Tencor™ P-7 Stylus Profiler

The Tencor P-7 builds on the success of the market leading Tencor P-17 benchtop stylus profiling system. It includes the superior measurement performance of the P-17 technology in a platform that offers a great price-to-features ratio for a benchtop stylus profiler. The Tencor P-7 offers step height measurement capability for steps from a few nanometers to one millimeter, for production and R&D environments. The system supports 2D and 3D measurements of step heights, roughness, bow, and stress for scans up to 150mm without stitching.

 

Manufacturer

KLA

A global technology leader who make an impact by creating solutions that drive progress and transform industries. Collaboration is the key to their success. KLA provide leading-edge technology and devices using advanced inspection tools, metrology systems, and computational analytics. Their solutions accelerate tomorrow’s electronic devices. The enable evolution and innovation in the data era across key industries including automotive, mobile and data center.

 

Key Features

  • Step Height Repeatability of 4Å on a 1μm step
  • Long Scan Over Full 150mm Stage without stitching
  • Low force with constant force control: 0.03 to 50mg
  • Video: 5MP high-resolution color camera
  • Auto Pattern Recognition & Sequencing
  • Advanced Apex 2D & 3D Surface Analysis Software
  • 3D Stress Capability
  • Constant Force Control Sensor
  • Arc correction: Removes error due to arc motion of the stylus
  • Software: Easy-to-use software interface
  • Production capability: Fully automated with sequencing, pattern recognition and SECS/GEM

Accurate & Repeatable Surface Measurement

The KLA P-7 Stylus Profiler is capable of performing scans up to 150mm in length in a single scan, without the need for scan stitching. The full diameter of many wafer samples can be scanned in a single, continuous scan. The P-7 provides one of the longest scan lengths available on the market.

The P-7’s stage is automatic and fully programmable, and can be optionally configured with a motorised theta movement. A variety of sample chucks are available, to support a wide array of measurement applications. A universal vacuum chuck is included as standard, with locating pins for samples 50 to 150mm in diameter.

High Measurement Repeatability

KLA have extensive experience in the development of surface metrology instrumentation, having spent over 40 years enhancing surface measurement technology. The P-7 has been designed to utilise KLA’s cutting-edge UltraLite® sensor, which features constant force control, a high linearity, and unrivalled repeatability and reproducibility. The UltraLite® sensor can achieve a step height repeatability of 4Å on a 1μm step, making the P-7 a market leader for reliability in production environments.

The UltraLite® sensor also features an impressive vertical resolution and range, producing 2D and 3D surface scans with high detail and clarity. Samples with large topography variations can be handled with ease with a wide 1mm Z range.

A Wide Range of 2D & 3D Measurement Applications

A comprehensive range of 2D and 3D measurements are supported by the P-7 Stylus Profiler, for both R&D and production environments. Step height can be measured in both 2D and 3D, with a vertical range from a few nanometres to 1000µm. The constant force control provided by the UltraLite® sensor improves measurement stability, and enables accurate measurement of soft materials, such as photoresist.

2D and 3D texture measurements of roughness and waviness are supported, as well as 2D measurement of form, including bow and shape. The P-7 also has options for 2D and 3D stress measurement. With a stress chuck and motorised theta stage, it is possible to produce 3D stress maps up to 150mm in diameter, without requiring stitching.

Shown left: 3D Surface Topography
Shown right: 3D Stress Mapping

Advanced Automation & Pattern Recognition

For production applications, where efficiency is vital, KLA provide a wide selection of automation capabilities for the P-7. The P-7 Stylus Profiler can be configured for automated defect review, sequencing, pattern recognition, and integration with SECS/GEM and HSMS, to ensure fast and efficient operation.

The P-7 can be pre-taught patterns to automatically recognise and use to align a sample. This enables fully automated measurements, which grants enhanced measurement stability and protects against user errors. For defect review, sample maps can be uploaded identifying areas of the sample to be inspected, and suspected failure points can be highlighted for further inspection. Automation recipes can be seamlessly moved between systems for maximum flexibility.

Product range

Alpha-Step® D-500
Alpha-Step® D-600
Tencor™ P-7
Tencor™ P-17 & P-17 OF
Tencor™ P-170

Applications

  • Step Height: 2D step height
  • Texture: 2D roughness and waviness
  • Form: 2D bow and shape
  • Stress: 2D thin film stress
  • Defect review: 2D and 3D defect surface topography

Industries

  • Universities, research labs, and institutes
  • Semiconductor and compound semiconductor
  • LED: Light emitting diodes
  • Solar
  • MEMS: Micro-electro-mechanical systems
  • Data storage
  • Automotivex us with your requirements

And more: Contact us with your requirements

Options

Stylus Options

The Tencor P-7 has a variety of styli available to support the measurement of step heights, high aspect ratio steps, roughness, sample bow, and stress. The tip radius ranges from 100nm to 50µm and determines the lateral resolution of the measurement. The included angle ranges from 20 to 100 degrees, which specifies the maximum aspect ratio of the measured feature. All styli are manufactured from diamond to reduce wear and increase stylus lifetime.

Sample Chucks

The Tencor P-7 has a range of chucks available to support application requirements. The standard is a universal vacuum chuck with precision locating pins for samples of 50 to 150mm. The universal chuck supports bow and stress measurements with 3-point locators to support the sample in a neutral position. Additional options for solar samples and 200mm universal chucks are available.

Isolation Tables

The Tencor P-7 has both tabletop and free-standing isolation table options. The Granite Isolator™ Series offers tabletop systems that combine granite with high grade silicone gel to provide passive isolation. The Onyz Series tabletop isolation systems use pneumatic air isolators to provide passive isolation. The TMC 63-500 Series isolation table is a free-standing steel frame table that uses pneumatic air isolators to provide passive isolation.

Step Height Standards

The Tencor P-7 uses thin and thick film NIST-traceable step height standards offered by VLSI Standards. The standards feature an oxide step on a silicon die mounted on a quartz block, or an etched quartz step with a chrome coating. A step height range of 8nm to 250µm is available.

Apex Analysis Software

Apex analysis software enhances the standard data analysis capability of the Tencor P-7 with an extended suite of leveling, filtering, step height, roughness, and surface topography analysis techniques. Apex supports ISO roughness calculation methods, plus local standards, such as ASME. Apex can also serve as a report writing platform with the capability to add text, annotations, and pass/fail criteria. Apex is offered in eight languages.

Offline Analysis Software

The Tencor P-7 offline software has the same data analysis and recipe creation capability that exists on the tool. This enables the user to create recipes and analyze data without using valuable tool time.

Pattern Recognition

Pattern recognition uses pre-taught patterns to automatically align the sample. This enables fully automated measurements for enhanced measurement stability by reducing the impact of operator error. Pattern recognition combined with advanced calibrations reduces stage positioning error and enables seamless transfer of recipes between systems.

SECS/GEM and HSMS

SECS/GEM and HSMS communications support factory automation systems and enable remote control of the Tencor P-7. Measurements results are automatically reported to host SPC systems, plus alarms and key calibration/configuration data. The Tencor P-7 is compliant with SEMI standards E4, E5, E30, and E37.

Downloads

Tencor™ P-7 Stylus Profiler Brochure

Tencor™ P-7 Stylus Profiler Brochure

Tencor™ P-7 Stylus Profiler Specification Sheet

Tencor™ P-7 Stylus Profiler Specification Sheet

Benchtop Stylus Profilers Brochure

Benchtop Stylus Profilers Brochure

Would you like to find out more about the unrivalled value and accuracy offered by KLA’s P-7 Stylus Profiler? Contact our experience technical team today. Our specialists are keen to discuss your measurements requirements, and help find the right profilometry solution for you. Contact us today!