Thickness Monitors Controller TMC13

Newest technology electronics designed for monitoring and controlling any coating and deposition processes. Up to six channel inputs and two additional vacuum gauge channels together with 7″ TFT display make this unit really unique and universal.

Manufacturer

Prevac

Prevac are a world leader in the design and production of analytical and deposit scientific and research equipment. Their systems operate in a high and ultra high vacuum environment. They design and construct UHV and HV systems fully adapted to the individual requirements of research projects and industrial applications.

Key Features

  • Up to 6 channels for thickness monitor sensors with quartz balances
  • 2D real time chart module
  • Two inputs for most active vacuum gauges
  • Up to 8 shutters and I/O reprogrammable
  • Up to 8 shutters and I/O reprogrammable
  • Rwo reprogrammable analogue outputs for rate and thickness monitoring with 16 bits resolution
  • Industry standard 6 MHz Crystal
  • Frequency resolution: 0.1 Hz (TM13) or 0.01 Hz (TM14)
  • Operation of up to two multi-crystal sensor heads (pneumatic or stepper motor)
  • Compact design
  • One-touch material change
  • Favourites list for frequently used materials
  • One-touch units change
  • Save individual user profile
  • Built-in video tutorials
  • LabVIEW libraries

Description

Sensor inputs can be assigned to different materials with individual parameters as well. High speed and high accuracy measuring process controlled by the DSP processor improves the film quality and repeatability. It also brings features of accuracy, stability and instrument configuration. Autosave function for saving your parameters/unit pre-set and applying them automatically after restart.

Available software dedicated to precise rate measurements. Registers changes in the frequency of the quartz resonator in time (in the form of a graph). Allows the user to calculate the evaporation rate from the selected time interval. Suitable for e.g. MBE applications.

Technical data

Supply voltage 100-240 VAC, 50/60 Hz (power consumption max 100 W)
TM sensor inputs channels 6
Thickness 0-9999000 Å
Rate 0 – 9999 Å/s
Compatible sensors
(two channels)
CTR90, TTR91, TTR211, PTR225, PTR90, ITR90, ITR100, Baratron, ANALOG IN, MKS937A, PG105, MG13/14, PKR251/360/361, PCR280, ATMION
Frequency resolution TM13: 0.1 Hz | TM14: 0.01 Hz
Frequency range 2-6 MHz
Thickness resolution TM13: 0.1 Å | TM14: 0.01 Å
Rate resolution TM13: 0.1 Å/s | TM14: 0.01 Å/s
Frequency stability TM13: 0.5 ppm | TM14: 0.5 ppm
Tooling factor 1 – 400%
Measurement units Å, kÅ, nm
Measurement period 100 ms – 2 s (depend on TM type)
Shutter control manual, time, thickness
Shutter time 1 – 1000000 s
Pressure channels inputs 2
Measurement units mbar, Pa, Torr, Psia
Degas time 1 – 3 min
Output ▪ 8 relay outputs (2 outputs with COM NC and NO contacts)
▪ 2 analog outputs: 0-10V (retransmision thickness, rate, pressure)
Inputs 4 digital inputs (in 24V logic)
Communication interface RS232/485, Ethernet
Communication protocol MODBUS-TCP
User interface 7″ TFT display with touchscreen
Interface languages English, German, Polish
Dimensions 212.6 x 128.4 x 260.9 mm (W x H x D)
Weight (approx.) 3 kg

Downloads

Brochures

Instruments with Electronics Brochure

View Brochure

Service Support

Comprehensive repairs and servicing

Annual Support Programs

Your metrology instrumentation is a major investment that is critical to your business operation and success. In today’s competitive climate, it is more important than ever to extend the functionality and peak performance of your metrology equipment years beyond the expiration of your factory warranty. CN Tech’s Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

With over 20 years’ experience servicing and repairing you can be assured that your system is in safe hands. The independent services we offer include system relocation, maintenance visits, parts and consumables, and break down interventions.

CN Tech’s Support Programs are an economical way to guarantee optimal working condition:

  • Annual Preventive Maintenance
  • Priority Technical Assistance
  • Preferred Parts Availability
  • On-Site User Training
  • Remote Diagnostics
  • No surprise repair expense and much more!

Support Contact Example

An example of our service and support contracts are shown below:

Brochures

Metrology & Instrumentation Annual Support Programs 2022/23

CN Tech's Support Programs will help ensure that your investment is protected, and that you and your instrument’s are always operating at peak performance.

Get in touch to discuss your requirements

Make an enquiry

Download PDF

Please add 9 and 1.

Thank you

A download link has been sent to the e-mail address you provided.