Tencor™ P-7 Stylus Profiler
The Tencor P-7 stylus profiler offers step height measurement capability for steps from a few nanometers to one millimeter, for production and R&D environments. The benchtop profiler system supports 2D and 3D measurements of step heights, roughness, bow, and stress for scans up to 150mm without stitching.
Manufacturer
KLA
A global technology leader who make an impact by creating solutions that drive progress and transform industries. Collaboration is the key to their success. KLA provide leading-edge technology and devices using advanced inspection tools, metrology systems, and computational analytics. Their solutions accelerate tomorrow’s electronic devices. They enable evolution and innovation in the data era across key industries including automotive, mobile and data centre.
Key Features
- Step Height: Nanometres to 1000µm
- Low force with constant force control: 0.03 to 50mg
- Scan full diameter of the sample without stitching
- Video: 5MP high-resolution colour camera
- Arc Correction: Removes error due to arc motion of the stylus
- Easy-to-use software interface
- Production capability: Fully automated with sequencing, pattern recognition and SECS/GEM
Accurate & Repeatable Surface Measurement
The KLA P-7 Stylus Profiler is capable of performing scans up to 150mm in length in a single scan, without the need for scan stitching. The full diameter of many wafer samples can be scanned in a single, continuous scan. The P-7 provides one of the longest scan lengths available on the market.
The P-7’s stage is automatic and fully programmable, and can be optionally configured with a motorised theta movement. A variety of sample chucks are available, to support a wide array of measurement applications. A universal vacuum chuck is included as standard, with locating pins for samples 50 to 150mm in diameter.
High Measurement Repeatability
KLA have extensive experience in the development of surface metrology instrumentation, having spent over 40 years enhancing surface measurement technology. The P-7 has been designed to utilise KLA’s cutting-edge UltraLite® sensor, which features constant force control, a high linearity, and unrivalled repeatability and reproducibility. The UltraLite® sensor can achieve a step height repeatability of 4Å on a 1μm step, making the P-7 a market leader for reliability in production environments. The UltraLite® sensor also features an impressive vertical resolution and range, producing 2D and 3D surface scans with high detail and clarity. Samples with large topography variations can be handled with ease with a wide 1mm Z range.
A Wide Range of 2D & 3D Measurement Applications
A comprehensive range of 2D and 3D measurements are supported by the P-7 Stylus Profiler, for both R&D and production environments. Step height can be measured in both 2D and 3D, with a vertical range from a few nanometres to 1000µm. The constant force control provided by the UltraLite® sensor improves measurement stability, and enables accurate measurement of soft materials, such as photoresist.
2D and 3D texture measurements of roughness and waviness are supported, as well as 2D measurement of form, including bow and shape. The P-7 also has options for 2D and 3D stress measurement. With a stress chuck and motorised theta stage, it is possible to produce 3D stress maps up to 150mm in diameter, without requiring stitching.
Shown left: 3D Surface Topography
Shown right: 3D Stress Mapping
Advanced Automation & Pattern Recognition
For production applications, where efficiency is vital, KLA provide a wide selection of automation capabilities for the P-7. The P-7 Stylus Profiler can be configured for automated defect review, sequencing, pattern recognition, and integration with SECS/GEM and HSMS, to ensure fast and efficient operation.
The P-7 can be pre-taught patterns to automatically recognise and use to align a sample. This enables fully automated measurements, which grants enhanced measurement stability and protects against user errors. For defect review, sample maps can be uploaded identifying areas of the sample to be inspected, and suspected failure points can be highlighted for further inspection. Automation recipes can be seamlessly moved between systems for maximum flexibility.
Industries
- Universities, research labs, and institutes
- Semiconductor and compound semiconductor
- LED: Light emitting diodes
- Solar
- MEMS: Micro-electro-mechanical systems
- Data storage
- Automotive
- Medical devices
And more: Contact us with your requirements
Applications
Step Height: 2D and 3D step height
The Tencor P-7 benchtop stylus profiler is capable of measuring 2D and 3D step heights from nanometres to 1000µm. This enables quantification of material deposited or removed during etch, sputter, SIMS, deposition, spin coating, CMP and other processes. The Tencor P-7 has constant force control that dynamically adjusts to apply the same force on the sample surface, regardless of step height. This results in good measurement stability and enables accurate measurement of soft materials, such as photoresist.
Texture: 2D and 3D roughness and waviness
The Tencor P-7 measures 2D and 3D texture, quantifying the sample’s roughness and waviness. Software filters separate the measurement into the roughness and waviness components and calculate parameters, such as the root mean square (RMS) roughness.
Form: 2D and 3D bow and shape
The Tencor P-7 can measure the 2D shape or bow of a surface. This includes measurement of wafer bow that can result from mismatch between layers during device fabrication, such as deposition of multiple layers for the production of semiconductor or compound semiconductor devices. The Tencor P-7 benchtop profiler can also quantify the height and radius of curvature of structures, such as a lens.
Stress: 2D and 3D thin film stress
The Tencor P-7 is capable of measuring stress induced during the manufacture of devices with multiple process layers, such as semiconductor or compound semiconductor devices. The bow of the surface is accurately measured using a stress chuck to support the sample in a neutral position. The change in shape from a process, such as film deposition, is then used to calculate the stress by applying Stoney’s equation. 2D stress is measured with a single scan across the sample diameter for samples up to 200mm without the need to stitch. 3D stress is measured using a combination of 2D scans, with the theta stage rotating between scans to measure the full sample surface.
Defect review: 2D and 3D defect surface topography
Defect Review is used to measure the topography of defects, such as the depth of a scratch. Defect inspection tools identify defects and write the location coordinates to a KLARF file. The Defect Review feature reads the KLARF file, aligns the sample, and allows the user to select defects for 2D or 3D measurement.
Downloads
Tencor™ P-7 Stylus Profiler Brochure 2023
Benchtop Stylus Profilers Brochure
3D Measurement Parameters
Precision Depth Measurement of Shallow SIMS Craters using a KLA Instruments™ Stylus Profilometer
Profiler Pattern Recognition Selection
General Information about Stylus-based Surface Profilers from KLA Instruments™
Multi-Step Analysis Function: Powerful Analytics from KLA Instruments™ Surface Profilers
Topography Sensor Technology for Stylus Profilers
Stylus Product Line
2D Surface Measurement Parameters
Thin Film Stress Measurements using KLA Stylus-Based Profilers
Apex Software
Options
Stylus Options
The Tencor P-7 has a variety of styli available to support the measurement of step heights, high aspect ratio steps, roughness, sample bow, and stress. The tip radius ranges from 100nm to 50µm and determines the lateral resolution of the measurement. The included angle ranges from 20 to 100 degrees, which specifies the maximum aspect ratio of the measured feature. All styli are manufactured from diamond to reduce wear and increase stylus lifetime.
Sample Chucks
The Tencor P-7 has a range of chucks available to support application requirements. The standard is a universal vacuum chuck with precision locating pins for samples of 50 to 150mm. The universal chuck supports bow and stress measurements with 3-point locators to support the sample in a neutral position. Additional options for solar samples and 200mm universal chucks are available.
Isolation Tables
The Tencor P-7 has both table top and free-standing isolation table options. The Granite Isolator™ Series offers table top systems that combine granite with high grade silicon gel to provide passive isolation. The Onyx Series table top isolation systems use pneumatic air isolators to provide passive isolation. The TMC 63-500 Series isolation table is a free-standing steel frame table that uses pneumatic air isolators to provide passive isolation.
Step Height Standards
The Tencor P-7 uses thin and thick film NIST-traceable step height standards offered by VLSI Standards. The standards feature an oxide step on a silicon die mounted on a quartz block, or an etched quartz step with a chrome coating. A step height range of 8nm to 250µm is available.
Apex Analysis Software
Apex analysis software enhances the standard data analysis capability of the Tencor P-7 with an extended suite of levelling, filtering, step height, roughness, and surface topography analysis techniques. Apex supports ISO roughness calculation methods, plus local standards, such as ASME. Apex can also serve as a report writing platform with the capability to add text, annotations, and pass/fail criteria. Apex is offered in eleven languages.
Offline Analysis Software
The Tencor P-7 offline software has the same data analysis and recipe creation capability that exists on the tool. This enables the user to create recipes and analyse data without using valuable tool time.
Pattern Recognition
Pattern recognition uses pre-taught patterns to automatically align the sample. This enables fully automated measurements for enhanced measurement stability by reducing the impact of operator error. Pattern recognition combined with advanced calibrations reduces stage positioning error and enables seamless transfer of recipes between systems.
SECS/GEM and HSMS
SECS/GEM and HSMS communications support factory automation systems and enable remote control of the Tencor P-7. Measurements results are automatically reported to host SPC systems, plus alarms and key calibration/configuration data. The Tencor P-7 is compliant with SEMI standards E4, E5, E30, and E37.
Related Products
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