows the sample to be placed into a chamber for uniform heating while simultaneously undergoing tests with the InForce 50 actuator. The option includes high-precision temperature control, inert gas backfill to reduce oxidation, and cooling to remove waste heat. ProbeDMA, AccuFilm, NanoBlitz and CSM are all compatible with the sample heating option.

NanoBlitz 3D

NanoBlitz 3D utilizes the InForce 50 or InForce 1000 actuator and a Berkovich tip to generate 3D maps of nanomechanical properties for high-E (> 3GPa) materials. NanoBlitz performs up to 100,000 indents (300×300 array) at < 1s per indent, and provides Young’s modulus (E), hardness (H), and stiffness (S) values at a specified load for each indent in the array. The large number of tests enables increased statistical accuracy. Histogram charts show multiple phases or materials. The NanoBlitz 3D package includes visualization and data handling capabilities.

NanoBlitz 4D

NanoBlitz 4D utilizes the InForce 50 or InForce 1000 actuator and a Berkovich tip to generate 4D maps of nanomechanical properties for both low-E/H and high-E (>3GPa) materials. NanoBlitz performs up to 10,000 indents (30×30 array) at 5-10s per indent, and provides Young’s modulus (E), hardness (H), and stiffness (S) values as a function of depth for each indent in the array. NanoBlitz 4D utilizes a constant strain rate method. The package includes visualization and data handling capabilities.

AccuFilm™ Thin Film Method Pack

The AccuFilm Thin Film Method Pack is an InView test method based on the Hay-Crawford model for measuring substrate-independent material properties using Continuous Stiffness Measurement (CSM). AccuFilm corrects for substrate influence on film measurements for hard films on soft substrates, as well as for soft films on hard substrates.

ProbeDMA™ Polymer Method Pack

The Polymer Pack provides the ability to measure the complex modulus of polymers as a function of frequency. The pack includes a flat-punch tip, a viscoelastic reference material, and a test method for evaluation of viscoelastic properties. This measurement technique is key to characterizing nanoscale polymers and polymer films that are not well-served by traditional dynamic mechanical analysis (DMA) test instruments.

Biomaterials Method Pack

The Biomaterials Method Pack provides the ability to measure the complex modulus of biomaterials with shear moduli on the order of 1kPa, and utilizes Continuous Stiffness Measurement (CSM). The pack includes a flat-punch tip and a test method for evaluation of viscoelastic properties. This measurement technique is key to characterizing small scale biomaterials that are not well-served by traditional rheometer instruments.

Scratch and Wear Testing Method Pack

Scratch testing involves the application of either a constant or ramped load to an indenter while moving across the sample surface at a specified velocity. Scratch testing allows characterization of numerous materials such as thin films, brittle ceramics and polymers.


DataBurst enables systems equipped with InView software and the InQuest controller to record displacement data at rates > 1kHz for measuring high strain step loads, pop-in and other high speed events. iNano systems outfitted with the User Method Development option can also modify methods to work with DataBurst.

User Method Development for InView Control Software

InView is a powerful, intuitive experiment-scripting platform that can be used for designing novel or complex experiments. Experienced users can set up and perform virtually any small-scale mechanical test using the iMicro system equipped with the exclusive InView option.

Active Vibration Isolation with Modular Rack System

The optional high-performance active vibration isolation system provides additional vibration isolation for the iMicro nanoindenter, on top of its built-in vibration isolation. This easy-to-install system provides vibration reduction in all six degrees of freedom, with no tuning required. A Modular Rack System houses all components conveniently within an integrated rack.

True Test I-V Electrical Measurements

Controlled through the InView software, the True Test I-V option for the iMicro nanoindenter utilizes a precision ammeter and voltage source, a through-tip electrical path, and a conductive tip. This design allows the user to apply specific voltages to a sample and measure the current at the tip while simultaneously operating the InForce 50 or InForce 1000 actuator.

Linear Optical Encoders

The Linear Optical Encoder (LOE) option for the iMicro is integrated into the X and Y motion stages, and increases the positional accuracy and throughput of the testing process.

Indenter Tips and Calibration Samples

The InForce 50, InForce 1000 and Gemini actuators utilize interchangeable tips. A wide variety of sharp indenters are available, such as Berkovich, cube corner and Vickers, as well as flat punches, sphere punches, and other geometries. Standard reference materials and calibration standards are also available for the entire product line.


uNano™ Brochure

uNano™ Brochure

Would you like to find out more about the advanced capabilities uNano? Contact us today to request further information. Our experienced technical team would be happy to discuss with you how the iMicro’s flexible design can suit your application. Contact us today!